Leakage testing of integrated circuits

Patent metadata

Field	Value
Publication number	US-2016266200-A1
Application number	US-201514645541-A
Country	US
Kind code	A1
Filing date	Mar 12, 2015
Priority date	Mar 12, 2015
Publication date	Sep 15, 2016
Grant date	—

Abstract

A test configuration for testing a leakage current of a device under test (DUT) of an integrated circuit is provided including a logarithmic transducer electrically connected to the DUT and a voltmeter electrically connected to the logarithmic transducer.

First claim

What is claimed:

1 . A test configuration for testing a leakage current of a device under test (DUT) of an integrated circuit, comprising:
a logarithmic transducer electrically connected to said DUT; and a voltmeter electrically connected to said logarithmic transducer.

2 . The test configuration of claim 1 , wherein said logarithmic transducer is formed on a wafer comprising said integrated circuit.

3 . The test configuration of claim 1 , wherein said logarithmic transducer comprises a diode.

4 . The test configuration of claim 3 , wherein said diode is a P-type or N-type diode.

5 . The test configuration of claim 1 , further comprising a power node supplying a measurement voltage to said DUT and wherein said power node is electrically connected to said DUT via a first probe pad and said logarithmic transducer is connected to said voltmeter via a second probe pad.

6 . The test configuration of claim 1 , further comprising an operational amplifier electrically connected to said DUT and said logarithmic transducer via a probe pad and electrically connected to a power node supplying a measurement voltage to said DUT and to said voltmeter.

7 . The test configuration of claim 1 , wherein a plurality of DUTs are electrically connected to said DUT.

8 . A test configuration for testing a leakage current of a device under test (DUT) of an integrated circuit, comprising
a power node supplying a measurement voltage to said DUT via a first probe pad of said integrated circuit; a logarithmic transducer electrically connected to said DUT; a voltmeter electrically connected to said logarithmic transducer via a second probe pad of said integrated circuit; and an operational amplifier electrically connected to said DUT and said logarithmic transducer via a third probe pad and electrically connected to said voltmeter.

9 . The test configuration of claim 8 , wherein said logarithmic transducer is formed on a wafer comprising said integrated circuit.

10 . The test configuration of claim 8 , wherein said logarithmic transducer comprises a diode.

11 . The test configuration of claim 10 , wherein said diode is a P-type or N-type diode.

12 . The test configuration of claim 8 , wherein said DUT is selected of a group consisting of a metal comb, a comb-comb structure, a comb-meander structure, a well and a transistor.

13 . A method of determining a leakage current of a device under test (DUT) of an integrated circuit, comprising the steps of:
electrically connecting said DUT to a logarithmic transducer; electrically connecting said logarithmic transducer to a voltmeter; and measuring a voltage corresponding to a leakage current of said DUT by said voltmeter.

14 . The method of claim 13 , further comprising forming said logarithmic transducer on a same wafer whereupon said integrated circuit is formed.

15 . The method of claim 13 , further comprising transducing by said logarithmic transducer a leakage current of said DUT to the voltage measured by said voltmeter.

16 . The method of claim 13 , wherein said logarithmic transducer comprises a diode.

17 . The method of claim 13 , further comprising controlling a load voltage across said logarithmic transducer by means of an operational amplifier.

18 . The method of claim 13 , wherein said voltmeter is operated in a fixed measuring range of a particular decade only.

Assignees

• Globalfoundries Inc

Inventors

• Mikalo Ricardo Pablo

Classifications

• G01R31/2851 Primary

  Testing of integrated circuits [IC] (G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801) · CPC title

• G01R31/3008 Primary

  Quiescent current [IDDQ] test or leakage current test · CPC title

• G01R19/0092

  Measuring current only · CPC title

• G01R31/2884

  using dedicated test connectors, test elements or test circuits on the IC under test (G01R31/2855 takes precedence) · CPC title

• G01R31/52

  Testing for short-circuits, leakage current or ground faults · CPC title