Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier

Patent metadata

Field	Value
Publication number	US-2016285223-A1
Application number	US-201615176346-A
Country	US
Kind code	A1
Filing date	Jun 8, 2016
Priority date	Jun 13, 2011
Publication date	Sep 29, 2016
Grant date	—

Abstract

A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of multi-surface reflecting components (e.g., one or more etalons and one or more mirrors). The polarizing beam splitter passes input laser pulses through the wave plate to the multi-surface reflecting components, which reflect portions of each input laser pulse back through the wave plate to the polarizing beam splitter. The polarizing beam splitter reflects each reflected portion to form an output of the pulse multiplier. The multi-surface reflecting components are configured such that the output pulses exiting the pulse multiplier have an output repetition pulse frequency rate that is at least double the input repetition pulse frequency.

First claim

1 . A pulse multiplier for converting input laser pulses transmitted at an input repetition frequency into output pulsed light having an output repetition frequency that is greater than the input repetition frequency, the pulse multiplier comprising:
a polarizing beam splitter positioned to receive each input laser pulse of the input laser pulses; a wave plate positioned to receive each input laser pulse from the polarizing beam splitter; a set of multi-surface reflecting components configured such that at least one surface reflects a portion of each input laser pulse back through the wave plate to the polarizing beam splitter, wherein the polarizing beam splitter is configured to reflect each reflected portion of each input laser pulse from the set of multi-surface reflecting components as an output of the pulse multiplier, and to transmit each input laser pulse to the wave plate and the set of multi-surface reflecting components, and wherein the multi-surface reflecting components are configured such that the set of pulses exiting the pulse multiplier have an output repetition pulse frequency rate that is at least double the input repetition pulse frequency.

2 . The pulse multiplier of claim 1 , wherein the wave plate includes a quarter-wave plate.

3 . The pulse multiplier of claim 1 , wherein the multi-surface reflecting components include a mirror and two etalons.

4 . The pulse multiplier of claim 1 , wherein the set of multi-surface reflecting components comprises an etalon and a mirror.

5 . The pulse multiplier of claim 1 , wherein the set of multi-surface reflecting components comprises at least two etalons and a mirror.

6 . The pulse multiplier of claim 5 , wherein the reflectivities of each surface of each etalon are substantially similar.

7 . The pulse multiplier of claim 6 , wherein the substantially similar reflectivities are substantially equal to R, where (1−R) 2n =R and n is number of partially reflective surfaces.

8 . A system comprising:
a laser configured to generating input laser pulses at an input repetition frequency; a pulse multiplier configured to convert the input laser pulses into output pulsed light having an output repetition frequency that is greater than the input repetition frequency, the pulse multiplier including:
a polarizing beam splitter positioned to receive each input laser pulse of the input laser pulses;
a wave plate positioned to receive each input from the polarizing beam splitter;
a set of multi-surface reflecting components configured such that at least one surface reflects a portion of each input laser pulse back through the wave plate to the polarizing beam splitter,
wherein the polarizing beam splitter is configured to transmit all light of said each input laser pulse to the waveplate, and to reflect each reflected portion of each input laser pulse from the set of multi-surface reflecting components as an output of the pulse multiplier, and
wherein the multi-surface reflecting components are configured such that the set of pulses exiting the pulse multiplier have an output repetition pulse frequency rate that is at least double the input repetition pulse frequency.

9 . The system of claim 8 , wherein the system is configured to inspect one of an unpatterned wafer inspection system, a patterned wafer inspection system, a mask inspection system, and a metrology system.

10 . The pulse multiplier of claim 8 , wherein the set of multi-surface reflecting components comprises an etalon and a mirror.

11 . The pulse multiplier of claim 8 , wherein the set of multi-surface reflecting components comprises two etalons and a mirror.

12 . The pulse multiplier of claim 11 , wherein the reflectivities of each surface of each etalon are substantially similar.

13 . The pulse multiplier of claim 12 , wherein the substantially similar reflectivities are substantially equal to R, where (1−R) 2n =R and n is number of partially reflective surfaces.

14 . A method of generating output pulsed light for a system at an output repetition pulse rate that is a multiplication factor greater than an input repetition pulse frequency of input laser pulses, the method comprising:
optically splitting each input laser pulse of the input laser pulses into a plurality of pulses using a wave plate; reflecting the plurality of pulses using a set of multi-surface reflecting components having reflecting surfaces operably arranged and spaced apart such that the plurality of pulses are grouped into pulse trains, wherein the pulse trains are of approximately equal energy and are approximately equally spaced in time, and wherein the pulse trains are directed back through the wave plate; and utilizing a polarizing beam splitter to transmit a set of the pulse trains as the output pulsed light.

Assignees

• Kla Tencor Corp

Inventors

• Chuang Yung-Ho
• Armstrong J Joseph
• Liou Justin Dianhuan
• Dribinski Vladimir
• Brown David L

Classifications

• G02B27/283

  used for beam splitting or combining · CPC title

• G02B5/0816

  Multilayer mirrors, i.e. having two or more reflecting layers (G02B5/0883, G02B5/0891 take precedence) · CPC title

• G01N2201/06113

  Coherent sources; lasers · CPC title

• G01N2201/0697

  Pulsed lasers · CPC title

• G02B27/286

  for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another (G02B5/3083 takes precedence; light guide coupling means utilising polarising elements G02B6/34) · CPC title