Surface force apparatus based on a spherical lens

Patent metadata

Field	Value
Publication number	US-2017167929-A1
Application number	US-201715445019-A
Country	US
Kind code	A1
Filing date	Feb 28, 2017
Priority date	Sep 10, 2015
Publication date	Jun 15, 2017
Grant date	—

Abstract

A force detector and method for using the same includes a lens. A cantilever is below the movable lens. A laser above the movable lens emits a beam of light through the movable lens, such that light reflects from the lens and the cantilever. A camera is configured to capture images produced by the light reflected from the lens and the light reflected from the cantilever. A processor is configured to determine a force between the movable lens and the cantilever based on a change in phase of the interference rings.

First claim

What is claimed is:

1 . A force detector, comprising:
a lens; a cantilever disposed below the movable lens; a laser disposed above the movable lens configured to emit a beam of light through the movable lens, such that light reflects from the spherical surface and the cantilever; a camera configured to capture images produced by the light reflected from the spherical surface and the light reflected from the cantilever; and a processor configured to determine a force between the movable lens and the cantilever based on a change in phase in the captured images.

2 . The force detector of claim 1 , wherein the lens is formed from a lens base material and has a coating on the spherical surface formed from a first material to be tested.

3 . The force detector of claim 1 , wherein the cantilever comprises a cantilever base material and has a coating formed from a second material to be tested.

4 . The force detector of claim 1 , further comprising a motor configured to move the lens and to track changes in lens position.

5 . The force detector of claim 1 , wherein the processor is further configured to determine a deflection of the cantilever based on a change in lens position and a change in a distance between the lens and the cantilever.

6 . The force detector of claim 5 , wherein the processor is further configured to determine the change in distance between the lens and the cantilever according to

Δ



h

=

Δ



p

2



π



(

λ

2


n
0

)

,

where Δh is the change in distance, Δp is the change in phase of interference rings in a captured image, λ is the wavelength of the emitted light, and n 0 is the index of refraction of the medium between the surface of the lens and the cantilever.

7 . The force detector of claim 1 , wherein the lens has a spherical surface with a radius of at least 1 cm and a surface roughness of 2 nm or less and wherein the cantilever has a thickness of at least 10 μm.

8 . The force detector of claim 1 , wherein the lens is in contact with the cantilever and progressively moved away from the cantilever's resting position, such that a force of adhesion causes a deflection in the cantilever and wherein the processor is further configured to repeatedly measure an adhesion force between the lens and the cantilever until the cantilever breaks contact with the lens.

9 . The force detector of claim 8 , wherein the processor is configured to determine the force of adhesion based on a last measured deflection before the cantilever breaks contact with the lens.

10 . A method for force detection, comprising:
emitting a laser beam through a lens to a cantilever positioned below the lens, such that light reflects from a surface of the lens and the cantilever; capturing an image produced by the light reflected from the spherical surface and the light reflected from the cantilever; and determining a force between the lens and the cantilever with a processor based on a change in a phase in the captured image.

11 . The method of claim 10 , wherein the lens is formed from a lens base material and has a coating on a lens surface formed from a first material to be tested.

12 . The method of claim 10 , wherein the cantilever comprises a cantilever base material and has a coating formed from a second material to be tested.

13 . The method of claim 10 , further comprising moving the lens according to a known position change.

14 . The method of claim 10 , wherein determining the force further comprises determining a deflection of the cantilever based on a change in lens position and a change in a distance between the lens and the cantilever.

15 . The method of claim 14 , wherein determining the force further comprises determining the change in distance between the lens and the cantilever according to

Δ



h

=

Δ



p

2



π



(

λ

2


n
0

)

,

where Δh is the change in distance, Δp is the change in phase of interference rings in the captured image, λ is the wavelength of the emitted light, and n 0 is the index of refraction of the medium between a surface of the lens and the cantilever.

16 . The method of claim 10 , wherein the lens has a spherical surface with a radius of at least 1 cm and a surface roughness of 2 nm or less and wherein the cantilever has a thickness of at least 100 μm.

17 . The method of claim 10 , further comprising:
moving the lens into contact with the cantilever; moving the lens away from the cantilever's resting position, such that a force of adhesion causes a deflection in the cantilever; and repeatedly measuring an adhesion force between the lens and the cantilever until the cantilever breaks contact with the lens.

18 . The method of claim 17 , wherein measuring the adhesion force comprises retaining a last measured adhesion force based on the deflection before the cantilever breaks contact with the lens.

Assignees

• IBM

Inventors

• Ellis Arthur W
• Haight Richard A
• Hannon James B
• Tromp Rudolf M

Classifications

• G01L1/24 Primary

  by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis {using infrared, visible light, ultraviolet} · CPC title

• G01B11/161

  by interferometric means · CPC title