Substrate Processing Method, Apparatus, and System
US-2024363405-A1 · Oct 31, 2024 · US
US2016175941A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016175941-A1 |
| Application number | US-201615053779-A |
| Country | US |
| Kind code | A1 |
| Filing date | Feb 25, 2016 |
| Priority date | Aug 11, 2009 |
| Publication date | Jun 23, 2016 |
| Grant date | — |
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The present invention provides a diamond coated tool which is resistant to exfoliation at an interface between a base material and a diamond layer. The diamond coated tool of the present invention is a diamond coated tool including a base material and a diamond layer coating a surface of the base material, and characterized in that the surface of the base material has an arithmetic average roughness Ra of not less than 0.1 μm and not more than 10 μm and an average length of roughness profile elements RSm of not less than 1 μm and not more than 100 μm, and that the diamond layer has a plurality of cavities extending from a portion bordering on the base material in a crystal growth direction.
Opening claim text (preview).
1 . A diamond coated tool comprising: a base material; and a diamond layer coating a surface of said base material, the surface of said base material having an arithmetic average roughness Ra of not less than 0.1 μm and not more than 10 μm and an average length of roughness profile elements RSm of not less than 1 μm and not more than 100 μm, and said diamond layer having a plurality of cavities at a portion bordering on said base material. 2 . The diamond coated tool according to claim 1 , wherein said arithmetic average roughens Ra is not less than 0.4 μm and not more than 4 μm, and said average length of roughness profile elements RSm is not less than 2 μm and not more than 20 μm. 3 . The diamond coated tool according to claim 1 , wherein in a given section taken through said diamond coated tool at a plane including said base material and said diamond layer, the number of said cavities relative to a length of said base material is not less than 1×10 3 /cm and not more than 1×10 6 /cm. 4 . (canceled) 5 . The diamond coated tool according to claim 1 , wherein said diamond layer is made of polycrystalline diamond. 6 . The diamond coated tool according to claim 1 , wherein said diamond layer is formed by chemical vapor deposition process.
by cleaning or etching · CPC title
Particulate matter · CPC title
using hot filaments · CPC title
Diamond only · CPC title
polycrystalline [PCD] · CPC title
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