Heating type vaporizing device

Patent metadata

Field	Value
Publication number	US-2016178187-A1
Application number	US-201514952784-A
Country	US
Kind code	A1
Filing date	Nov 25, 2015
Priority date	Dec 22, 2014
Publication date	Jun 23, 2016
Grant date	—

Abstract

This invention is a continuous type vaporizing device that makes it possible to output a large flow rate of the material gas stably while the vaporizing device is downsized. The vaporizing device comprises a vaporizing tank that has a vaporizing chamber and that outputs a material gas that is produced by vaporizing the liquid material that is introduced into the vaporizing chamber, a heater that promotes vaporization of the liquid material in the vaporizing chamber by heating the vaporization tank, and a partition wall that partitions a lower space of the vaporizing chamber into a first lower space into which the liquid material is introduced first and a second lower space into which the liquid material that overflows from the first lower space is introduced.

First claim

1 . A vaporizing tank that has a vaporizing chamber heated by a heater and that outputs a material gas that is vaporized by heating a liquid material that is introduced into the vaporizing chamber, wherein
comprising a partition wall that partitions a lower space of the vaporizing chamber into a first lower space into which the liquid material is introduced first and a second lower space into which the liquid material that overflows from the first lower space is introduced.

2 . The vaporizing tank described in claim 1 , wherein
a liquid surface height at which the liquid material starts overflowing into the second lower space is set within a target liquid surface height range or at a height higher than the target liquid surface height range.

3 . The vaporizing tank described in claim 1 , wherein
comprising a plurality of thermal conductors that project from an internal wall surface of the vaporizing chamber.

4 . The vaporizing tank described in claim 3 , comprising a block shaped body where a bottomed hole that opens in a predetermined surface is formed and a cap body that forms the vaporizing chamber by closing the opening of the bottomed hole, wherein
the bottomed hole is formed by boring multiple portions of the predetermined surface of the body, and a remaining wall portion formed between the bottomed holes is so configured to perform a function as the thermal conductor.

5 . The vaporizing tank described in claim 1 , wherein
a wall body that forms the vaporizing chamber is so configured that the heater to apply the heat to the liquid material can be buried.

6 . A vaporizer comprising
a vaporizing tank that has a vaporizing chamber and that outputs a material gas produced by vaporizing a liquid material introduced into the vaporizing tank, a heater that applies heat to the vaporizing tank so as to promote vaporization of the liquid material in the vaporizing tank, and a partition wall that partitions a lower space of the vaporizing chamber into a first lower space into which the liquid material is introduced first and a second lower space into which the liquid material that overflows from the first lower space is introduced.

7 . A vaporizing device comprising
the vaporizer described in claim 6 ,
a liquid surface sensor that detects a liquid surface height of a liquid material stored in a vaporizing chamber,
a flow rate adjusting valve that is arranged on a liquid material introducing flow channel that communicates with the vaporizing chamber, and
a control mechanism that controls the flow rate adjusting valve so as to make the liquid surface height detected by the liquid surface sensor within a predetermined target liquid surface height range, wherein
the liquid surface height at which the liquid material overflows into the second lower space is set within or above the predetermined target liquid surface height range.

Assignees

• Horiba Stec Co Ltd

Inventors

• Taguchi Akihiro
• Yada Hidetaka

Classifications

• F24H9/18

  Arrangement or mounting of grates or heating means · CPC title

• F22B35/00

  Control systems for steam boilers (for regulating feed-water supply F22D5/00; for controlling superheat temperature F22G5/00) · CPC title

• F24H1/00 Primary

  Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters (steam boilers F22B) · CPC title

• F22B15/00 Primary

  Water-tube boilers of horizontal type, i.e. the water-tube sets being arranged horizontally · CPC title

• F22B33/00

  Steam-generation plants, e.g. comprising steam boilers of different types in mutual association · CPC title