Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
US2016178246A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016178246-A1 |
| Application number | US-201615057950-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 1, 2016 |
| Priority date | Sep 27, 2013 |
| Publication date | Jun 23, 2016 |
| Grant date | — |
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A refrigeration apparatus includes: a refrigerant circuit constituted by a compressor, a condenser, a decompressor, and an evaporator connected in this order in a loop, wherein, as a refrigerant in the refrigerant circuit, a refrigerant composite material that contains a first refrigerant of an ultralow temperature range refrigerant having a boiling point of not less than −89.0° C. and not more than −78.1° C., carbon dioxide (R744), and a second refrigerant that is soluble in the carbon dioxide (R744) at a temperature lower than a boiling point of the carbon dioxide (R744) is used.
Opening claim text (preview).
What is claimed is: 1 . A refrigeration apparatus, comprising: a refrigerant circuit constituted by a compressor, a condenser, a decompressor, and an evaporator connected in this order in a loop, wherein, as a refrigerant in the refrigerant circuit, a refrigerant composite material that contains a first refrigerant of an ultralow temperature range refrigerant having a boiling point of not less than −89.0° C. and not more than −78.1° C., carbon dioxide (R744), and a second refrigerant that is soluble in the carbon dioxide (R744) at a temperature lower than a boiling point of the carbon dioxide (R744) is used, refrigeration performance of not more than −80° C. is achieved by causing the first refrigerant to evaporate in the evaporator, and as the second refrigerant dissolves the carbon dioxide (R744), the carbon dioxide (R744) is retained in a liquid phase or in a gas phase or the solidified carbon dioxide (R744) is melted in a suction pipe through which the refrigerant that returns from the evaporator to the compressor passes. 2 . The refrigeration apparatus according to claim 1 , wherein the first refrigerant contains difluoroethylene (R1132a), a mixed refrigerant of difluoroethylene (R1132a) and hexafluoroethane (R116), a mixed refrigerant of difluoroethylene (R1132a) and ethane (R170), ethane (R170), a mixed refrigerant of ethane (R170) and hexafluoroethane (R116), an azeotropic mixture (R508A, boiling point −85.7° C.) of 39 mass % trifluoromethane (R23) and 61 mass % hexafluoroethane (R116), or an azeotropic mixture (R508B, boiling point −86.9° C.) of 46 mass % trifluoromethane (R23) and 54 mass % hexafluoroethane (R116). 3 . The refrigeration apparatus according to claim 1 , wherein the second refrigerant contains difluoromethane (R32), 1,1,1,2-tetrafluoroethane (R134a), n-pentane (R600), isobutane (R600a), 1,1,1,2,3-pentafluoropentene (HFO-1234ze), or 1,1,1,2-tetrafluoropentene (HFO-1234yf). 4 . The refrigeration apparatus according to claim 1 , wherein the carbon dioxide (R744) is added in a proportion greater than 20% to a total mass of the refrigerant composite material. 5 . The refrigeration apparatus according to claim 1 , wherein the second refrigerant is added in a proportion at which the carbon dioxide (R744) can be prevented from turning into dry ice. 6 . The refrigeration apparatus according to claim 1 , wherein the refrigerant circuit includes a high-temperature-side refrigerant circuit and a low-temperature-side refrigerant circuit that each constitute an independent refrigerant closed circuit that condenses a refrigerant discharged from a compressor, decompresses the refrigerant with a capillary tube, and exhibits a cooling effect by causing the refrigerant to evaporate in an evaporator, the evaporator in the high-temperature-side refrigerant circuit and the condenser in the low-temperature-side refrigerant circuit constitute a cascade heat exchanger, and the refrigerant composite material is used as a refrigerant in the low-temperature-side refrigerant circuit that exhibits a final cooling effect in the evaporator in the low-temperature-side refrigerant circuit.
the refrigerant being carbon dioxide · CPC title
for compression-type refrigeration systems · CPC title
comprising compounds containing carbon and hydrogen only · CPC title
Subcoolers, desuperheaters or superheaters · CPC title
Halogenated hydrocarbons · CPC title
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