System and method to determine depth for optical wafer inspection
US-9389349-B2 · Jul 12, 2016 · US
US2016202090A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016202090-A1 |
| Application number | US-201514975252-A |
| Country | US |
| Kind code | A1 |
| Filing date | Dec 18, 2015 |
| Priority date | Jan 8, 2015 |
| Publication date | Jul 14, 2016 |
| Grant date | — |
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A method and system for remote sensing using optical orbital angular momentum (OAM)-based spectroscopy for lateral motion detection. The method includes applying an OAM mode on a light beam to generate an OAM light beam, the OAM light beam having an optical OAM spectrum, applying an OAM optical beam tilt on the OAM light beam to generate a tilted OAM light beam, transmitting the tilted OAM light beam on a remote object, such that the remote object interacts with the tilted OAM light beam, receiving a reflected OAM spectrum associated with the remote object, the reflected OAM spectrum having power values of OAM modes on opposite sides of an OAM launch mode, and displaying lateral motion of the remote object based on the reflected OAM spectrum by comparing the power values.
Opening claim text (preview).
What is claimed is: 1 . A transmitter for remote sensing using optical orbital angular momentum (OAM)-based spectroscopy for lateral motion detection, the transmitter comprising: a light source modulator configured to generate a light beam for imaging a remote object; at least one OAM generator to apply at least one OAM mode on the light beam to generate an OAM light beam, the OAM light beam having an optical OAM spectrum; and at least one optical beam tilter to apply at least one optical beam tilt on the OAM light beam to generate a tilted OAM light beam, wherein the tilted OAM light beam interacts with the remote object to provide lateral motion associated with the remote object. 2 . The transmitter according to claim 1 , wherein the at least one OAM mode is an arbitrary non-zero OAM mode. 3 . The transmitter according to claim 1 , wherein the at least one OAM generator includes at least one of a spatial light modulator, a liquid crystal on silicon spatial light modulator (LCOS-SLM), Q-phase plates, an OAM sorter or a combination thereof. 4 . The transmitter according to claim 1 , further comprising at least one imaging optics device, the at least one imaging optics devices including at least one of a lens, a plurality of lenses arranged in a series, a microscope objective, free-space optics, or a combination thereof. 5 . The transmitter according to claim 1 , wherein: the OAM light beam propagates on a beam axis and the tilted OAM light beam propagates on a reference axis; and the at least one optical beam tilt is a tilt with respect to at least one reference axis, the at least one reference axis being orthogonal to the beam axis. 6 . The transmitter according to claim 1 , wherein the at least one OAM generator is further configured to receive a reflected OAM spectrum to characterize the lateral motion of the remote object, the reflected OAM spectrum having at least two power values of OAM modes on opposite sides of an OAM launch mode. 7 . The transmitter according to claim 6 , further comprising a processor to compare the at least two power values to display lateral motion of the remote object based on the reflected OAM spectrum. 8 . The transmitter according to claim 7 , wherein the lateral motion of the remote object includes at least one of one-dimensional motion and/or two-dimensional motion. 9 . A receiver for remote sensing using optical orbital angular momentum (OAM)-based spectroscopy for lateral motion detection, the receiver comprising: at least one optical beam tilter to apply at least one optical beam tilt on an OAM light beam to generate a tilted OAM light beam, the titled OAM light beam having a reflected optical OAM spectrum; at least one OAM detector configured to receive the reflected OAM spectrum associated with a remote object, the reflected OAM spectrum having at least two power values of OAM modes on opposite sides of an OAM launch mode; and a processor to compare the at least two power values to display lateral motion of the remote object based on the reflected OAM spectrum. 10 . The receiver according to claim 9 , wherein the tilted OAM light beam includes at least one OAM mode, the OAM mode being a non-zero OAM mode. 11 . The receiver according to claim 9 , wherein the at least one OAM detector includes at least one of a spatial light modulator, a liquid crystal on silicon spatial light modulator (LCOS-SLM), Q-phase plates, an OAM sorter or a combination thereof. 12 . The receiver according to claim 9 , further comprising at least one imaging optics device, the at least one imaging optics devices including at least one of a lens, a plurality of lenses arranged in a series, a microscope objective, free-space optics, or a combination thereof. 13 . The receiver according to claim 9 , wherein: the OAM light beam propagates on a beam axis and the tilted OAM light beam propagates on a reference axis; and the at least one optical beam tilt is a tilt with respect to at least one reference axis, the at least one reference axis being orthogonal to the beam axis. 14 . The receiver according to claim 9 , wherein the lateral motion of the remote object includes at least one of one-dimensional motion and/or two-dimensional motion. 15 . A method for remote sensing using optical orbital angular momentum (OAM)-based spectroscopy for lateral motion detection, comprising: applying at least one OAM mode on a light beam to generate an OAM light beam, the OAM light beam having an optical OAM spectrum; applying at least OAM optical beam tilt on the OAM light beam to generate a tilted OAM light beam; transmitting the tilted OAM light beam on a remote object, such that the remote object interacts with the tilted OAM light beam; receiving a reflected OAM spectrum associated with the remote object, the reflected OAM spectrum having at least two power values of OAM modes on opposite sides of an OAM launch mode; and displaying lateral motion of the remote object based on the reflected OAM spectrum by comparing the at least two power values. 16 . The method according to claim 15 , wherein the at least one OAM mode is an arbitrary non-zero OAM mode. 17 . The method according to claim 15 , wherein: the OAM light beam propagates on a beam axis and the tilted OAM light beam propagates on a reference axis; and the at least one optical beam tilt is a tilt with respect to at least one reference axis, the at least one reference axis being orthogonal to the beam axis. 18 . The method according to claim 15 , wherein the lateral motion of the remote object includes at least one of one-dimensional motion and/or two-dimensional motion.
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