Triple mode electrostatic collimator

Patent metadata

Field	Value
Publication number	US-2016379799-A1
Application number	US-201615262087-A
Country	US
Kind code	A1
Filing date	Sep 12, 2016
Priority date	Nov 27, 2013
Publication date	Dec 29, 2016
Grant date	—

Abstract

A system includes a first electrode to receive an ion beam, a second electrode to receive the ion beam after passing through the first electrode, the first and second electrode forming an upstream gap defined by a convex surface on one of the first or second electrode and concave surface on the other electrode, a third electrode to receive the ion beam after passing through the second electrode, wherein the second and third electrode form a downstream gap defined by a convex surface on one of the second or third electrode and concave surface on the other electrode, wherein the second electrode has either two concave surfaces or two convex surfaces; and a voltage supply system to independently supply voltage signals to the first, second and third electrode, that accelerate and decelerate the ion beam as it passes through the first, second, and third electrode.

First claim

What is claimed is:

1 . A method of treating a diverging ion beam, comprising;
accelerating and partially collimating the diverging ion beam between a first electrode and a second electrode to create an accelerated and partially collimated ion beam; and decelerating the accelerated and partially collimated ion beam between the second electrode and a third electrode to generate a fully collimated ion beam.

2 . The method of claim 1 , wherein a ratio of ion velocity of the diverging ion beam to ion velocity of the collimated ion beam is between 0.5 and 2.0.

3 . The method of claim 1 , further comprising:
providing the first electrode with a first concave surface on an exit side of the first electrode; providing the second electrode with a first convex surface opposite the exit side of the first electrode and a second convex surface on an exit side of the second electrode; and providing the third electrode with a second concave surface facing the exit side of the second electrode.

4 . The method of claim 1 , wherein the diverging ion beam comprises a first diverging ion beam, the method further comprising:
accelerating a second diverging ion beam between the first and second electrodes to form a second collimated ion beam, wherein a ratio of ion velocity of the second diverging ion beam to ion velocity of the second collimated ion beam is less than 0.5.

5 . The method of claim 1 , wherein the diverging ion beam comprises a first diverging ion beam, the method further comprising:
decelerating a third diverging ion beam between the second and third electrodes to form a third collimated ion beam, wherein a ratio of ion velocity of the third diverging ion beam to ion velocity of the third collimated ion beam is greater than 2.

6 . The method of claim 1 , further comprising providing a first voltage from a first voltage supply to the first electrode, providing a second voltage from a second voltage supply to the second electrode, and providing a third voltage from a third voltage supply to the third electrode.

7 . The method of claim 6 , further comprising adjusting at least one of the first voltage, the second voltage, and the third voltage independently of at least one other of the first voltage, the second voltage, and the third voltage.

8 . The method of claim 6 , further comprising a controller coordinating operation of the first voltage supply, the second voltage supply, and the third voltage supply to achieve a desired mode of operation.

9 . The method of claim 1 further comprising:
providing the first electrode with a first convex surface on an exit side of the first electrode;
providing the second electrode with a first concave surface opposite the exit side of the first electrode and a second concave surface on an exit side of the second electrode; and
providing the third electrode with a second convex surface facing the exit side of the second electrode.

10 . A method of treating a diverging ion beam, comprising;
providing a first electrode with a first concave surface on an exit side of the first electrode; providing a second electrode with a first convex surface opposite the exit side of the first electrode and a second convex surface on an exit side of the second electrode; providing a third electrode with a second concave surface facing the exit side of the second electrode; and projecting the diverging ion beam toward the first, second, and third electrodes.

11 . The method of claim 10 , further comprising providing a first voltage from a first voltage supply to the first electrode, providing a second voltage from a second voltage supply to the second electrode, and providing a third voltage from a third voltage supply to the third electrode.

12 . The method of claim 11 , further comprising adjusting at least one of the first voltage, the second voltage, and the third voltage independently of at least one other of the first voltage, the second voltage, and the third voltage.

13 . The method of claim 11 , further comprising a controller coordinating operation of the first voltage supply, the second voltage supply, and the third voltage supply to achieve a desired mode of operation.

14 . The method of claim 11 , further comprising accelerating and collimating the diverging ion beam by making the second voltage greater than the first voltage and making the third voltage equal to the second voltage.

15 . The method of claim 11 , further comprising decelerating and collimating the diverging ion beam by making the second voltage equal to the first voltage and making the third voltage greater than the second voltage.

16 . The method of claim 11 , further comprising collimating the diverging ion beam by making the second voltage greater than the first voltage and making the third voltage less than the second voltage.

17 . A method of treating a diverging ion beam, comprising;
providing a first electrode with a first convex surface on an exit side of the first electrode; providing a second electrode with a first concave surface opposite the exit side of the first electrode and a second concave surface on an exit side of the second electrode; providing a third electrode with a second convex surface facing the exit side of the second electrode; and projecting the diverging ion beam toward the first, second, and third electrodes.

18 . The method of claim 17 , further comprising providing a first voltage from a first voltage supply to the first electrode, providing a second voltage from a second voltage supply to the second electrode, and providing a third voltage from a third voltage supply to the third electrode.

19 . The method of claim 18 , further comprising adjusting at least one of the first voltage, the second voltage, and the third voltage independently of at least one other of the first voltage, the second voltage, and the third voltage.

20 . The method of claim 18 , further comprising a controller coordinating operation of the first voltage supply, the second voltage supply, and the third voltage supply to achieve a desired mode of operation.

21 . The method of claim 18 , further comprising accelerating and collimating the diverging ion beam by making the second voltage equal to the first voltage and making the third voltage greater than the second voltage.

22 . The method of claim 18 , further comprising decelerating and collimating the diverging ion beam by making the first voltage greater than the second voltage and making the third voltage equal to the second voltage.

23 . The method of claim 18 , further comprising collimating the diverging ion beam by making the first voltage greater than the second voltage and making the third voltage greater than the second voltage.

Assignees

• Varian Semiconductor Equipment Ass Inc

Inventors

• Sinclair Frank
• Benveniste Victor M

Classifications

• H01J2237/047

  Changing particle velocity · CPC title

• H01J2237/2485

  Electric or electronic means · CPC title

• H01J37/3171 Primary

  for ion implantation · CPC title

• H01J37/1471 Primary

  for centering, aligning or positioning of ray or beam · CPC title

• H01J2237/30472

  Controlling the beam · CPC title