Semiconductor devices and methods of manufacturing
US-12166025-B2 · Dec 10, 2024 · US
US2016353571A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016353571-A1 |
| Application number | US-201514882924-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 14, 2015 |
| Priority date | May 26, 2015 |
| Publication date | Dec 1, 2016 |
| Grant date | — |
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A carrier device includes a carrier glass and a carbon nanotube layer. The carrier glass includes a top surface and a bottom surface opposite to the top surface. The carbon nanotube layer is positioned on the top surface. The carbon nanotube layer includes a start conductive terminal, an end conductive terminal, and carbon nanotubes. The start conductive terminal is electrically connecting to the end conductive terminal via the carbon nanotubes. The start conductive terminal electrically connects to a voltage source. The end conductive terminal electrically connects to the ground via a capacitor.
Opening claim text (preview).
What is claimed is: 1 . A carrier device, comprising: a carrier glass having a top surface and a bottom surface opposite to the top surface; and a carbon nanotube layer positioned on the top surface, the carbon nanotube layer comprising a start conductive terminal, an end conductive terminal, and a plurality of carbon nanotubes, the start conductive terminal electrically coupled to the end conductive terminal via the carbon nanotubes, the start conductive terminal configured to connect to a voltage source, the end conductive terminal configured to electrically connect to ground via a capacitor. 2 . The carrier device of claim 1 , wherein a distance between the top surface and the bottom surface is in a range of 0.5-0.8 millimeters. 3 . The carrier device of claim 1 , wherein the carbon nanotube layer is welded on the top surface. 4 . The carrier device of claim 1 , wherein the carrier glass comprises a first side surface and a second side surface opposite to the first side surface, two sides of the carbon nanotube layer are projecting out of the first side surface and the second side surface, and the start conductive terminal and the end conductive terminal are individually positioned on the portions of the carbon nanotube layer which are projecting out of the first and second side surfaces. 5 . The carrier device of claim 1 , wherein the carrier glass comprises a first side surface and a second side surface opposite to the first side surface, the carrier glass defines two conductive through holes, one of the conductive through holes is close to the first side surface, and another of the conductive through holes is close to the second side surface. 6 . The carrier device of claim 5 , wherein two sides of the carbon nanotube layer are coplanar with the first side surface and the second side surface, the start conductive terminal is configured to connect to the voltage source via one of the conductive through holes, and the end conductive terminal is configured to connect to the capacitor and the ground through another of the conductive through holes. 7 . The carrier device of claim 1 , wherein the carbon nanotubes are parallel to and separated from each other, the carbon nanotube layer comprises a plurality of conductive terminals, the conductive terminals are electrically connected to two ends of the carbon nanotubes, one of the conductive terminals is the start conductive terminal, and another of the conductive terminals is the end conductive terminal. 8 . A substrate assembly, comprising: a glass substrate has a thickness in a range of 0.02-0.2 millimeters; and a carrier device, comprising: a carrier glass having a top surface and a bottom surface opposite to the top surface; and a carbon nanotube layer positioned on the top surface, the carbon nanotube layer comprising a start conductive terminal, an end conductive terminal, and a plurality of carbon nanotubes, the start conductive terminal electrically coupled to the end conductive terminal via the carbon nanotubes, the start conductive terminal configured to connect to a voltage source, the end conductive terminal configured to electrically connect to ground via a capacitor, the carbon nanotube layer configured to generate a static force to suck the glass substrate on the carrier device. 9 . The substrate assembly of claim 8 , wherein a distance between the top surface and the bottom surface is in a range of 0.5-0.8 millimeters. 10 . The substrate assembly of claim 8 , wherein the carbon nanotube layer is welded on the top surface. 11 . The substrate assembly of claim 8 , wherein the carrier glass comprises a first side surface and a second side surface opposite to the first side surface, two sides of the carbon nanotube layer are projecting out of the first side surface and the second side surface, and the start conductive terminal and the end conductive terminal are individually positioned on the portions of the carbon nanotube layer which are projecting out of the first and second side surfaces. 12 . The substrate assembly of claim 8 , wherein the carrier glass comprises a first side surface and a second side surface opposite to the first side surface, the carrier glass defines two conductive through holes, one of the conductive through holes is close to the first side surface, and another of the conductive through holes is close to the second side surface. 13 . The substrate assembly of claim 12 , wherein two sides of the carbon nanotube layer are coplanar with the first side surface and the second side surface, the start conductive terminal is configured to connect to the voltage source through one of the conductive through holes, and the end conductive terminal is configured to connect to the capacitor and the ground through another of the conductive through holes. 14 . The substrate assembly of claim 8 , wherein the carbon nanotubes are parallel to and separated from each other, the carbon nanotube layer comprises a plurality of conductive terminals, the conductive terminals are electrically connected to two ends of the carbon nanotubes, one of the conductive terminals is the start conductive terminal, and another of the conductive terminals is the end conductive terminal 15 . A substrate assembly, comprising: a carrier device, comprising: a carrier glass having a top surface and a bottom surface opposite to the top surface; and a first carbon nanotube layer positioned on the top surface, the carbon nanotube layer comprising a start conductive terminal, an end conductive terminal, and a plurality of carbon nanotubes, the start conductive terminal electrically connecting to the end conductive terminal via the carbon nanotubes; a glass substrate having a thickness in a range of 0.02-0.2 millimeters, the glass substrate comprising: a substrate body having a first surface and a second surface opposite to the first surface; a second carbon nanotube layer positioned on the second surface, the first and second carbon nanotube layers configured to cooperatively generate a static force to suck the glass substrate and the carrier device together. 16 . The substrate assembly of claim 15 , wherein the first carbon nanotube layer is electrically connected to a voltage source, and the second carbon nanotube layer is electrically connected to ground. 17 . The substrate assembly of claim 15 , wherein the first carbon nanotube layer is electrically connected to ground, and the second carbon nanotube layer is electrically connected to a voltage source. 18 . The substrate assembly of claim 15 , wherein the carrier glass comprises a first side surface and a second side surface opposite to the first side surface, two sides of the carbon nanotube layer are projecting out of the first side surface and the second side surface, and the start conductive terminal and the end conductive terminal are individually positioned on the portions of the carbon nanotube layer which are projecting out of the first and second side surfaces. 19 . The substrate assembly of claim 15 , wherein the carrier glass comprises a first side surface and a second side surface opposite to the first side surface, the carrier glass defines two conductive through holes, one of the conductive through holes is close to the first side surface, and another of the conductive through holes is close to the second side surface. 20 . The substrate assembly of claim 19 , wherein two sides of the carbon nanotube layer are coplanar with the first side surface and the second side sur
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