Hard mask for patterning magnetic tunnel junctions

Patent metadata

Field	Value
Publication number	US-2016351799-A1
Application number	US-201514755964-A
Country	US
Kind code	A1
Filing date	Jun 30, 2015
Priority date	May 30, 2015
Publication date	Dec 1, 2016
Grant date	—

Abstract

Device structures and methods for fabricating device structures are provided herein. Magnetic random access memory (MRAM) devices described herein may include a film stack comprising a magnetic tunneling junction layer, a dielectric capping layer, an etch stop layer, a conductive hard mask layer, a dielectric hard mask layer, a spin on carbon layer, and an anti-reflective coating layer. The film stack may be etched by one or more selected chemistries to achieve improved film stack sidewall verticality. Memory cells having increasingly uniform and reduced critical dimensions may be fabricated utilizing the methods and devices described herein.

First claim

What is claimed is:

1 . A film stack, comprising:
a magnetic tunneling junction stack; a dielectric capping layer disposed on the magnetic tunneling junction stack; an etch stop layer disposed on the dielectric capping layer; a conductive hard mask layer disposed on the etch stop layer; a dielectric hard mask layer disposed on the conductive hard mask layer; a spin on carbon layer disposed on the dielectric hard mask layer; and an anti-reflective coating layer disposed on the spin on carbon layer.

2 . The film stack of claim 1 , further comprising:
a bottom electrode disposed on a substrate, wherein the magnetic tunneling junction stack of the film stack is disposed on the substrate.

3 . The film stack of claim 2 , further comprising:
a photoresist layer disposed on the anti-reflective coating layer.

4 . The film stack of claim 1 , wherein the dielectric capping layer is formed from a magnesium oxide material, an aluminum oxide material, a zinc oxide material, a titanium oxide material, a tantalum oxide material, a tantalum nitride material, or combinations thereof.

5 . The film stack of claim 1 , wherein the etch stop layer is formed from a ruthenium containing material, a tungsten containing material, a tantalum containing material, a platinum containing material, a nickel containing material, a cobalt containing material, or combinations thereof.

6 . The film stack of claim 1 , wherein the conductive hard mask layer is formed from a tantalum containing material, a tantalum nitride containing material, a titanium containing material, a titanium nitride containing material, a tungsten containing material, a tungsten nitride containing material, or combinations thereof.

7 . The film stack of claim 1 , wherein the dielectric hard mask layer is formed from a silicon oxide containing material, an aluminum oxide containing material, a silicon nitride containing material, or combinations thereof.

8 . The film stack of claim 1 , wherein the dielectric capping layer is configured to protect the magnetic tunneling junction layer from diffusion of metallic ions from other layers in the film stack.

9 . A film stack, comprising:
a magnetic tunneling junction layer; a dielectric capping layer having a thickness of between about 5 Å and about 20 Å disposed on the magnetic tunneling junction layer; an etch stop layer having a thickness of between about 5 Å and about 50 Å disposed on the dielectric capping layer; a conductive hard mask layer having a thickness of between about 400 Å and about 1000 Å disposed on the etch stop layer; a dielectric hard mask layer disposed on the conductive hard mask layer; a spin on carbon layer disposed on the dielectric hard mask layer; and an inorganic silicon containing anti-reflective coating layer disposed on the spin on carbon layer.

10 . The film stack of claim 9 , wherein the dielectric hard mask layer has a thickness of between about 400 Å and about 1000 Å.

11 . The film stack of claim 9 , wherein the spin on carbon layer has a thickness of between about 500 Å and about 2500 Å.

12 . The film stack of claim 9 , wherein a sidewall of the conductive hard mask layer has a sidewall angle greater than about 85° relative to a horizontal datum plane.

13 . The film stack of claim 12 , wherein the sidewall angle is achieved on magnetic tunnel junction devices having a pitch of between about 100 nm to and about 400 nm.

14 . The film stack of claim 9 , wherein the dielectric capping layer is configured to improve an interfacial perpendicular magnetic anisotropy of the magnetic tunneling junction layer.

15 . A method of etching a film stack, comprising:
patterning a photoresist layer and etching an anti-reflective coating layer of a film stack; etching a spin on carbon layer of the film stack using the anti-reflective coating layer as first a mask; etching a dielectric hard mask layer of the film stack using the spin on carbon layer as second mask; etching a conductive hard mask layer of the film stack using the dielectric hard mask layer as a third mask; etching an etch stop layer of the film stack using the conductive hardmask layer as a fourth mask to expose a dielectric capping layer of the film stack, wherein the dielectric capping layer is disposed on a magnetic tunneling junction layer.

16 . The method of claim 15 , wherein the etching the anti-reflective coating layer comprises utilizing processing gases selected from the group consisting of O 2 , CHF 3 , CF 4 , and combinations and mixtures thereof.

17 . The method of claim 15 , wherein the etching the spin on carbon layer comprises utilizing processing gases selected from the group consisting of Cl 2 , HBr, O 2 , N 2 , and combinations and mixtures thereof.

18 . The method of claim 15 , wherein the etching the dielectric hard mask layer comprises utilizing processing gases selected from the group consisting of O 2 , CF 4 , CHF 3 , and combinations and mixtures thereof.

19 . The method of claim 15 , wherein the etching the conductive hard mask layer comprises utilizing processing gases selected from the group consisting of CF 4 , CHF 3 , and combinations and mixtures thereof.

20 . The method of claim 19 , wherein the etching the conductive hard mask layer results in a sidewall of the conductive hard mask layer having a sidewall angle greater than about 85° relative to a horizontal datum plane.

Assignees

• Applied Materials Inc

Inventors

• Xue Lin
• Pakala Mahendra
• Chen Hao
• Ahn Jaesoo

Classifications

• G11C11/16

  using elements in which the storage effect is based on magnetic spin effect · CPC title

• H10B61/00

  Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices · CPC title

• H01L43/12 Primary

  Electricity · mapped topic

• H01L43/02

  Electricity · mapped topic

• H01L43/08

  Electricity · mapped topic