Wafer carrier

Patent metadata

Field	Value
Publication number	US-2016254172-A1
Application number	US-201615057342-A
Country	US
Kind code	A1
Filing date	Mar 1, 2016
Priority date	Aug 12, 2011
Publication date	Sep 1, 2016
Grant date	—

Abstract

A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.

First claim

1 . A wafer container, comprising:
a shell having an interior and an exterior, the shell including a plurality of fastening members that extend outward from a bottom portion of the shell, each fastening member defining an access port that is in fluid communication with the interior of the shell; a plurality of supports disposed in the interior for accommodating a substrate; a door sealingly accommodated by the shell; a bottom plate connected to the shell at a plurality of locations and having a plurality of radially aligned kinematic grooves; and a plurality of connectors, one corresponding to each of the plurality of fastening members, the connectors being configured for selective coupling to the fastening members, defining a through port that substantially surrounds the fastening members wherein the plurality of fastening members extend through the bottom plate, and wherein the connectors are configured to capture the bottom flange between the connectors and the shell.

2 . The wafer container of claim 1 , wherein the plurality of connectors are twist lock connectors.

3 . The wafer container of claim 2 , wherein each of the fastening members includes a cylindrical body with a pin that extends radially outward therefrom, and wherein the connector includes a flange on a first end and an arcuate arm on a second end, the arcuate arm defining a tangential slot for engagement with the pin, the arcuate arm including a tab that extends radially outward parallel to flange, wherein the bottom plate is captured between the tab and the flange.

4 . The wafer container of claim 1 wherein each of the fastening members includes a gusset member that extends from the bottom portion of the shell along a base portion of fastening member, and wherein the arcuate arm is in contact with said gusset.

5 . The wafer container of claim 1 wherein a grommet is disposed within said fastening members.

6 . A wafer container, comprising:
a shell having an interior and an exterior, the shell including a plurality of fastening members that extend downwardly from a bottom portion of the shell, each fastening member configured as a boss with a tubular body; supports disposed in the interior for accommodating a substrate; a door sealingly accommodated by the shell; a bottom plate connected to the shell at a plurality of locations and having a plurality of radially aligned kinematic grooves and having openings corresponding to each of the fastening members; and a plurality of connectors, one corresponding to each of the plurality of fastening members, the connectors being configured for coupling to the fastening members, wherein the plurality of fastening members extend through the bottom plate, and wherein the connectors are configured to capture the bottom flange between the connectors and the shell.

7 . The wafer container of claim 6 wherein a connection formed by each of the fastening members and connectors are configured as a bayonet connection.

8 . A front opening wafer container having a container portion with a front opening and a door for insertion into said front opening, the container portion comprising a shell having a top wall, a bottom wall, two side walls, a back wall, and an interior, the container portion further comprising a base plate having three kinematic coupling grooves connected to the shell at a plurality of connection points and a pair of wafer support components positioned in the interior of the shell, each wafer support component comprising a plurality of shelves for supporting a spaced stack of wafers, each wafer support component having a bracket at a rearward end of the component that engages with a bracket unitary with the side wall to secure the rearward end of the bracket to the sidewall, the component further comprising a forward bracket with a plurality of openings that are in alignment with a plurality of openings on a cooperating forward bracket integral with the shell, the container further comprising a locking clip, the locking clip comprising a plurality of tabs that when the locking clip is put into a securement position extend through one of the openings in the forward bracket of the shell and one of the openings in the forward bracket of the component.

Assignees

• Entegris Inc

Inventors

• Adams Michael S
• Gregerson Barry
• Fuller Matthew A

Classifications

• H10P72/1922

  characterised by the construction of the closed carrier · CPC title

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1918

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H10P72/1916

  characterised by sealing arrangements · CPC title

• H10P72/1914

  characterised by locking systems · CPC title