Detection device for detecting thickness of vacuum-evaporated film and vacuum evaporation apparatus

Patent metadata

Field	Value
Publication number	US-2017191156-A1
Application number	US-201615224760-A
Country	US
Kind code	A1
Filing date	Aug 1, 2016
Priority date	Jan 5, 2016
Publication date	Jul 6, 2017
Grant date	—

Abstract

Embodiments of the present invention disclose a detection device for detecting a thickness of a vacuum-evaporated film and a vacuum evaporation apparatus, thereby solving, for example, a problem that a conventional detection device results in excessively high production cost due to frequent replacement of a crystal plate. The detection device includes: a crystal plate, a detection structure provided with an opening corresponding to the crystal plate such that evaporated molecules or atoms are deposited on the crystal plate through the opening; and a filter disposed between the opening and the crystal plate.

First claim

What is claimed is:

1 . A detection device for detecting a thickness of a vacuum-evaporated film comprising:
a crystal plate; a detection structure provided with an opening corresponding to the crystal plate, such that evaporated molecules or atoms are deposited on the crystal plate through the opening; and a filter disposed between the opening and the crystal plate.

2 . The detection device of claim 1 , wherein:
the filter comprises a filter screen.

3 . The detection device of claim 2 , wherein:
the filter screen is parallel to the crystal plate.

4 . The detection device of claim 1 , wherein:
the filter comprises two filter screens.

5 . The detection device of claim 4 , wherein:
the two filter screens are parallel to the crystal plate.

6 . The detection device of claim 2 , wherein:
the filter screen comprises a plurality of meshes arranged regularly.

7 . The detection device of claim 6 , wherein:
bore diameters of the meshes are in a range of 0.5-1 mm.

8 . The detection device of claim 2 , wherein:
the filter screen is made of metal material.

9 . The detection device of claim 1 , wherein:
the opening has a circular shape, the filter has a shape of an inverted frustum of cone, and the inverted frustum of cone has a small-diameter-side end surface close to the opening of the detection structure and a large-diameter-side end surface close to the crystal plate.

10 . The detection device of claim 9 , wherein:
the small-diameter-side end surface of the inverted frustum of cone has a diameter that is less than or equal to a bore diameter of the opening, and the large-diameter-side end surface of the inverted frustum of cone has a greater diameter than the bore diameter of the opening.

11 . The detection device of claim 9 , wherein:
the large-diameter-side end surface of the inverted frustum of cone has an area that is not greater than an area of the crystal plate.

12 . The detection device of claim 1 , wherein:
the filter has a circular cylindrical shape, and a stop structure for locking the filter at the opening is disposed on a side of the filter.

13 . The detection device of claim 1 , wherein:
the filter comprises: a plurality of filter screens, and a connection part connecting the plurality of filter screens.

14 . The detection device of claim 13 , wherein:
the connection part surrounds the plurality of filter screens and constitutes a side wall of the filter.

15 . The detection device of claim 1 , wherein:
the detection structure is formed with a passage, and the opening is an opening of the passage on a side away from the crystal plate.

16 . The detection device of claim 15 , wherein:
the passage has a shape of a frustum of cone, and a diameter of the passage on a side facing the crystal plate is greater than a diameter of the passage on the side away from the crystal plate.

17 . The detection device of claim 15 , wherein:
the passage has a circular cylindrical shape.

18 . The detection device of claim 15 , wherein:
the filter is placed in the passage.

19 . The detection device of claim 1 , wherein:
the crystal plate is superposed on the detection structure.

20 . A vacuum evaporation apparatus comprising:
the detection device according to claim 1 .

Assignees

• Boe Technology Group Co Ltd

Inventors

• Jia Wenbin
• Peng Rui
• Wang Xinxin
• Zhu Feifei
• Gao Xinwei

Classifications

• C23C14/542 Primary

  Controlling the film thickness or evaporation rate · CPC title

• G01B7/066

  for measuring thickness of coating (apparatus or processes for the manufacture of piezoelectric or electrostrictive resonators for obtaining desired frequency H03H3/04) · CPC title

• C23C14/546 Primary

  using crystal oscillators · CPC title

• C23C14/545

  using measurement on deposited material · CPC title

• C23C14/24

  Vacuum evaporation · CPC title