Silicon photonics integration method and structure

Patent metadata

Field	Value
Publication number	US-2016247944-A1
Application number	US-201615142202-A
Country	US
Kind code	A1
Filing date	Apr 29, 2016
Priority date	Dec 23, 2014
Publication date	Aug 25, 2016
Grant date	—

Abstract

Approaches for silicon photonics integration are provided. A method includes: forming at least one encapsulating layer over and around a photodetector; thermally crystallizing the photodetector material after the forming the at least one encapsulating layer; and after the thermally crystallizing the photodetector material, forming a conformal sealing layer on the at least one encapsulating layer and over at least one device. The conformal sealing layer is configured to seal a crack in the at least one encapsulating layer. The photodetector and the at least one device are on a same substrate. The at least one device includes a complementary metal oxide semiconductor device or a passive photonics device.

First claim

What is claimed is:

1 . A method of forming a semiconductor structure, comprising:
forming an optical waveguide; forming a photodetector on and over the optical waveguide; forming at least one encapsulating layer over and around the photodetector; and forming a conformal sealing layer on the at least one encapsulating layer and over at least one device, wherein the conformal sealing layer is configured to seal a crack in the at least one encapsulating layer, the photodetector and the at least one device are on a same substrate; and the at least one device comprises a complementary metal oxide semiconductor device or a passive photonics device.

2 . The method of claim 1 , wherein:
thermally crystallizing the photodetector material forms the crack in the at least one encapsulating layer; and the conformal sealing layer plugs the crack.

3 . The method of claim 1 , wherein the forming the conformal sealing layer comprises forming a silicon nitride layer using rapid thermal chemical vapor deposition.

4 . The method of claim 1 , wherein the at least one device comprises a transistor, and further comprising:
masking a first portion of the conformal sealing layer over the photodetector; and removing a second portion of the conformal sealing layer from over the transistor.

5 . The method of claim 4 , further comprising:
forming silicide on the transistor after the removing a second portion of the conformal sealing layer from over the transistor; and forming a barrier layer on both the transistor and the first portion of the conformal sealing layer over the photodetector.

6 . The method of claim 5 , wherein:
the forming the conformal sealing layer comprises forming a silicon nitride layer using rapid thermal chemical vapor deposition; and the forming the barrier layer comprises forming another silicon nitride layer using plasma enhanced chemical vapor deposition.

7 . The method of claim 1 , wherein the at least one device comprises a laser grating coupler, and further comprising:
forming a barrier layer on both a first portion of the conformal sealing layer over the photodetector and a second portion of the conformal sealing layer over the laser grating coupler; and removing a portion of the barrier layer from over the laser grating coupler.

8 . The method of claim 1 , wherein the at least one device comprises a first device and a second device such that the conformal sealing layer is formed over the first device, the second device, and the at least one encapsulating layer, and further comprising:
removing a portion of the conformal sealing layer from over the first device; forming a barrier layer on the first device and on the conformal sealing layer over both the second device and the at least one encapsulating layer; and removing a portion of the barrier layer from over the second device.

9 . The method of claim 1 , further comprising forming a nitride layer on the at least one device prior to the forming the conformal sealing layer, wherein the conformal sealing layer is formed on the nitride layer, and wherein the at least one device comprises a resistor.

10 . A method of forming a semiconductor structure, comprising:
forming an optical waveguide in an silicon on insulator (SOI) substrate; forming a complementary metal oxide semiconductor (CMOS) device, a passive photonics device, and a photodetector material on the SOI substrate; forming encapsulating layers over the CMOS device, the passive photonics device, and the photodetector material; and forming a conformal sealing layer over the CMOS device, over the passive photonics device, and on a portion of the encapsulating layers over the photodetector material.

11 . The method of claim 10 , further comprising:
removing a portion of the conformal sealing layer over the CMOS device; and forming a barrier layer on the CMOS device and on a portion of the conformal sealing layer over the photodetector material.

12 . The method of claim 10 , further comprising:
forming a barrier layer on the conformal sealing layer over the passive photonics device and over the photodetector material; and removing a portion of the barrier layer over the passive photonics device.

13 . The method of claim 10 , wherein:
the forming the encapsulating layers comprises forming at least one silicon nitride layer using plasma enhanced chemical vapor deposition prior to the crystallizing; and the forming the conformal sealing layer comprises forming a silicon nitride layer using rapid thermal chemical vapor deposition after the crystallizing.

14 . The method of claim 13 , wherein:
further comprising crystallizing the photodetector material, wherein the crystallizing the photodetector material forms a crack in the encapsulating layers; and the conformal sealing layer plugs the crack.

15 . The method of claim 10 , further comprising:
forming a nitride layer over the CMOS device and the passive photonics device prior to the forming the photodetector material on the substrate; and removing a portion of the nitride layer over the passive photonics device after the forming the encapsulating layers, wherein a portion of the conformal sealing layer is formed directly on a portion of the nitride layer over the CMOS device.

16 . A semiconductor structure, comprising:
an optical waveguide surrounded by isolation regions; a photodetector material over the optical waveguide; a plurality of silicon nitride layers over the photodetector material; a conformal silicon nitride sealing layer over the plurality of silicon nitride layers and over the photodetector material; and a silicon nitride barrier layer on the conformal silicon nitride sealing layer and over the photodetector material.

17 . The structure of claim 16 , further comprising a transistor, wherein the silicon nitride barrier layer is on the transistor without the conformal silicon nitride sealing layer over the transistor.

18 . The structure of claim 16 , further comprising a passive photonics device, wherein the conformal silicon nitride sealing layer is on the passive photonics device without the silicon nitride barrier layer over the passive photonics device.

19 . The structure of claim 16 , further comprising a resistor, wherein:
the conformal silicon nitride sealing layer is directly on the resistor; and the silicon nitride barrier layer is directly on the conformal silicon nitride sealing layer over the resistor.

20 . The structure of claim 16 , wherein the conformal silicon nitride sealing layer is configured to plug a crack that extends through at least one of the plurality of silicon nitride layers.

Assignees

• IBM

Inventors

• Assefa Solomon
• Barwicz Tymon
• Green William M
• Khater Marwan H
• Rosenberg Jessie C
• Shank Steven M

Classifications

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/6336

  in the presence of a plasma [PECVD] · CPC title

• H10P14/6334

  using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition (deposition by physical ablation of a target H10P14/6329) · CPC title

• H10P14/414

  of metal-silicide materials · CPC title

• Y02E10/50

  Photovoltaic [PV] energy · CPC title