Microscope having a correction unit for correcting a variable spherical aberration

Patent metadata

Field	Value
Publication number	US-2017192227-A1
Application number	US-201515327659-A
Country	US
Kind code	A1
Filing date	Jul 21, 2015
Priority date	Jul 21, 2014
Publication date	Jul 6, 2017
Grant date	—

Abstract

A microscope includes at least one correction unit arranged in a beam path for correcting a variable spherical aberration. The correction unit has at least one optical correction element that is arranged in a convergent or divergent area of the beam path such that the optical correction element is movable along an optical axis. The at least one optical correction element has at least one correction surface. A part of the at least one correction surface through which the convergent or divergent area of the beam path passes forms a correction-effective surface section whose radial extension crosswise to the optical axis is adjustable by moving the correction element along the optical axis.

First claim

1 : A microscope comprising:
at least one correction unit arranged in a beam path far correcting a variable spherical aberration, the correction unit having at least one optical correction element that is arranged in a convergent or divergent area of the beam path such that the optical correction element is movable along an optical axis, the at least one optical correction element having at least one correction surface, a part of the at least one correction surface through which the convergent or divergent area of the beam path passes forming a correction-effective surface section whose radial extension crosswise to the optical axis is adjustable by moving the correction element along the optical axis.

2 : The microscope according to claim 1 , wherein the at least one correction element includes an aspherical refractive element or a diffractive element.

3 : The microscope according to claim 1 , wherein a surface form of the at least one correction surface is expressable on the basis of a polynomial expansion.

4 : The microscope according to claim 1 , wherein the at least one correction surface is configured rotation-symmetrically around the optical axis.

5 : The microscope according to claim 1 , wherein the at least one correction surface is formed by an elliptical paraboloid.

6 : The microscope according to claim 1 , wherein the at least one correction surface is configured in such a way that a change of the correction-effective surface section caused by moving the correction element along the optical axis corrects the spherical aberration brought about by a refractive-index mismatch.

7 : The microscope according to claim 1 , further comprising a focus drive that is operationally coupled to the at least one correction unit and is configured to compensate for a defocusing caused by movement of the at least one correction element.

8 : The microscope according to claim 1 , wherein the at least one correction unit has an adjustment lens that is disposed behind the at least one correction element in the beam path and that is configured in such a way that the adjustment lens collimates a light bundle passing through the at least one correction element.

9 : The microscope according to claim 8 , wherein the adjustment lens is configured in such a way that a cross section of the light bundle passing through the at least one correction element is adaptable to a size of an objective pupil.

10 : The microscope according to claim 8 , wherein the adjustment lens has a zoom system.

11 : The microscope according to claim 1 , further comprising an optical element configured to generate the convergent or divergent area of the beam path.

12 : The microscope according to claim 11 , wherein the optical element is a light-conducting fiber.

13 : The microscope according to claim 1 , wherein the microscope is a scanning microscope in which the at least one correction unit is arranged between a main beam splitter and a scanning module.

14 : The microscope according to claim 1 , wherein the microscope is a scanning microscope in which the at least one correction unit is arranged between a light source and a scanning module and/or between a detector and the scanning module.

Assignees

• Leica Microsystems

Inventors

• Schulz Christian
• Schumann Christian
• Gonschior Cornell
• Bauer Tobias

Classifications

• G02B27/425

  in illumination systems (mask illumination systems in photolithographic systems G03F7/70158) · CPC title

• G02B21/0032

  Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06) · CPC title

• G02B6/0005

  the light guides being of the fibre type (G02B6/0003 takes precedence) · CPC title

• G02B27/0955

  Lenses (lenses per se G02B3/00) · CPC title

• G02B13/18

  with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration {(G02B13/002 takes precedence)} · CPC title