Mems flow control chip for gas chromatography
US-2015369781-A1 · Dec 24, 2015 · US
US2016209377A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016209377-A1 |
| Application number | US-201314914868-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 2, 2013 |
| Priority date | Sep 2, 2013 |
| Publication date | Jul 21, 2016 |
| Grant date | — |
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A pressure control valve includes a pressure control block including a bore hole that is bored perpendicularly from one outer surface, and two internal channel openings of whose end portions are at a bottom surface of the bore hole, a valve body having elasticity and covering the bottom surface of the bore hole, a sealing member for pressing a portion of the valve body against the bottom surface of the bore hole, the portion abutting a peripheral edge portion of a portion of the bottom surface where the openings are provided, and an actuator for driving a portion, of the valve body, abutting the portion where the openings are provided in a direction perpendicular to the bottom surface of the bore hole.
Opening claim text (preview).
1 . A pressure control valve comprising: a pressure control block including a bore hole being bored perpendicularly from one outer surface and having a flat bottom surface, and two internal channels openings of whose end portions are located adjacently to each other at the center portion of the bottom surface of the bore hole; a plate valve body having elasticity and covering the bottom surface of the bore hole; a sealing member for pressing a peripheral portion of the valve body against a peripheral edge portion of the bottom surface; and an actuator for driving the center portion of the valve body in a direction perpendicular to the bottom surface of the bore hole. 2 . The pressure control valve according to claim 1 , wherein the disc is made of a resistant material with a chemical resistance, an impact resistance, and a pressure resistance. 3 . The pressure control valve according to claim 1 , wherein the disc is made from an elastic member having elasticity and a protective film that is present between the elastic member and the bottom surface of the bore hole, and the protective film is made of a resistant material with a chemical resistance, an impact resistance, and a pressure resistance. 4 . The pressure control valve according to claim 1 , wherein the bore hole is formed into a cylindrical shape, wherein the sealing member includes a cylindrical portion that is fitted in the bore hole, and wherein the actuator drives a rod-shaped member that penetrates the cylindrical portion of the sealing member and whose tip end is in contact with a center portion of the disc. 5 . The pressure control valve according to claim 4 , wherein a thread is formed on an inner circumferential surface of the bore hole, a thread for being engaged with the thread on the inner circumferential surface of the bore hole is formed on an outer circumferential surface of the cylindrical portion of the sealing member, and a position of the cylindrical portion in a depth direction inside the bore hole is changed by rotation of the sealing member. 6 . A supercritical fluid chromatograph comprising: an analysis channel; a mobile phase delivery section for delivering a mobile phase into the analysis channel; a sample introduction section for introducing a sample into the analysis channel; a separation column that is arranged on the analysis channel, on a downstream side of the sample introduction section; a detector that is arranged on the analysis channel, on a downstream side of the separation column, the detector being for detecting a sample component separated by the separation column; and a pressure control valve according to claim 1 , the pressure control valve being arranged on the analysis channel, on a downstream side of the detector, the pressure control valve being for controlling a pressure inside the analysis channel to a pressure by which the mobile phase is placed in a supercritical state. 7 . The supercritical fluid chromatograph according to claim 6 , wherein the disc is made of a resistant material with a chemical resistance, an impact resistance, and a pressure resistance. 8 . The supercritical fluid chromatograph according to claim 6 , wherein the disc is made from an elastic member having elasticity and a protective film that is present between the elastic member and the bottom surface of the bore hole, and the protective film is made of a resistant material with a chemical resistance, an impact resistance, and a pressure resistance. 9 . The supercritical fluid chromatograph according to claim 6 , wherein the bore hole is formed into a cylindrical shape, wherein the sealing member includes a cylindrical portion that is fitted in the bore hole, and wherein the actuator drives a rod-shaped member that penetrates the cylindrical portion of the sealing member and whose tip end is in contact with a center portion of the disc. 10 . The supercritical fluid chromatograph according to claim 9 , wherein a thread is formed on an inner circumferential surfiice of the bore hole, a thread for being engaged with the thread on the inner circumferential surface of the bore hole is formed on an outer circumferential surface of the cylindrical portion of the sealing member, and a position of the cylindrical portion in a depth direction inside the bore hole is changed by rotation of the sealing member.
Particular materials for seats or closure elements · CPC title
actuated by piezoelectric means · CPC title
the diaphragm being mechanically actuated, e.g. by screw-spindle or cam · CPC title
valves, e.g. check valves of pumps · CPC title
of pressure or speed (G01N30/36 takes precedence) · CPC title
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