Stretchable electronics for artificial skin

Patent metadata

Field	Value
Publication number	US-2016250015-A1
Application number	US-201615055492-A
Country	US
Kind code	A1
Filing date	Feb 26, 2016
Priority date	Feb 27, 2015
Publication date	Sep 1, 2016
Grant date	—

Abstract

Disclosed are a stretchable electronic device for artificial skin and a method of manufacturing the same, wherein the stretchable electronic device for artificial skin includes a first encapsulation layer, a heater disposed on the first encapsulation layer, a second encapsulation layer disposed on the heater, a first sensor array layer disposed on the second encapsulation layer, and a third encapsulation layer disposed on the first sensor array layer.

First claim

What is claimed is:

1 . A stretchable electronic device for artificial skin, comprising:
a first encapsulation layer; a heater disposed on the first encapsulation layer; a second encapsulation layer disposed on the heater; a first sensor array layer disposed on the second encapsulation layer; and a third encapsulation layer disposed on the first sensor array layer.

2 . The stretchable electronic device of claim 1 , wherein the first sensor array layer comprises at least one selected from among a strain sensor, a pressure sensor, and a temperature sensor.

3 . The stretchable electronic device of claim 2 , wherein the first sensor array layer comprises:
a first passivation layer, a semiconductor pattern disposed on the first passivation layer, a first metal pattern disposed on the semiconductor pattern, and a second passivation layer disposed on the first metal pattern.

4 . The stretchable electronic device of claim 3 , wherein the semiconductor pattern and the first metal pattern have a serpentine shape.

5 . The stretchable electronic device of claim 3 , wherein the semiconductor pattern is a silicon pattern formed by patterning a doped silicon nanomembrane.

6 . The stretchable electronic device of claim 3 , wherein the semiconductor pattern is a silicon nanoribbon.

7 . The stretchable electronic device of claim 3 , wherein the pressure sensor has a cavity in the first passivation layer to expose the semiconductor pattern.

8 . The stretchable electronic device of claim 2 , wherein the strain sensor and the pressure sensor have different curvatures depending on a position of a human body to which the stretchable electronic device is attached, and
a strain induced by the human body is further relieved with an increase in the curvature.

9 . The stretchable electronic device of claim 2 , wherein the strain sensor has a Wheatstone bridge configuration.

10 . The stretchable electronic device of claim 2 , wherein a divergence between I-V curves of the temperature sensor under different strains is decreased with an increase in a curvature of the temperature sensor.

11 . The stretchable electronic device of claim 1 , wherein the heater comprises:
a third passivation layer, a second metal pattern disposed on the third passivation layer, and a fourth passivation layer disposed on the second metal pattern.

12 . The stretchable electronic device of claim 11 , wherein the second metal pattern has a serpentine shape.

13 . The stretchable electronic device of claim 1 , further comprising a second sensor array layer disposed on the third encapsulation layer.

14 . The stretchable electronic device of claim 13 , wherein the second sensor array layer comprises a humidity sensor.

15 . The stretchable electronic device of claim 14 , wherein the humidity sensor comprises:
a fifth passivation layer, a third metal pattern disposed on the fifth passivation layer, and a sixth passivation layer disposed on the third metal pattern.

16 . The stretchable electronic device of claim 15 , wherein the third metal pattern has a serpentine shape.

17 . The stretchable electronic device of claim 14 , wherein the humidity sensor detects a change in capacitance induced by a change in permittivity of the sixth passivation layer, into which a water molecule is absorbed.

18 . The stretchable electronic device of claim 1 , wherein each of the first encapsulation layer, the second encapsulation layer, and the third encapsulation layer is formed of a silicone polymer or silicone rubber.

19 . The stretchable electronic device of claim 18 , wherein the silicone polymer is polydimethylsiloxane (PDMS).

Assignees

• Univ Seoul Nat R & Db Found
• Inst Basic Science

Inventors

• Kim Daehyeong
• Hyeon Taeghwan
• Kim Jaemin
• Lee Mincheol
• Shim Hyungjoon

Classifications

• A61F2002/766

  for measuring moisture · CPC title

• A61F2/50

  Prostheses not implantable in the body {(closure means for urethra or rectum or for artificial body openings therefor A61F2/0004)} · CPC title

• A61F2002/5063

  the feeling of temperature, i.e. of warmth or cold · CPC title

• G06F3/015

  Input arrangements based on nervous system activity detection, e.g. brain waves [EEG] detection, electromyograms [EMG] detection, electrodermal response detection · CPC title

• G01L5/228

  using tactile array force sensors · CPC title