Forming layers of materials over small regions by selectiv chemical reaction including limiting enchroachment of the layers over adjacent regions

Patent metadata

Field	Value
Publication number	US-2016190060-A1
Application number	US-201314909736-A
Country	US
Kind code	A1
Filing date	Sep 27, 2013
Priority date	Sep 27, 2013
Publication date	Jun 30, 2016
Grant date	—

Abstract

A method of an aspect includes forming a first thicker layer of a first material over a first region having a first surface material by separately forming each of a first plurality of thinner layers by selective chemical reaction. The method also includes limiting encroachment of each of the first plurality of thinner layers over a second region that is adjacent to the first region. A second thicker layer of a second material is formed over the second region having a second surface material that is different than the first surface material.

First claim

1 . A manufacturing method comprising:
forming a first thicker layer of a first material over a first region having a first surface material by separately forming each of a first plurality of thinner layers by selective chemical reaction; limiting encroachment of each of the first plurality of thinner layers over a second region that is adjacent to the first region; and forming a second thicker layer of a second material over the second region having a second surface material that is different than the first surface material.

2 . The method of claim 1 , wherein forming the second thicker layer comprises forming the second thicker layer by separately forming each of a second plurality of thinner layers by selective chemical reaction.

3 . The method of claim 2 , wherein limiting the encroachment comprises alternating between forming the thinner layers of the first and second pluralities of thinner layers.

4 . The method of claim 3 , wherein limiting the encroachment comprises:
forming each of the thinner layers of the first plurality of thinner layers to a thickness of no more than 4 nm to provide only limited encroachment over the second region; and forming each of the thinner layers of the second plurality of thinner layers to a thickness of no more than 4 nm to provide only limited encroachment over the first region.

5 . The method of claim 3 , wherein limiting the encroachment comprises forming an initial thinner layer of the first and second pluralities of thinner layers of one of the first and second materials that provides a least amount of lateral encroachment per layer thickness.

6 . The method of claim 3 , wherein forming the first thicker layer comprises forming at least five thinner layers of the first plurality of thinner layers, and wherein forming the second thicker layer comprises forming at least five thinner layers of the second plurality of thinner layers.

7 . The method of claim 3 , wherein forming the first thicker layer comprises forming the first thicker layer of an organic polymeric material over the first region having the first surface material by separately forming each of the first plurality of thinner layers by selective polymerization reaction, wherein one of the first and second surface materials is a metal and another is a dielectric material.

8 . The method of claim 7 , wherein forming the first thicker layer comprises forming the first thicker layer of the organic polymeric material over the first region having a metal as the first surface material, and further comprising:
removing the first thicker layer of the organic polymeric material from over the first region; and introducing a metal over the first region where the first thicker layer of the organic polymeric material was removed.

9 . The method of claim 7 , wherein forming the first thicker layer comprises forming the first thicker layer of the organic polymeric material over the first region having a dielectric material as the first surface material, and further comprising:
removing the first thicker layer of the organic polymeric material from over the first region; and introducing a dielectric material over the first region where the first thicker layer of the organic polymeric material was removed.

10 . The method of claim 1 , wherein limiting the encroachment comprises alternating between forming the thinner layers of the first plurality of thinner layers and reducing the encroachment of the thinner layers of the first plurality of thinner layers.

11 . The method of claim 10 , wherein reducing the encroachment comprises performing trim etches on the thinner layers.

12 . The method of claim 10 , wherein reducing the encroachment comprises performing at least one of anneals, thermal treatments, and recrystallization treatments on the thinner layers.

13 . The method of claim 1 , wherein a maximum lateral cross-sectional dimension of the first region is no more than 50 nm, and wherein the first thicker layer has a thickness of at least 10 nm, and wherein forming the first thicker layer comprises forming at least five thinner layers of the first plurality of thinner layers.

14 . A manufacturing method comprising:
forming a first thicker layer of a first material over a first region having a first surface material by separately forming each of at least five thinner layers by selective chemical reaction, wherein a maximum lateral cross-sectional dimension of the first region is no more than 50 nm, and wherein the first thicker layer has a thickness of at least 10 nm; limiting encroachment of each of the first plurality of thinner layers over a second region that is adjacent to the first region; and forming a second thicker layer of a second material over the second region having a second surface material that is different than the first surface material, wherein one of the first and second surface materials is a metal and another is a dielectric material.

15 . The method of claim 14 , wherein forming the second thicker layer comprises forming the second thicker layer by separately forming each of a second plurality of thinner layers by selective chemical reaction, and wherein limiting the encroachment comprises alternating between forming the thinner layers of the first and second pluralities of thinner layers.

16 . The method of claim 14 , wherein limiting the encroachment comprises alternating between forming the thinner layers of the first plurality of thinner layers and reducing the encroachment of the thinner layers of the first plurality of thinner layers, wherein reducing the encroachment comprises performing at least one of trim etches, anneals, thermal treatments, and recrystallization treatments on the thinner layers.

17 . An integrated circuit comprising:
a dielectric material; an interconnect line disposed within the dielectric material; a via over the interconnect line, wherein a cross-sectional dimension of the via is no more than 30 nm; and a dielectric material laterally surrounding the via and including a portion adjacent to the via, wherein at least one of:
the via includes at least five thinner layers vertically stacked on one another; and
the portion of the dielectric material adjacent to the via includes at least five thinner layers vertically stacked on one another.

18 . The integrated circuit of claim 17 , wherein the via includes the at least five thinner layers vertically stacked on one another, and wherein each of the thinner layers of the via has a thickness of no more than 4 nm.

19 . The integrated circuit of claim 18 , wherein the via includes at least seven thinner layers vertically stacked on one another, and wherein each of the thinner layers of the via has a thickness between 0.5 nm and 3 nm.

20 . The integrated circuit of claim 17 , wherein the portion of the dielectric material adjacent to the via includes the at least five thinner layers vertically stacked on one another, and wherein each of the thinner layers of the portion of the dielectric material has a thickness of no more than 4 nm.

21 - 25 . (canceled)

Assignees

• Hourani Rami
• Intel Corp

Inventors

• Bristol Robert L
• Blackwell James M
• Clendenning Scott B
• Gstrein Florian
• Han Eungnak
• Kloster Grant M
• Roberts Jeanette M
• Romero Patricio E
• Hourani Rami

Classifications

• H10P95/08

  Planarisation of organic insulating materials · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P50/28

  of insulating materials · CPC title

• H10P14/432

  using selective deposition · CPC title

• H10P14/412

  Deposition of metallic or metal-silicide materials · CPC title