Method for dressing polishing pads

Patent metadata

Field	Value
Publication number	US-2016199964-A1
Application number	US-201614994202-A
Country	US
Kind code	A1
Filing date	Jan 13, 2016
Priority date	Jan 14, 2015
Publication date	Jul 14, 2016
Grant date	—

Abstract

A method dresses one polishing cloth or two polishing pads simultaneously, in which a polishing cloth has been applied to a polishing plate, with at least one dresser ( 4 ), which is equipped with at least one dressing element ( 8 ), this at least one dressing element ( 8 ) being in contact with the at least one polishing cloth ( 11, 12 ) to be dressed, wherein the at least one polishing plate ( 21, 22 ) is rotated with a relative rotational speed and the at least one dresser ( 4 ) is rotated with a relative rotational speed and at least two different combinations of directions of rotation of the two pairs of polishing plates ( 21, 22 ) and pin wheels ( 31, 32 ) are executed during the simultaneous dressing of two polishing pads ( 11, 12 ) or during the dressing of one polishing cloth ( 11 ) of the polishing plate ( 21 ) and of the at least one dresser ( 4 ).

First claim

1 . A method for dressing one polishing cloth or simultaneously dressing two polishing pads, each including a polishing cloth applied to a polishing plate, using at least one dresser including a dressing element, the dressing element being in contact with the polishing cloth to be dressed, the method comprising:
rotating the at least one polishing plate with a first relative rotational speed; rotating the at least one dresser with a second relative rotational speed; and executing at least two different combinations of directions of rotation of (i) the polishing plates and pin wheels during a simultaneous dressing of the two polishing pads or, (ii) during the dressing of the one polishing cloth of the polishing plate, and the at least one dresser.

2 . The method of claim 1 , further comprising, when simultaneously dressing two polishing pads:
rotating the at least one dresser using a rolling device including an inner gear wheel and an outer gear wheel.

3 . The method of claim 2 , further comprising:
respectively rotating the polishing plates in opposite directions of rotation, and/or respectively rotating the pin wheels in opposite directions of rotation.

4 . The method of claim 3 , wherein the directions of rotation of at least one of the polishing plates and/or at least one of the pin wheels, are reversed at least once during the dressing.

5 . The method of claim 3 , wherein the directions of rotation of only one of the polishing plates and/or only one of the pin wheels) are reversed at the same time during the dressing.

6 . The method of claim 1 , further comprising dressing only the one polishing cloth, and reversing at least a direction of rotation of the polishing plate or a direction of rotation of the dresser once.

7 . The method of claim 1 , further comprising dressing only the one polishing cloth, and reversing at least a direction of rotation of the polishing plate and a direction of rotation of the dresser once.

8 . The method of claim 1 , wherein disks or rings covered with one or more dressing elements are used as dressers.

9 . The method of claim 1 , wherein the dressing elements include surfaces covered with diamonds.

10 . The method of claim 1 , wherein one to five dressers are used simultaneously.

11 . The method of claim 1 , wherein at least three dressers are used simultaneously.

12 . The method of claim 1 , wherein the polishing pads are foamed polishing pads.

13 . The method of claim 12 , wherein polishing pads foamed from polyurethane are used as the foamed polishing pads.

14 . The method of claim 2 , further comprising setting mutually facing faces of an upper polishing plate and a lower polishing plate plane-parallel to one another.

15 . The method of claim 2 , wherein the dressers have clearances, and in these clearances are included freely movable and/or fixed dressing elements.

16 . The method of claim 1 , further comprising:
applying a dressing agent to the polishing pads during the dressing.

17 . The method of claim 1 , further comprising:
applying a liquid dressing agent to the polishing pads during the dressing.

Assignees

• Siltronic Ag

Inventors

• Dutschke Vladimir
• Olbrich Torsten
• Mistur Leszek
• Schnappauf Markus

Classifications

• B24B37/24

  characterised by the composition or properties of the pad materials · CPC title

• B24B53/017 Primary

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B53/12

  Dressing tools; Holders therefor · CPC title

• B24B49/18

  taking regard of the presence of dressing tools · CPC title

• B24B53/003

  using at least two conditioning tools · CPC title