Plasma processing apparatus and plasma processing method

Patent metadata

Field	Value
Publication number	US-2016172160-A1
Application number	US-201615008064-A
Country	US
Kind code	A1
Filing date	Jan 27, 2016
Priority date	Oct 27, 2009
Publication date	Jun 16, 2016
Grant date	—

Abstract

A plasma processing apparatus includes: an evacuable processing chamber including a dielectric window; a substrate supporting unit, provided in the processing chamber, for mounting thereon a target substrate; a processing gas supply unit for supplying a desired processing gas to the processing chamber to perform a plasma process on the target substrate; a first RF antenna, provided on the dielectric window, for generating a plasma by an inductive coupling in the processing chamber; and a first RF power supply unit for supplying an RF power to the first RF antenna. The first RF antenna includes a primary coil provided on or above the dielectric window and electrically connected to the first RF power supply unit; and a secondary coil provided such that the coils are coupled with each other by an electromagnetic induction therebetween while being arranged closer to a bottom surface of the dielectric window than the primary coil.

First claim

What is claimed is:

1 . A plasma processing apparatus comprising:
a processing chamber including a dielectric window; a substrate supporting unit, provided in the processing chamber, for mounting thereon a target substrate to be processed; a processing gas supply unit for supplying a desired processing gas to the processing chamber to perform a desired plasma process on the target substrate; a first RF antenna, provided on the dielectric window, for generating a plasma from the processing gas by an inductive coupling in the processing chamber; and a first RF power supply unit for supplying an RF power to the first RF antenna, the RF power having an appropriate frequency for RF discharge of the processing gas, wherein the first RF antenna includes:
a primary coil provided on or above the dielectric window and electrically connected to the first RF power supply unit through an RF power supply line; and
a secondary coil coupled with the primary coil by an electromagnetic induction therebetween without being connected to any RF power supply unit, the secondary coil being arranged closer to a bottom surface of the dielectric window than the primary coil, and
wherein the secondary coil is formed as a plurality of disjointed coils, the coils of the secondary coil have diameters different from each other, and a capacitor is provided in a loop of at least one of the coils of the secondary coil.

2 . The apparatus of claim 1 , wherein the coils of the secondary coil are concentrically arranged.

3 . The apparatus of claim 1 , wherein the capacitor is a variable capacitor, and a capacitance of the capacitor is adjusted to control a radial distribution of a plasma density on the target substrate.

4 . The apparatus of claim 2 , wherein the primary coil is formed as a multi-wound concentric coil, and a plurality of wound portions of the primary coil is disposed, respectively, opposite to the coils of the secondary coil.

5 . The apparatus of claim 2 , wherein the capacitor is a variable capacitor, and a capacitance of the capacitor is adjusted to control a radial distribution of a plasma density on the target substrate.

6 . The apparatus of claim 4 , wherein the capacitor is a variable capacitor, and a capacitance of the capacitor is adjusted to control a radial distribution of a plasma density on the target substrate.

Assignees

• Tokyo Electron Ltd

Inventors

• Yamazawa Yohei
• Saito Masashi
• Denpoh Kazuki
• Koshimizu Chishio
• Yamawaku Jun

Classifications

• H10P72/0421

  for drying etching · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H01J37/3211 Primary

  Antennas, e.g. particular shapes of coils · CPC title

• H01L21/67069

  Electricity · mapped topic

• H01J37/32174

  Circuits specially adapted for controlling the RF discharge · CPC title