Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device

Patent metadata

Field	Value
Publication number	US-2016363231-A1
Application number	US-201515121240-A
Country	US
Kind code	A1
Filing date	Feb 10, 2015
Priority date	Feb 24, 2014
Publication date	Dec 15, 2016
Grant date	—

Abstract

A piezoelectric linear actuator includes a laminated piezoelectric actuator, a lower support member that supports the laminated piezoelectric actuator, a pressing member that biases the laminated piezoelectric actuator from the top thereof, a guide member connected to the lower support member to guide the pressing member; and a displacement transmission member which includes a pair of displacement transmission plates, an adjustment screw connected to the pair of displacement transmission plates, an output section connected to the pair of displacement transmission plates, and an elastic body that biases the output section downward.

First claim

1 . A piezoelectric linear actuator comprising:
a laminated piezoelectric actuator; a lower support member that supports the laminated piezoelectric actuator and extends rightward and leftward of the laminated piezoelectric actuator; a pressing member that biases the laminated piezoelectric actuator from the top thereof and extends rightward and leftward of the laminated piezoelectric actuator; a guide member connected to the lower support member at right and left sides of the laminated piezoelectric actuator and guides the right and left sides of the pressing member; and a displacement transmission member that transfers a displacement resulting from a piezoelectric effect of the laminated piezoelectric actuator, the displacement transmission member comprising: a pair of displacement transmission plates which extend along the right and left sides of the laminated piezoelectric actuator and are capable of moving vertically to intersect the lower support member and the pressing member and are connected to each other at the lower part of the lower support member and the upper part of the pressing member; an adjustment screw connected to the pair of displacement transmission plates and being capable of adjusting a relative height with respect to the aforementioned pressing member; an output section connected to the pair of displacement transmission plates at a lower part of the lower support member; and an elastic body that biases the output section downward.

2 . The piezoelectric linear actuator according to claim 1 wherein the pressing member biases the laminated piezoelectric actuator by an elastic member interposed between the guide member and the pressing member.

3 . The piezoelectric linear actuator according to claim 1 wherein the guide member comprises a guide shaft that slidably penetrates the right or left side of the pressing member.

4 . The piezoelectric linear actuator according to claim 1 wherein the guide member comprises a guide shaft that slidably penetrates the right or left side of the pressing member supported by the lower support member.

5 . The piezoelectric linear actuator according to claim 3 further comprising a coil spring fitted around the guide shaft for biasing the pressing member toward the laminated piezoelectric actuator.

6 . The piezoelectric linear actuator according to claim 4 further comprising a coil spring fitted around the guide shaft for biasing the pressing member toward the laminated piezoelectric actuator guided by the guide member.

7 . The piezoelectric linear actuator according to claim 1 wherein the lower support member, the pressing member, the guide member and the displacement transmission member have sizes within a range of a width of the piezoelectric linear actuator.

8 . A piezoelectrically driven valve comprising:
a piezoelectric linear actuator which comprises: a laminated piezoelectric actuator; a lower support member that supports the laminated piezoelectric actuator and extends rightward and leftward of the laminated piezoelectric actuator; a pressing member that biases the laminated piezoelectric actuator from the top thereof and extends rightward and leftward of the laminated piezoelectric actuator; a guide member connected to the lower support member at right and left sides of the laminated piezoelectric actuator and guides the right and left sides of the pressing member; and a displacement transmission member that transfers a displacement resulting from a piezoelectric effect of the laminated piezoelectric actuator, the displacement transmission member comprising: a pair of displacement transmission plates which extend along the right and left sides of the laminated piezoelectric actuator and are capable of moving vertically to intersect the lower support member and the pressing member and are connected to each other at the lower part of the lower support member and the upper part of the pressing member; an adjustment screw connected to the pair of displacement transmission plates and being capable of adjusting a relative height with respect to the aforementioned pressing member; an output section connected to the pair of displacement transmission plates at a lower part of the lower support member; and an elastic body that biases the output section downward; a valve block to which the piezoelectric linear actuator is attached and wherein a flow path is formed; a valve shaft formed around the output section of the piezoelectric actuator and formed within the valve block; and a valve body that opens and closes the flow path by operating the valve shaft.

9 . The piezoelectrically driven valve according to claim 8 wherein the pressing member biases the laminated piezoelectric actuator by the elastic member interposed between the guide member and the pressing member.

10 . The piezoelectrically driven valve according to claim 8 wherein the guide member comprises a guide shaft that slidably penetrates the right or left side of the pressing member.

11 . The piezoelectrically driven valve according to claim 8 wherein the guide member comprises a guide shaft that slidably penetrates the right or left side of the pressing member supported by the lower support member.

12 . The piezoelectrically driven valve according to claim 10 further comprising a coil spring fitted around the guide shaft for biasing the pressing member toward the laminated piezoelectric actuator.

13 . The piezoelectrically driven valve according to claim 11 further comprising a coil spring biasing fitted around the guide shaft for the pressing member toward the laminated piezoelectric actuator.

14 . The piezoelectrically driven valve according to claim 8 wherein the lower support member, the pressing member, the guide member, the displacement transmission member and the valve block have sizes within a range of a width of the piezoelectric linear actuator.

15 . The piezoelectrically driven valve according to claim 8 wherein the valve body consists of a metal diaphragm valve body.

16 . A flow control device comprising:
a piezoelectric linear actuator which comprises: a laminated piezoelectric actuator; a lower support member that supports the laminated piezoelectric actuator and extends rightward and leftward of the laminated piezoelectric actuator; a pressing member that biases the laminated piezoelectric actuator from the top thereof and extends rightward and leftward of the laminated piezoelectric actuator; a guide member connected to the lower support member at right and left sides of the laminated piezoelectric actuator and guides the right and left sides of the pressing member; and a displacement transmission member that transfers a displacement resulting from a piezoelectric effect of the laminated piezoelectric actuator, the displacement transmission member comprising: a pair of displacement transmission plates which extend along the right and left sides of the laminated piezoelectric actuator and are capable of moving vertically to intersect the lower support member and the pressing member and are connected to each other at the lower part of the lower support member and the upper part of the pressing member; an adjustment screw connected to the pair of displacement transmission plates and being capable of adjusting a relative height with respect to the aforementioned pressing member; an output section connected to the pair of displacement transmission plates at a lower part of the lower support member; and an elastic body that biases the output section downward; a piezoelectrically driven valve which comprises a valve block to which the piezoelectric linear

Assignees

• Fujikin Kk

Inventors

• Yasumoto Naofumi
• Dohi Ryousuke
• Nishino Kouji
• Ikeda Nobukazu
• Shigyou Kohei

Classifications

• F16K31/004 Primary

  actuated by piezoelectric means · CPC title

• H01L41/083

  Electricity · mapped topic

• H01L41/053

  Electricity · mapped topic

• G05D7/0635

  by action on throttling means (G05D7/0688, G05D7/0694 take precedence) · CPC title

• F16K7/14 Primary

  arranged to be deformed against a flat seat · CPC title