Organic layer composition, organic layer, and method of forming patterns

Patent metadata

Field	Value
Publication number	US-2016297932-A1
Application number	US-201514954403-A
Country	US
Kind code	A1
Filing date	Nov 30, 2015
Priority date	Apr 10, 2015
Publication date	Oct 13, 2016
Grant date	—

Abstract

An organic layer composition, an organic layer, and associated methods, the composition including a polymer that includes a moiety represented by Chemical Formula 1, a monomer represented by Chemical Formula 2, and a solvent,

First claim

What is claimed is:

1 . An organic layer composition, comprising:
a polymer that includes a moiety represented by Chemical Formula 1, a monomer represented by Chemical Formula 2, and a solvent,

wherein, in Chemical Formula 1,
A 1 and A 2 are each independently a divalent group of a compound listed in Group 1,
A 3 and A 4 are each independently a cyclic group including at least one substituted or unsubstituted benzene ring,
m is 0 or 1, and
“*” is a linking point,

wherein, in Group 1,
R 1 , R 2 , and R 3 are each independently hydrogen, a hydroxy group, a methoxy group, an ethoxy group, a halogen, a substituted or unsubstituted C6 to C30 aryl group, or a combination thereof,
Z 1 to Z 6 are each independently a hydroxy group, a methoxy group, an ethoxy group, a halogen, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C3 to C30 cycloalkenyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C7 to C20 arylalkyl group, a substituted or unsubstituted C1 to C20 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heteroaryl group, a substituted or unsubstituted C1 to C4 alkyl ether group, a substituted or unsubstituted C7 to C20 arylalkylene ether group, a substituted or unsubstituted C1 to C30 haloalkyl group, or a combination thereof, and
a, b, c, d, e, and f are each independently an integer of 0 to 2,

wherein, in Chemical Formula 2,
B 0 is a substituted or unsubstituted C3 to C60 cyclic group, a substituted or unsubstituted C1 to C20 alkylene group, a substituted or unsubstituted C2 to C20 alkenylene group, a substituted or unsubstituted C2 to C20 alkynylene group, or a combination thereof,
B a and B b are each independently substituted or unsubstituted C3 to C60 cyclic group,
X a and X b are each independently a hydroxy group, a thionyl group, a thiol group, a cyano group, a substituted or unsubstituted amino group, a halogen atom, a halogen-containing group, a substituted or unsubstituted C1 to C30 alkoxy group, or a combination thereof,
L a , L b , L c , and L d are each independently a single bond, a substituted or unsubstituted C1 to C6 alkylene group, a substituted or unsubstituted C6 to C30 arylene group, or a combination thereof, and
n a and n b are each independently an integer of 1 to 6, provided that n a +n b ≦a maximum number of substituents of B 0 .

2 . The organic layer composition as claimed in claim 1 , wherein, in Chemical Formula 1, A 3 and A 4 are each independently one of the following groups:

wherein, in the above groups,
X 1 and X 2 are each independently a substituted or unsubstituted C6 to C50 arylene group, a substituted or unsubstituted C1 to C10 alkyleneoxide-containing group, or a combination thereof,
Y 1 and Y 2 are each independently substituted or unsubstituted C6 to C30 aryl group,
Z 7 to Z 10 are each independently a hydroxy group, a methoxy group, an ethoxy group, a halogen, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C3 to C30 cycloalkenyl group, a substituted or unsubstituted C1 to C20 alkylamine group, a substituted or unsubstituted C7 to C20 arylalkyl group, a substituted or unsubstituted C1 to C20 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C2 to C30 heteroaryl group, a substituted or unsubstituted C1 to C4 alkyl ether group, a substituted or unsubstituted C7 to C20 arylalkylene ether group, a substituted or unsubstituted C1 to C30 haloalkyl group, or a combination thereof,
g, h, i, and j are each independently an integer of 0 to 2,
k is an integer of 1 to 3, and
“*” is a linking point.

3 . The organic layer composition as claimed in claim 2 , wherein X 1 and X 2 are each independently a substituted or unsubstituted C6 to C50 arylene group, the C6 to C50 arylene group being a divalent group of one of the following compounds:

4 . The organic layer composition as claimed in claim 2 , wherein Y 1 and Y 2 are each independently a substituted or unsubstituted C6 to C30 aryl group, the C6 to C30 aryl group being a monovalent group of one of the following compounds:

5 . The organic layer composition as claimed in claim 1 , wherein, in Group 1, R 1 , R 2 , and R 3 are each independently hydrogen or a substituted or unsubstituted phenyl group.

6 . The organic layer composition as claimed in claim 1 , wherein, in Chemical Formula 2, the cyclic group of B 0 , B a , or B b is a group including one of the following moieties:

wherein, in the above compounds,
Q 1 and Q 2 are each independently a single bond, a substituted or unsubstituted C1 to C20 alkylene group, a substituted or unsubstituted C3 to C20 cycloalkylene group, a substituted or unsubstituted C6 to C20 arylene group, a substituted or unsubstituted C2 to C20 heteroarylene group, a substituted or unsubstituted C2 to C20 alkenylene group, a substituted or unsubstituted C2 to C20 alkynylene group, C═O, NR a , oxygen (O), sulfur (S), or a combination thereof, and
Q 3 is nitrogen (N), CR b , or a combination thereof,
wherein R a and R b are each independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a halogen atom, a halogen-containing group, or a combination thereof.

7 . The organic layer composition as claimed in claim 1 , wherein, in Chemical Formula 2, at least one of B 0 , B a , and B b is a substituted or unsubstituted polycyclic group.

8 . The organic layer composition as claimed in claim 7 , wherein, in Chemical Formula 2, at least one of B 0 , B a , and B b is a substituted or unsubstituted polycyclic aromatic group.

9 . The organic layer composition as claimed in claim 1 , wherein, in Chemical Formula 2, n a +n b is 2 or 3.

10 . The organic layer composition as claimed in claim 1 , wherein the polymer that includes a moiety represented by Chemical Formula 1 includes a moiety represented by one of the following Chemical Formulae 1-1 to 1-3:

Assignees

• Samsung Sdi Co Ltd

Inventors

• Park Yu-Shin
• Kim Yun-Jun
• Kim Tae-Ho
• Park You-Jung
• Choi Yoo-Jeong
• Kwon Hyo-Young
• Kim Seung-Hyun
• Namgung Ran
• Rathwell Dominea
• Mun Soo-Hyoun
• Song Hyun-Ji
• Jung Hyeon-Il
• Heo Yu-Mi

Classifications

• G03F7/11

  having cover layers or intermediate layers, e.g. subbing layers {(G03F7/091 - G03F7/093, B41N3/03 take precedence)} · CPC title

• G03F7/168

  Finishing the coated layer, e.g. drying, baking, soaking · CPC title

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F7/40

  Treatment after imagewise removal, e.g. baking · CPC title

• C08G73/0672 Primary

  with only one nitrogen atom in the ring · CPC title