Semiconductor inspection and metrology system using laser pulse multiplier

Patent metadata

Field	Value
Publication number	US-9768577-B2
Application number	US-201514832833-A
Country	US
Kind code	B2
Filing date	Aug 21, 2015
Priority date	Dec 5, 2012
Publication date	Sep 19, 2017
Grant date	Sep 19, 2017

Abstract

A pulse multiplier includes a beam splitter and one or more mirrors. The beam splitter receives a series of input laser pulses and directs part of the energy of each pulse into a ring cavity. After circulating around the ring cavity, part of the pulse energy leaves the ring cavity through the beam splitter and part of the energy is recirculated. By selecting the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitter. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.

First claim

The invention claimed is:

1. A pulse multiplier comprising:
a first ring cavity including:
a first beam splitter that receives a plurality of successive input laser pulses at a first frequency; and
a set of one or more mirrors; and

a second ring cavity including:
a second beam splitter; and
a second set of one or more mirrors;
wherein the first beam splitter directs a first fraction of each of the input laser pulses to the second beam splitter, and directs a second fraction of each of the input laser pulses into the first ring cavity as a first circulated laser pulse,
wherein the second beam splitter directs a third fraction of each laser pulse incident on it to an output of the pulse multiplier, and directs a fourth fraction of energy of each laser pulse incident on it into the second ring cavity as a second circulated laser pulse, and
wherein the first ring cavity has an optical path length of about half the distance between the successive incoming laser pulses, wherein the distance between the successive incoming laser pulses is equal to the velocity of light multiplied by the time interval between the successive incoming laser pulses, and
wherein an optical path length of the second ring cavity is approximately an odd integer times half the optical path length of the first ring cavity.

2. The pulse multiplier of claim 1 , wherein the first beam splitter further directs substantially the second fraction of the energy of the first circulated laser pulse out of the first ring cavity to the second beam splitter after the first circulated laser pulse has traversed the first ring cavity once, while directing substantially the first fraction of the energy of the first circulated laser pulse back into the first ring cavity.

3. The pulse multiplier of claim 1 , wherein the second beam splitter further directs substantially the fourth fraction of the energy of the second circulated laser pulse out of the second ring cavity as an output of the pulse multiplier after the second circulated laser pulse has traversed the second ring cavity once, while directing substantially the third fraction of the energy of the second circulated laser pulse back into the second ring cavity.

4. The pulse multiplier of claim 1 , wherein the first fraction is substantially equal to the third fraction.

5. The pulse multiplier of claim 1 , wherein the second fraction is substantially equal to the fourth fraction.

6. The pulse multiplier of claim 1 , wherein at least one of the first ring cavity and the second ring cavity is further characterized in that it does not contain a wave plate.

7. The pulse multiplier of claim 1 , wherein neither the first ring cavity nor the second ring cavity contains a wave plate.

8. The pulse multiplier of claim 1 , wherein the first fraction is approximately one third and the second fraction is approximately two thirds.

9. The pulse multiplier of claim 1 , wherein the third fraction is approximately one third and the fourth fraction is approximately two thirds.

10. The pulse multiplier of claim 1 , wherein the first fraction, the second fraction, the third fraction and the fourth fraction are chosen so that substantially equal energy output pulses are provided at the output of the pulse multiplier in response to the successive input laser pulses.

11. The pulse multiplier of claim 1 , wherein each laser pulse in the first ring cavity is substantially refocused each time that the laser pulse traverses the first ring cavity, and wherein each laser pulse in the second ring cavity is substantially refocused each time that the laser pulse traverses the second ring cavity.

12. The pulse multiplier of claim 1 , wherein the first ring cavity further comprises a prism.

13. A pulse multiplier comprising:
a first ring cavity including:
a first beam splitter that receives a plurality of successive input laser pulses;
a prism; and
one and only one mirror, which is a curved mirror; and

a second ring cavity including:
a second beam splitter; and
a second set of one or more mirrors;
wherein the first beam splitter directs a first fraction of each of the input laser pulses to the second beam splitter, and directs a second fraction of each of the input laser pulses into the first ring cavity,
wherein the second beam splitter directs a third fraction of each laser pulse incident on it to an output of the pulse multiplier, and directs a fourth fraction of energy of each laser pulse incident on it into the second ring cavity.

14. The pulse multiplier of claim 1 , wherein the second ring cavity further comprises a prism.

15. A pulse multiplier comprising:
a first ring cavity including:
a first beam splitter that receives a plurality of successive input laser pulses;
a set of one or more mirrors; and

a second ring cavity including:
a second beam splitter;
a prism; and
one and only one mirror, which is a curved mirror;
wherein the first beam splitter directs a first fraction of each of the input laser pulses to the second beam splitter, and directs a second fraction of each of the input laser pulses into the first ring cavity,
wherein the second beam splitter directs a third fraction of each laser pulse incident on it to an output of the pulse multiplier, and directs a fourth fraction of energy of each laser pulse incident on it into the second ring cavity.

16. The pulse multiplier of claim 1 , wherein said set of one or more mirrors comprise at least two curved mirrors.

17. The pulse multiplier of claim 16 , wherein said second set of one or more mirrors comprise at least two curved mirrors.

18. The pulse multiplier of claim 16 , wherein at least two of the curved mirrors have substantially similar radii of curvature.

19. A pulse multiplier comprising:
a first ring cavity comprising a Herriott cell or a White cell, the first ring cavity including:
a first beam splitter that receives a plurality of successive input laser pulses at a first frequency; and
a set of mirrors including at least two curved mirrors having substantially similar radii of curvature; and

a second ring cavity including:
a second beam splitter; and
a second set of one or more mirrors;
wherein the first beam splitter directs a first fraction of each of the input laser pulses to the second beam splitter, and directs a second fraction of each of the input laser pulses into the first ring cavity,
wherein the second beam splitter directs a third fraction of each laser pulse incident on it to an output of the pulse multiplier, and directs a fourth fraction of energy of each laser pulse incident on it into the second ring cavity.

20. The pulse multiplier of claim 19 , wherein the second ring cavity comprises a Herriott cell or a White cell.

21. A pulse multiplier comprising:
a first ring cavity including:
a first beam splitter that receives a plurality of successive input laser pulses at a first frequency; and
a set of one or more mirrors; and

a second ring cavity comprising a Herriott cell or a White cell, the second ring cavity including:
a second beam splitter; and
a second set of mirrors comprising at least two curved mirrors having substantially similar radii of curvature; and
wherein the first beam splitter directs a first fraction of each of the input laser pulses to the second beam splitter, and directs a second fraction of each of the input laser pulses into the first ring cavity,
wherein the second beam splitter directs a third fraction of each laser pulse incident on it to an ou

Assignees

• Kla Tencor Corp

Inventors

• Chuang Yung-Ho Alex
• Liou Justin Dianhuan
• Armstrong J Joseph
• Deng Yujun

Classifications

• G02B27/00

  Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 · CPC title

• G02B27/108

  for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity · CPC title

• H01S3/10

  Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating · CPC title

• H01S3/005 Primary

  Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping (shaping laser beam for working metal or other materials B23K26/06; optical elements, systems or apparatus in general G02B) · CPC title

• G02B17/00

  Systems with reflecting surfaces, with or without refracting elements · CPC title