Method for fabricating array substrate

Patent metadata

Field	Value
Publication number	US-2016211284-A1
Application number	US-201314347833-A
Country	US
Kind code	A1
Filing date	Apr 22, 2013
Priority date	Feb 20, 2013
Publication date	Jul 21, 2016
Grant date	—

Abstract

Embodiments of the invention provides a method for fabricating an array substrate comprising: forming, on a substrate, at least two semiconductor active islands, first patterns positioned on both sides of each of the semiconductor active islands, second patterns positioned at outer side of a part of the first patterns, and third patterns positioned at outer side of the rest of the first patterns, through a single patterning process; doping a semiconductor at the second patterns for once to form a semiconductor of a first conductivity type; and doping a semiconductor at the third patterns for once to form a semiconductor of a second conductivity type.

First claim

1 . A method for fabricating an array substrate, comprising:
forming, on a substrate, at least two semiconductor active islands, first patterns positioned on both sides of each of the semiconductor active islands, second patterns positioned at outer side of a part of the first patterns, and third patterns positioned at outer side of the rest of the first patterns, through a single patterning process; doping a semiconductor at the second patterns for once to form a semiconductor of a first conductivity type; and doping a semiconductor at the third patterns for once to form a semiconductor of a second conductivity type.

2 . The method of claim 1 , wherein forming at least two semiconductor active islands, first patterns positioned on both sides of each of the semiconductor active islands, second patterns positioned at outer side of a part of the first patterns, and third patterns positioned at outer side of the rest of the first patterns through a single patterning process comprises:
forming a polysilicon layer on the substrate; forming a photoresist on the polysilicon layer; exposing and developing the photoresist by using a tri-tone mask, and etching the polysilicon layer to form the at least two semiconductor active islands, the first patterns positioned on both sides of each of the semiconductor active islands, the second patterns positioned at outer side of a part of the first patterns, and the third patterns positioned at outer side of the rest of the first patterns.

3 . The method of claim 2 , wherein exposing and developing the photoresist by using a tri-tone mask, and etching the polysilicon layer to form the at least two semiconductor active islands, the first patterns positioned on both sides of each of the semiconductor active islands, the second patterns positioned at outer side of a part of the first patterns, and the third patterns positioned at outer side of the rest of the first patterns comprises:
exposing and developing the photoresist by using the tri-tune mask to form a photoresist-completely-retained region, a first photoresist-partially-retained region, a second photoresist-partially-retained region and a photoresist-completely-removed region, a thickness of the first photoresist-partially-retained region is larger than that of the second photoresist-partially-retained region; wherein the photoresist-completely-retained region corresponds to the at least two semiconductor active islands and the third patterns to be formed, the first photoresist-partially-retained region corresponds to the first patterns to be formed, the second photoresist-partially-retained region corresponds to the second patterns to be formed, and the photoresist-completely-removed region corresponds to a void region; removing the polysilicon in the photoresist-completely-removed region via etching to form the at least two semiconductor islands, the first patterns positioned on both sides of each of the semiconductor active islands, the second patterns positioned at outer side of a part of the first patterns, and the third patterns positioned at outer side of the rest of the first patterns; removing the photoresist in the second photoresist-partially-retained region via a first ashing process; removing the photoresist in the first photoresist-partially-retained region via a second ashing process; and removing the photoresist in the photoresist-completely-retained region via ashing or peeling process.

4 . The method of claim 3 , wherein doping the semiconductor at the second patterns for once to form a semiconductor of a first conductivity type comprises:
doping the semiconductor at the exposed second patterns with a first dopant to form the semiconductor of a first conductivity type after removing the photoresist of the second photoresist-partially-retained region via the first ashing process and before removing the photoresist in the first photoresist-partially-retained region via the second ashing process.

5 . The method of claim 1 , wherein after doping the semiconductor at the second patterns for once to form a semiconductor of a first conductivity type, the method further comprises: lightly doping the semiconductor at the first patterns for once.

6 . The method of claim 5 , wherein lightly doping the semiconductor at the first patterns for once comprises:
lightly doping the semiconductor at the exposed first pattern for once after removing the photoresist in the first photoresist-partially-retained region via the second ashing process and before removing the photoresist in the photoresist-completely-retained region via ashing or peeling process.

7 . The method of claim 1 , wherein after doping the semiconductor at the second pattern for once to form the semiconductor of a first conductivity type, the method further comprises:
sequentially forming a gate insulation layer, a gate metal layer comprising a gate electrode pattern, and a protection layer on the substrate done with the previous steps; and forming a first via hole in the gate insulation layer and a second via hole in the protection layer through a single patterning process; the first via hole and the second via hole exposes at least the third patterns.

8 . The method of claim 7 , wherein the first via hole and the second via hole exposes at least the third pattern comprises: the first via hole and the second via hole exposes the second patterns and the third patterns.

9 . The method of claim 8 , wherein doping the semiconductor at the third patterns for once to form the semiconductor of a second conductivity type comprises: doping the semiconductor at the exposed second patterns and the exposed third patterns with a second dopant to form the semiconductor of a second conductivity type at the third patterns, wherein a doping amount of the second dopant is smaller than that of the first dopant.

10 . The method of claim 9 , wherein the doping amount of the second dopant is a half of the doping amount of the first dopant.

11 . The method of claim 9 , wherein the first dopant is one of boron and phosphor, and the second dopant is the other one of boron and phosphor.

12 . The method of claim 1 , wherein after doping the semiconductor at the third patterns for once to form the semiconductor of a second conductivity type, the method further comprises:
forming a source/drain metal layer comprising a source/drain electrode pattern and a pixel electrode pattern electrically connected to the drain electrode pattern on the substrate done with the previous steps.

13 . The method of claim 1 , wherein the first conductivity type is P type and the second conductivity type is N type; or
the first conductivity type is N type and the second conductivity type is P type.

14 . The method of claim 1 , wherein the method further comprises forming a common electrode pattern.

15 . The method of claim 2 , wherein after doping the semiconductor at the second patterns for once to form a semiconductor of a first conductivity type, the method further comprises: lightly doping the semiconductor at the first patterns for once.

16 . The method of claim 3 , wherein after doping the semiconductor at the second patterns for once to form a semiconductor of a first conductivity type, the method further comprises: lightly doping the semiconductor at the first patterns for once.

17 . The method of claim 4 , wherein after doping the semiconductor at the second patterns for once to form a semiconductor of a first conductivity type, the method further comprises: lightly doping the semiconductor at the first patterns for once.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Zhang Fangzhen

Classifications

• H10P50/71

  using masks for conductive or resistive materials · CPC title

• H10P76/2041

  Photolithographic processes · CPC title

• H10P50/642

  Chemical etching · CPC title

• H10P30/20

  into semiconductor materials, e.g. for doping · CPC title

• H10P14/3456

  Polycrystalline · CPC title