US2016308111A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016308111-A1 |
| Application number | US-201615198103-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 30, 2016 |
| Priority date | Sep 6, 2010 |
| Publication date | Oct 20, 2016 |
| Grant date | — |
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A piezoelectric film element includes a substrate, and a piezoelectric film including an alkali niobate-based perovskite structure expressed in a composition formula (K 1-x Na x )NbO 3 (0.4≦x≦0.7) formed on the substrate, the piezoelectric film including an etching cross section including a tapered inclined portion which is enlarged toward an outside. The inclined portion includes a slope angle made by a slope connecting an upper surface edge and a bottom surface edge of the piezoelectric film and a bottom surface of the piezoelectric film, and the slope angle is not greater than 70°.
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What is claimed is: 1 . A piezoelectric film element, comprising: a substrate; and a piezoelectric film comprising an alkali niobate-based perovskite structure expressed in a composition formula (K 1-x Na x )NbO 3 (0.4≦x≦0.7) formed on the substrate, the piezoelectric film comprising an etching cross section including a tapered inclined portion which is enlarged toward an outside, wherein the inclined portion includes a slope angle made by a slope connecting an upper surface edge and a bottom surface edge of the piezoelectric film and a bottom surface of the piezoelectric film, and the slope angle is not greater than 70°. 2 . The piezoelectric film element according to claim 1 , wherein the slope angle is greater than 45° and not greater than 70°. 3 . The piezoelectric film wafer according to claim 1 , wherein a surface of the inclined portion comprises a fluorine compound. 4 . A piezoelectric film device, comprising: a substrate; a piezoelectric film comprising an alkali niobate-based perovskite structure expressed in a composition formula (K 1-x Na x )NbO 3 (0.4≦x≦0.7) formed on the substrate, the piezoelectric film comprising an etching cross section including a tapered inclined portion which is enlarged toward an outside; a lower electrode provided between the substrate and the piezoelectric film; an upper electrode provided on the piezoelectric film; and a voltage applying unit or a voltage detecting unit connected to the upper and lower electrodes, wherein the inclined portion includes a slope angle made by a slope connecting an upper surface edge and a bottom surface edge of the piezoelectric film and a bottom surface of the piezoelectric film, and the slope angle is not greater than 70°.
Electricity · mapped topic
Electricity · mapped topic
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by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing · CPC title
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