Corrosion-resistant member and electrostatic chuck device

Patent metadata

Field	Value
Publication number	US-2016251265-A1
Application number	US-201415027339-A
Country	US
Kind code	A1
Filing date	Oct 15, 2014
Priority date	Oct 15, 2013
Publication date	Sep 1, 2016
Grant date	—

Abstract

Provided are a corrosion-resistant member and an electrostatic chuck device using the same, in which corrosion resistance to halogen corrosive gas such as fluorine corrosive gas or chlorine corrosive gas and plasma thereof is high, dielectric constant and volume resistivity are high, and dielectric loss is low. The corrosion-resistant member is formed of a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, in which the rare earth metal element other than samarium has an ionic radius of 0.88×10 −10 m or more.

First claim

1 . A corrosion-resistant member comprising
a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, wherein the rare earth metal element other than samarium has an ionic radius of 0.88×10 −10 m or more.

2 . The corrosion-resistant member according to claim 1 ,
wherein a ratio (N RE /(N SM +N RE )) of the number of atoms of the rare earth metal element other than samarium (N RE ) to the sum (N SM +N RE ) of the number of atoms of samarium (N SM ) and the number of atoms of the rare earth metal element other than samarium (N RE ) in the composite oxide is 0.01 or higher and 0.5 or lower.

3 . The corrosion-resistant member according to claim 1 ,
wherein the rare earth metal element other than samarium is one element or two or more elements selected from the group consisting of yttrium, lanthanum, praseodymium, neodymium, europium, gadolinium, terbium, dysprosium, holmium, erbium, and thulium.

4 . The corrosion-resistant member according to claim 1 ,
wherein a crystal phase of the composite oxide sintered compact is an orthorhombic perovskite phase.

5 . The corrosion-resistant member according to claim 1 ,
wherein a dielectric constant at a frequency of 1 MHz or lower is 13 or higher, a dielectric loss at a frequency of 1 MHz or lower is 0.2 or lower, and volume resistivity is 1×10 14 Ω·cm or higher.

6 . An electrostatic chuck device comprising:
a ceramic plate-shaped body that has a first main surface which is a placement surface on which a sample is placed; and an internal electrode for electrostatic adsorption that is provided on a second main surface of the ceramic plate-shaped body, wherein the ceramic plate-shaped body is formed of the corrosion-resistant member according to claim 1 .

7 . The electrostatic chuck device according to claim 6 , further comprising:
a cooling base portion that cools the ceramic plate-shaped body and the internal electrode for electrostatic adsorption; and a heating member that is provided between the internal electrode for electrostatic adsorption and the cooling base portion.

Assignees

• Sumitomo Osaka Cement Co Ltd

Inventors

• Takahashi Kentaro
• Moriya Yoshiaki
• OOTOMO Megumi

Classifications

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H05K7/2039

  characterised by the heat transfer by conduction from the heat generating element to a dissipating body (arrangements for increasing/decreasing heat-transfer, e.g. fins details, F28F13/00) · CPC title

• H02N13/00

  Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect · CPC title