Chamber cleaning apparatus and control method thereof

Patent metadata

Field	Value
Publication number	US-2016288173-A1
Application number	US-201615085318-A
Country	US
Kind code	A1
Filing date	Mar 30, 2016
Priority date	Apr 3, 2015
Publication date	Oct 6, 2016
Grant date	—

Abstract

The present disclosure relates to a chamber cleaning apparatus and a control method thereof. The chamber cleaning apparatus comprises: a controller for providing control signals, a supplying device, and a cleaning rail provided within the chamber. The supplying device has a first working position and a second working position, the first working position corresponding to a conveyance entrance, and the second working position corresponding to a conveyance outlet; the supplying device comprises at least two scrolls, and cleaning cloth partly on the cleaning rail; the scroll at the first working position is connected to one end of the cleaning cloth, for conveying the cleaning cloth from the conveyance entrance to the cleaning rail, and the scroll at the second working position is connected to the other end of the cleaning cloth, for collecting the cleaning cloth passing through the conveyance outlet.

First claim

1 . A chamber cleaning apparatus for cleaning a chamber, comprising a controller for providing control signals, a supplying device, and a cleaning rail provided within the chamber;
wherein the supplying device is connected to a starting end of the cleaning rail through a conveyance entrance, and is connected to a finishing end of the cleaning rail through a conveyance outlet; the supplying device has a first working position and a second working position, the first working position corresponding to the conveyance entrance, and the second working position corresponding to the conveyance outlet; the supplying device comprises at least two scrolls, and cleaning cloth partly on the cleaning rail; the scroll at the first working position is connected to one end of the cleaning cloth, for conveying the cleaning cloth from the conveyance entrance to the cleaning rail, and the scroll at the second working position is connected to the other end of the cleaning cloth, for collecting the cleaning cloth passing through the conveyance outlet.

2 . The chamber cleaning apparatus of claim 1 , wherein the supplying device further comprises an annular supplying guide rail;
the first working position and the second working position are disposed on the supplying guide rail; the scrolls are installed on the supplying guide rail, and move along the supplying guide rail under the control of the controller.

3 . The chamber cleaning apparatus of claim 2 , further comprising a recovering device; wherein a recovering guide rail is provided within the recovering device, and the recovering guide rail is connected to the supplying guide rail through a recovering entrance and a recovering outlet; the recovering device is for performing a recovering process on the cleaning cloth located on the recovering guide rail.

4 . The chamber cleaning apparatus of claim 3 , wherein the supplying device further comprises a scroll driving part for receiving control signals from the controller, and for driving the scroll to move along the supply guide rail and the recovering guide rail.

5 . The chamber cleaning apparatus of claim 1 , wherein the supplying device further comprises a first substituting unit and a second substituting unit;
the first substituting unit is disposed between the conveyance entrance and the first working position, for connecting the finishing end and the starting end of two adjacent scrolls of cleaning cloth; the second substituting unit is disposed between the conveyance outlet and the second working position, for separating the finishing end from the starting end of the two connected scrolls of cleaning cloth; or for connecting the starting end of the cleaning cloth at the conveyance outlet to the scroll at the second working position not installed with cleaning cloth.

6 . The chamber cleaning apparatus of claim 1 , wherein the cleaning rail comprises at least one position regulator, and the at least one position regulator is distributed within the chamber along a preset track;
the position regulator comprises a vertical regulating part disposed in the vertical direction, a horizontal regulating part disposed in the horizontal direction, and a guiding part disposed in the vertical direction and supporting the cleaning cloth; the vertical regulating part is connected to the horizontal regulating part through a first shaft disposed in the vertical direction, and the first shaft is for driving the horizontal regulating part to rotate with the vertical regulating part as the center; the length of the vertical regulating part is adjustable in the vertical direction, and the length of the horizontal regulating part is adjustable in the horizontal direction; the guiding part is connected to the horizontal regulating part through a second shaft disposed in the vertical direction, and rotates by the pulling of the second shaft.

7 . The chamber cleaning apparatus of claim 6 , wherein:
the length regulating range of the vertical regulating part or the horizontal regulating part is 0.1 m˜3 m.

8 . The chamber cleaning apparatus of claim 1 , further comprising a detector for detecting an absorption saturation degree of the cleaning cloth on the cleaning rail, and for sending an alarm signal to the controller if the absorption saturation degree reaches a threshold set on the detector.

9 . A control method of a chamber cleaning apparatus, for controlling the chamber cleaning apparatus of claim 1 , wherein the method comprises:
placing a first scroll at the first working position and placing a second scroll at the second working position; connecting the starting end of the first cleaning cloth on the first scroll to the second scroll, wherein the finishing end of the first cleaning cloth is connected to the first scroll; the first scroll rotating to convey the first cleaning cloth from the conveyance entrance to the cleaning rail; the cleaning rail unfolding the first cleaning cloth, and the first cleaning cloth cleaning the chamber along the cleaning rail; the second scroll rotating to collect the first cleaning cloth.

10 . A control method of a chamber cleaning apparatus, for controlling the chamber cleaning apparatus of claim 2 , wherein the method comprises:
placing a first scroll at the first working position and placing a second scroll at the second working position; connecting the starting end of the first cleaning cloth on the first scroll to the second scroll, wherein the finishing end of the first cleaning cloth is connected to the first scroll; the first scroll rotating to convey the first cleaning cloth from the conveyance entrance to the cleaning rail; the cleaning rail unfolding the first cleaning cloth, and the first cleaning cloth cleaning the chamber along the cleaning rail; the second scroll rotating to collect the first cleaning cloth.

11 . The control method of the chamber cleaning apparatus of claim 10 , wherein in the case the chamber cleaning apparatus comprises a supplying guide rail, after the first scroll rotates to convey the first cleaning cloth from the conveyance entrance to the cleaning rail, the method further comprises:
when the finishing end of the first cleaning cloth is completely separated from the first scroll, the first scroll stopping rotation and moves to the second working position along a first direction; a third scroll stopping after moving to the first working position along the first direction, and the first substituting unit connects the starting end of a second cleaning cloth on the third scroll to the finishing end of the first cleaning cloth, and the third scroll rotates and transmits the second cleaning cloth from the conveyance entrance to the cleaning rail; when the finishing end of the first cleaning cloth is separated from the starting end of the second cleaning cloth between the conveyance outlet and the second working position by the second substituting unit, the starting end and the finishing end of the first cleaning cloth both wrapping around the second scroll, the second scroll leaving the second working position along the first direction; the first scroll stopping after moving to the second working position, and is connected to the starting end of the second cleaning cloth conveyed from the conveyance outlet through the second substituting unit; the first scroll rotating to collect the second cleaning cloth.

12 . The control method of the chamber cleaning apparatus of claim 11 , wherein after the first scroll leaving the first working position and before arriving at the second working position, the method further comprises:
the first scroll stopping after moving to a preset position, wherein the preset position i

Assignees

• Boe Technology Group Co Ltd
• Hefei Boe Optoelectronics Tech

Inventors

• Hu Jin
• Meng Xiangming
• Jie Changkai

Classifications

• B08B13/00

  Accessories or details of general applicability for machines or apparatus for cleaning · CPC title

• B08B1/006 Primary

  Operations & Transport · mapped topic

• B08B9/087 Primary

  by methods involving the use of tools, e.g. brushes, scrapers ({B08B9/0808} , B08B9/20 take precedence) · CPC title

• B08B1/143 Primary

  Wipes · CPC title