Superalloy target
US-11866805-B2 · Jan 9, 2024 · US
US2016298232A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016298232-A1 |
| Application number | US-201415038474-A |
| Country | US |
| Kind code | A1 |
| Filing date | Nov 26, 2014 |
| Priority date | Dec 23, 2013 |
| Publication date | Oct 13, 2016 |
| Grant date | — |
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Disclosed is an alpha alumina (α-Al2O3) thin film comprising the lower layer formed on the base material made from cemented carbide; and the α-Al2O3 thin film layer formed on the lower layer, wherein when the α-Al2O3 thin film layer is divided, from the total thickness (T) thereof, into a D1 layer which is from an interface layer to 0.15T, a D2 layer which is from 0.15T to 0.4T, and a D3 layer which is from 0.4T to 1T, an S1 (D3 layer grain size/D1 layer grain size) is 2-5.5 and an S2 (D2 layer grain size/D1 layer grain size) is 1.5-4.
Opening claim text (preview).
1 . An alpha alumina (α-Al 2 O 3 ) thin film which has a thickness of T and is formed on a lower layer which is formed on a base material, the α-Al 2 O 3 thin film being divided into: a D1 layer which is positioned between an interfacial layer and 0.15T above the interfacial layer; a D2 layer which is positioned between 0.15T and 0.4T above the interfacial layer; and a D3 layer which is positioned between 0.4T and 1T above the interfacial layer, wherein S1 (the grain size of the D3 layer/the grain size of the D1 layer) is 2 to 5.5, and S2 (the grain size of the D2 layer/the grain size of the D1 layer) is 1.5 to 4. 2 . The α-Al 2 O 3 thin film of claim 1 , wherein the base material is a cemented carbide containing 5 to 10 wt % of Co, and at most 1 wt % of (Ta,Nb)C. 3 . The α-Al 2 O 3 thin film of claim 1 , wherein the lower layer comprises: a TiN layer formed on the base material; a MT-TiCN layer formed on the TiN layer; and an interfacial layer containing Ti and formed on the TiCN layer. 4 . The α-Al 2 O 3 thin film of claim 3 , wherein: the thickness of the TiN layer is 0.1 to 2 μm; the thickness of the MT-TiCN layer is 3 to 10 μm; the thickness of the interfacial layer is 0.1 to 1 μm; and the thickness of the α-Al 2 O 3 layer is 2 to 8 μm. 5 . The α-Al 2 O 3 thin film of claim 1 , wherein: the grain size of the D1 layer is 0.1 to 0.5 μm; the grain size of the D2 layer is 0.15 to 0.8 μm; and the grain size of the D3 layer is 0.4 to 1.5 μm. 6 . The α-Al 2 O 3 thin film of claim 3 , wherein the interfacial layer comprises: a Ti x Al 1-x CNO layer formed on the MT-TiCN layer; a Al y Ti 1-y CNO layer formed on the TixAl1-xCNO layer; and a Ti oxide layer formed on the Al y Ti 1-y CNO layer. 7 . The α-Al 2 O 3 thin film of claim 1 , wherein the surface roughness (Ra) of the α-Al 2 O 3 thin film is at most 250 nm.
with layers graded in composition or physical properties · CPC title
Including graded layers in composition or in physical properties, e.g. density, porosity, grain size · CPC title
characterised by the deposition of metallic material · CPC title
characterised by the method of coating (C23C16/04 takes precedence) · CPC title
coatings specially adapted for cutting tools or wear applications · CPC title
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