Ultrasonic cleaning method

US2016236242A1 · US · A1

Patent metadata
FieldValue
Publication numberUS-2016236242-A1
Application numberUS-201615137004-A
CountryUS
Kind codeA1
Filing dateApr 25, 2016
Priority dateJan 27, 2012
Publication dateAug 18, 2016
Grant date

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A cleaning method for cleaning an object involves disposing the object in a first cleaning liquid held in a first cleaning tank; ultrasonically vibrating the first cleaning liquid via a first intermediate medium in contact with the first cleaning tank; disposing the object in a second cleaning liquid held in a second cleaning tank; and ultrasonically vibrating the second cleaning liquid via a second intermediate medium in contact with the second cleaning tank, wherein the first cleaning liquid and the first intermediate medium allow sonic velocities, respectively, having a first difference from each other, wherein the second cleaning liquid and the second intermediate medium allow sonic velocities, respectively, having a second difference from each other, and wherein the first and second differences are different from each other.

First claim

Opening claim text (preview).

1 . A cleaning method for cleaning an object, the method comprising: disposing the object in a first cleaning liquid held in a first cleaning tank; ultrasonically vibrating the first cleaning liquid via a first intermediate medium in contact with the first cleaning tank; disposing the object in a second cleaning liquid held in a second cleaning tank; and ultrasonically vibrating the second cleaning liquid via a second intermediate medium in contact with the second cleaning tank, wherein the first cleaning liquid and the first intermediate medium allow sonic velocities, respectively, having a first difference from each other, wherein the second cleaning liquid and the second intermediate medium allow sonic velocities, respectively, having a second difference from each other, and wherein the first and second differences are different from each other. 2 . The method of claim 1 , further comprising: adjusting a temperature of at least one of the first intermediate medium and the second intermediate medium so as to set the first difference and the second difference differently. 3 . The method of claim 2 , wherein the adjusting the temperature includes: using a heating member. 4 . The method of claim 2 , wherein the adjusting the temperature includes: modifying a retention time of the first intermediate medium being in contact with the first cleaning tank. 5 . The method of claim 2 , wherein the first intermediate medium is degassed water, and wherein the adjusting the temperature includes modifying a retention time of the first intermediate medium being in contact with the first cleaning tank. 6 . The method claim 1 , wherein the first intermediate medium and the second intermediate medium have mutually different compositions. 7 . The method of claim 1 , wherein the first intermediate medium is degassed water.

Assignees

Inventors

Classifications

  • H10P50/00Primary

    Etching of wafers, substrates or parts of devices · CPC title

  • with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration · CPC title

  • B08B3/12Primary

    by sonic or ultrasonic vibrations · CPC title

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What does patent US2016236242A1 cover?
A cleaning method for cleaning an object involves disposing the object in a first cleaning liquid held in a first cleaning tank; ultrasonically vibrating the first cleaning liquid via a first intermediate medium in contact with the first cleaning tank; disposing the object in a second cleaning liquid held in a second cleaning tank; and ultrasonically vibrating the second cleaning liquid via a s…
Who is the assignee on this patent?
Siltronic Ag
What technology area does this patent fall under?
Primary CPC classification H10P50/00. Mapped technology areas include Electricity.
When was this patent published?
Publication date Thu Aug 18 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).