Method of manufacturing a semiconductor device

Patent metadata

Field	Value
Publication number	US-2016268176-A1
Application number	US-201615060625-A
Country	US
Kind code	A1
Filing date	Mar 4, 2016
Priority date	Mar 11, 2015
Publication date	Sep 15, 2016
Grant date	—

Abstract

A method of manufacturing a semiconductor device includes irradiating a first photoresist layer via a light source, measuring a first exposure intensity of the first photoresist layer, irradiating a second photoresist layer via the light source, measuring a second exposure intensity of the second photoresist layer, subtracting the second exposure intensity from the first exposure intensity, and subsequent to the subtracting, exposing a third photoresist layer formed on a semiconductor substrate by using the light source, wherein an out-of-band (OoB) extreme ultraviolet (EUV) light eliminating layer is formed on the second photoresist layer.

First claim

What is claimed is:

1 . A method of manufacturing a semiconductor device, the method comprising:
irradiating a first photoresist layer with light via an EUV scanner; developing the first photoresist layer to form a first photoresist pattern; measuring thicknesses of the first photoresist pattern; converting the thicknesses of the first photoresist pattern into a first exposure intensity distribution of the first photoresist layer; irradiating a second photoresist layer, on which an OoB EUV light eliminating layer is formed, with light via the EUV scanner; developing the second photoresist layer to from a second photoresist pattern; measuring thicknesses of the second photoresist pattern; converting the thicknesses of the second photoresist pattern into a second exposure intensity distribution of the second photoresist layer; subtracting the second exposure intensity distribution from the first exposure intensity distribution; based on a result of the subtraction, determining an exposure distribution of an OoB EUV radiation that is generated by the EUV scanner; based on the determining, adjusting or determining passing of the EUV scanner or a part of the EUV scanner; after the adjusting or determining passing, exposing a photoresist layer formed on a substrate using the EUV scanner; and patterning the photoresist layer.

2 . The method of claim 1 , wherein the first and second exposure intensities are determined by corresponding thicknesses of the first and second photoresist layers after the first and second photoresist layers are developed to remove portions of the photoresist layers.

3 . The method of claim 2 , wherein the measurement of the thickness is performed by a macro inspection device, an ellipsometer, or a leveling sensor.

4 . A method of manufacturing a semiconductor device, the method comprising:
irradiating a first photoresist layer via a light source; measuring a first exposure intensity of the first photoresist layer; irradiating a second photoresist layer via the light source; measuring a second exposure intensity of the second photoresist layer; subtracting the second exposure intensity from the first exposure intensity; and subsequent to the subtracting, exposing a third photoresist layer formed on a semiconductor substrate by using the light source, wherein an OoB EUV light eliminating layer is formed on the second photoresist layer.

5 . The method of claim 4 , wherein the measuring of the first and second exposure intensities comprises calculating the first and second exposure intensities based on thickness distributions of the first and second photoresist layers.

6 . The method of claim 5 , wherein each of the thickness distributions of the first and second photoresist layers is converted into an exposure intensity distribution according to a relationship between thicknesses and exposure intensities, and the relationship is determined by measuring various photoresist thicknesses varying by corresponding exposure amounts.

7 . The method of claim 5 , wherein each of the thickness distributions of the first and second photoresist layers is determined according to color intensities of the first and second photoresist layers measured via a macro inspection device, respectively.

8 . The method of claim 7 , wherein the color intensities are intensities of a color selected from red (R), green (G), or blue (B).

9 . The method of claim 5 , wherein each of the thickness distributions of the first and second photoresist layers is determined according to changes in polarization states of the first and second photoresist layers, wherein the changes in polarization states are measured via an ellipsometer before and after reflection of the first and second photoresist layers.

10 . The method of claim 5 , wherein each of the thickness distributions of the first and second photoresist layers is determined according to changes in heights of upper surfaces of the first and second photoresist layers measured via a leveling sensor.

11 . The method of claim 4 , wherein:
the measuring of the first and second exposure intensities comprises: converting the first and second exposure intensities at respective points of the first and second photoresist layers into numerical values; and the eliminating of the second exposure intensity from the first exposure intensity comprises: subtracting the numerical value of the second exposure intensity from the numerical value of the first exposure intensity of respective points, and calculating an exposure distribution of an OoB EUV radiation based on a numerical value resulting from the subtraction.

12 . The method of claim 4 , wherein the measuring of the first and second exposure intensities is performed with respect to one or more shot areas per wafer.

13 . The method of claim 4 , wherein the measuring of the first and second exposure intensities comprises: mapping or graphing the first and second exposure intensities.

14 . The method of claim 4 , further comprising measuring exposure distribution of the OoB EUV radiation according to wavelength, wherein the measuring of the exposure distribution comprises performing optical tuning with respect to the OoB EUV light eliminating layer.

15 . The method of claim 4 , wherein the first and second photoresist layers are exposed to light generated from the light source, incident onto a reticle structure, and reflected from the reticle structure.

16 . The method of claim 15 , wherein the reticle structure comprises a circuit pattern area, a black border that supports an edge of the circuit pattern area, and a reticle mask that prevents predetermined areas from being irradiated with light.

17 . The method of claim 16 , wherein the measuring of the first and second exposure intensities comprises measuring exposure intensities of light reflected from the black border or exposure intensities of light reflected from the reticle mask.

18 . A method of manufacturing a semiconductor device, the method comprising:
irradiating a first photoresist layer with light via an EUV scanner and measuring a first exposure intensity of the first photoresist layer; irradiating a second photoresist layer, on which an OoB EUV light eliminating layer is formed, with light via the EUV scanner and measuring a second exposure intensity of the second photoresist layer; subtracting the second exposure intensity from the first exposure intensity and determining, based on a result of the subtraction, an exposure distribution of an OoB EUV radiation that is generated by the EUV scanner; based on the determining, adjusting or determining passing of the EUV scanner; after the adjusting or determining passing, exposing a photoresist layer formed on a substrate using the EUV scanner; and patterning the photoresist layer.

19 . The method of claim 18 , wherein the first and second exposure intensities are measured by corresponding thicknesses of the first and second photoresist layers after the first and second photoresist layers are developed to remove portions of the photoresist layers.

20 . The method of claim 19 , wherein the measurement of the thickness is performed by a macro inspection device, an ellipsometer, or a leveling sensor.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Heo Jin-Seok
• Kim In-Sung

Classifications

• H10P76/2041

  Photolithographic processes · CPC title

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• G03F7/2004

  characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light · CPC title

• H01L21/0332

  Electricity · mapped topic