Polymer, organic layer composition, organic layer, and method of forming patterns

Patent metadata

Field	Value
Publication number	US-2016363864-A1
Application number	US-201615172351-A
Country	US
Kind code	A1
Filing date	Jun 3, 2016
Priority date	Jun 10, 2015
Publication date	Dec 15, 2016
Grant date	—

Abstract

A polymer includes a structural unit represented by Chemical Formula 1 and an organic layer composition including the same.

wherein in Chemical Formula 1, A is a carbon cyclic group including at least one hetero atom, B is one of groups in Group 1, where Ar 1 to Ar 4 , R 11 to R 14 , L and m are as defined in the specifiction and * is a linking point. When the carbon cyclic group includes at least two hetero atoms when the carbon cyclic group includes a pentagon cyclic moiety and the pentagon cyclic moiety includes a nitrogen atom (N) as a hetero atom, and the at least two hetero atoms are the same or different:

First claim

What is claimed is:

1 . A polymer comprising a structural unit represented by Chemical Formula 1:

wherein, in Chemical Formula 1,
A is a carbon cyclic group including at least one hetero atom,
B is one of groups in Group 1, and
* is a linking point,
wherein the carbon cyclic group includes at least two hetero atoms when the carbon cyclic group includes a pentagon cyclic moiety and the pentagon cyclic moiety includes a nitrogen atom (N) as a hetero atom, and

wherein the at least two hetero atoms are the same or different:

wherein, in the Group 1,
Ar 1 to Ar 4 are each independently a substituted or unsubstituted C6 to C30 aryl group,
R 11 to R 14 are each independently a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a halogen atom, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C1 to C30 alkoxy group, a substituted or unsubstituted C3 to C30 cycloalkenyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C7 to C20 arylalkyl group, a substituted or unsubstituted C1 to C20 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heteroaryl group, a substituted or unsubstituted C1 to C4 alkylether group, a substituted or unsubstituted C7 to C20 arylalkylene ether group, a substituted or unsubstituted C1 to C30 haloalkyl group, or a combination thereof,

g to j are each independently an integer ranging from 0 to 2,
L is a single bond, a substituted or unsubstituted C1 to C6 alkylene group, a substituted or unsubstituted C6 to C30 arylene group, or a combination thereof,
m is an integer ranging from 1 to 3, and
* is a linking point.

2 . The polymer as claimed in claim 1 , wherein the hetero atom is N, O, S, Te, or Se.

3 . The polymer as claimed in claim 1 , wherein A is a substituted or unsubstituted cyclic group selected from Group 2:

wherein, in Group 2,
Z 1 and Z 12 are O, S, Te, or Se,
Z 2 , Z 5 , Z 6 , and Z 9 are NR a , O, S, Te, or Se,
Z 3 to Z 4 , Z 7 to Z 8 , Z 11 to Z 23 and Z 13 to Z 23 are N, and
R a is hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heterocyclic group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a hydroxy group, a halogen atom or a combination thereof,
wherein in Group 2, a location of linking points is not limited.

4 . The polymer as claimed in claim 1 , wherein in Group 1, Ar 1 to Ar 4 are each independently a substituted or unsubstituted cyclic group selected from Group 3:

wherein in Group 3, a location of linking points is not limited.

5 . The polymer as claimed in claim 1 , wherein the structural unit represented by Chemical Formula 1 includes one of structural units represented by Chemical Formulae 1-1 to 1-8:

wherein, in Chemical Formulae 1-1 to 1-8,
Z 101 and Z 104 are N,
Z 102 is O, S, Te, or Se,
Z 103 is NR a , O, S, Te, or Se,
R a and R 101 are hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heterocyclic group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a hydroxy group, a halogen atom, or a combination thereof, and
* is a linking point.

6 . The polymer as claimed in claim 1 , wherein the polymer has a weight average molecular weight of about 500 to about 20,000.

7 . An organic layer composition, comprising
a polymer including a structural unit represented by Chemical Formula 1 and a solvent:

wherein, in Chemical Formula 1,
A is a carbon cyclic group including at least one hetero atom,
B is one of groups in Group 1, and
* is a linking point,
wherein the carbon cyclic group includes at least two hetero atoms when the carbon cyclic group includes a pentagon cyclic moiety and the pentagon cyclic moiety includes a nitrogen atom (N) as a hetero atom, and
wherein the at least two hetero atoms are the same or different:

wherein, in Group 1,
Ar 1 to Ar 4 are each independently a substituted or unsubstituted C6 to C30 aryl group, R 11 to R 14 are each independently a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a halogen atom, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C1 to C30 alkoxy group, a substituted or unsubstituted C3 to C30 cycloalkenyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C7 to C20 arylalkyl group, a substituted or unsubstituted C1 to C20 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heteroaryl group, a substituted or unsubstituted C1 to C4 alkylether group, a substituted or unsubstituted C7 to C20 arylalkylene ether group, a substituted or unsubstituted C1 to C30 haloalkyl group, or a combination thereof, g to j are each independently an integer ranging from 0 to 2,
L is a single bond, a substituted or unsubstituted C1 to C6 alkylene group, a substituted or unsubstituted C6 to C30 arylene group, or a combination thereof,
m is an integer ranging from 1 to 3, and
* is a linking point.

8 . The organic layer composition as claimed in claim 7 , wherein the hetero atom is N, O, S, Te, or Se.

9 . The organic layer composition as claimed in claim 7 , wherein A is a substituted or unsubstituted cyclic group selected from Group 2:

wherein in Group 2,
Z 1 and Z 12 are O, S, Te, or Se,
Z 2 , Z 5 , Z 6 and Z 9 are NR a , O, S, Te, or Se,
Z 3 to Z 4 , Z 7 to Z 8 , Z 10 to Z 11 and Z 13 to Z 23 is N, and
R a is hydrogen, a substituted or unsubs

Assignees

• Samsung Sdi Co Ltd

Inventors

• Park Yu-Shin
• Kim Tae-Ho
• Choi Yoo-Jeong
• Kang Sun-Hae
• Kwon Hyo-Young
• Kim Sang-Kyun
• Kim Young-Min
• Nam Youn-Hee
• Song Hyun-Ji
• Yoon Byeri
• Lee Dong-Geun
• Jeong Seulgi

Classifications

• G03F7/0752

  in non photosensitive layers or as additives, e.g. for dry lithography · CPC title

• C08G2261/3424

  non-conjugated, e.g. paracyclophanes or xylenes · CPC title

• C08G2261/344

  containing heteroatoms · CPC title

• C09D161/18

  Condensation polymers of aldehydes or ketones with aromatic hydrocarbons or their halogen derivatives only · CPC title

• G03F7/094

  Multilayer resist systems, e.g. planarising layers · CPC title