Growth of semiconductors on hetero-substrates using graphene as an interfacial layer

Patent metadata

Field	Value
Publication number	US-2017194437-A1
Application number	US-201715463804-A
Country	US
Kind code	A1
Filing date	Mar 20, 2017
Priority date	May 24, 2013
Publication date	Jul 6, 2017
Grant date	—

Abstract

Graphene is used as an interfacial layer to grow Si and other semiconductors or crystalline materials including two-dimensional Si and other structures on any foreign substrate that can withstand the growth temperature without the limitation matching condition typically required for epitaxial growth.

First claim

What is claimed is:

1 . An electronic device, comprising:
a substrate; a crystalline graphene layer deposited on the substrate; and a semiconductor material deposited on the graphene layer so that epitaxial layers of the semiconductor material grow on the crystalline graphene layer.

2 . The electronic device as in claim 1 , wherein the graphene layer consists of a single atomic layer of carbon.

3 . The electronic device as in claim 1 , wherein the crystalline graphene layer comprises a plurality of layers of crystalline graphene.

4 . The electronic device as in claim 1 , wherein the substrate comprises one of a SiO 2 /Si substrate, a glass substrate, a metal substrate, or a ceramic substrate.

5 . The electronic device as in claim 1 , wherein the substrate comprises a graphite substrate.

6 . The electronic device as in claim 1 , wherein the semiconductor material comprises silicon.

7 . The electronic device as in claim 1 , wherein the semiconductor material comprises silicene.

8 . The electronic device as in claim 1 , wherein the substrate is one that can withstand a growth temperature without a limitation matching condition required for epitaxial growth.

9 . The electronic device as in claim 1 , wherein the semiconductor material comprises a crystalline material.

10 . The electronic device as in claim 9 , wherein the crystalline material has a 2-dimensional Si structure.

11 . A method of growing semiconductors on hetero-substrates using graphene as an interfacial layer, the method comprising:
providing a substrate; depositing a crystalline graphene layer on the substrate; depositing, using one of e-beam evaporation, molecular beam epitaxy or atomic layer deposition, a silicon epitaxial layer on the crystalline graphene layer so that the silicon epitaxial layer grows on the crystalline graphene layer.

12 . The method of claim 11 , further comprising providing liquid nitrogen in walls of a growth chamber during deposition of the silicon epitaxial layer on the graphene layer.

13 . The method of claim 11 , further comprising rotating the substrate during the depositing the graphene layer.

14 . The method of claim 11 , further comprising heating the substrate to a predetermined temperature so that absorbed Si atoms nucleate and grow into a uniformly crystalized atomic structure.

15 . The method of claim 14 , wherein the predetermined temperature is 700 degrees Celsius.

16 . The method of claim 11 , wherein the substrate comprises SiO 2 /Si substrate.

17 . The method of claim 11 , wherein the substrate comprises one of a glass substrate, a metal substrate, or a ceramic substrate.

18 . The method of claim 11 , wherein the substrate is 300 nm in thickness.

19 . A method comprising:
providing a substrate; transferring a crystalline graphene layer on the substrate; and depositing, using one of e-beam evaporation, molecular beam epitaxy or atomic layer deposition, a silicon epitaxial layer on the graphene layer so that the silicon epitaxial layer grow on the crystalline graphene layer.

20 . The method of claim 19 , wherein the substrate comprises one of a SiO 2 /Si substrate or quartz substrate.

Assignees

• Zhang Yong
• Tsu Raphael
• Yue Naili
• Univ North Carolina Charlotte

Inventors

• Zhang Yong
• Tsu Raphael
• Yue Naili

Classifications

• H10P14/3458

  Monocrystalline · CPC title

• H10P14/3452

  Microstructure · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/3248

  consisting of two layers · CPC title

• H10P14/3238

  being insulating materials · CPC title