Vapor deposition apparatus and method

Patent metadata

Field	Value
Publication number	US-2016168707-A1
Application number	US-201514736337-A
Country	US
Kind code	A1
Filing date	Jun 11, 2015
Priority date	Dec 11, 2014
Publication date	Jun 16, 2016
Grant date	—

Abstract

A vapor deposition apparatus includes a deposition unit having a plurality of nozzle parts sequentially arranged in a first direction and a plurality of exhaustion parts alternately arranged with the plurality of nozzle parts, a substrate mounting unit on which a substrate is mounted and which is reciprocally movable a plurality of times below the deposition unit along a straight line parallel to the first direction, and a control unit that controls movement of the substrate mounting unit. A start point of a reciprocal movement of the substrate mounting unit is variable for each reciprocal movement.

First claim

What is claimed is:

1 . A vapor deposition apparatus, comprising:
a deposition unit having a plurality of nozzle parts sequentially arranged in a first direction and a plurality of exhaustion parts alternately arranged with the plurality of nozzle parts; a substrate mounting unit on which a substrate is mounted and which is reciprocally movable a plurality of times below the deposition unit along a straight line parallel to the first direction; and a control unit that controls movement of the substrate mounting unit, wherein a start point of a reciprocal movement of the substrate mounting unit is variable for each reciprocal movement.

2 . The vapor deposition apparatus as claimed in claim 1 , wherein
the reciprocal movement start point is one among preset positions and is sequentially variable in the first direction and an opposite direction of the first direction, and the preset positions are spaced a predetermined distance apart from each other.

3 . The vapor deposition apparatus as claimed in claim 2 , wherein the number of preset positions is from 5 to 20.

4 . The vapor deposition apparatus as claimed in claim 2 , wherein a distance between two adjacent preset positions is about 0.5 to about 1.5 times a width of the exhaust part.

5 . The vapor deposition apparatus as claimed in claim 4 , wherein any one of the two adjacent preset positions is a start point of a reciprocal movement of the substrate mounting unit and the other one of the two adjacent preset positions is an end point of the reciprocal movement.

6 . The vapor deposition apparatus as claimed in claim 2 , wherein a reciprocally moving distance of the substrate mounting unit is same for each reciprocal movement.

7 . The vapor deposition apparatus as claimed in claim 2 , wherein the substrate moves only within a region of the deposition unit.

8 . The vapor deposition apparatus as claimed in claim 2 , wherein the exhaust part further includes a purge part that sprays a purge gas towards the substrate mounting unit.

9 . The vapor deposition apparatus as claimed in claim 8 , wherein;
the plurality of nozzle parts include first nozzle parts that sprays a first raw material gas and second nozzle parts that sprays a second raw material gas, and the first nozzle parts and the second nozzle parts are alternately arranged.

10 . The vapor deposition apparatus as claimed in claim 9 , wherein each of the second nozzle parts includes a plasma generator, a surface surrounding the plasma generator, and a plasma generation space formed between the plasma generator and the surface.

11 . A vapor deposition method, comprising:
providing a substrate on a substrate mounting unit; locating the substrate mounting unit below a deposition unit; and spraying, by the deposition unit, a raw material gas towards the substrate mounting unit and repeatedly performing, by the substrate mounting unit, a reciprocal movement below the deposition unit, wherein the deposition unit includes a plurality of nozzle parts sequentially arranged in a first direction and a plurality of exhaustion parts alternately arranged with the plurality of nozzle parts, the substrate mounting unit repeatedly performs the reciprocal movement along a straight line parallel to the first direction, and a reciprocal movement start point of the substrate mounting unit varies for each reciprocal movement.

12 . The vapor deposition method as claimed in claim 11 , wherein:
a start point and an end point of the each reciprocal movement differ from each other, and the end point of the each reciprocal movement is a start point of a next reciprocal movement.

13 . The vapor deposition method as claimed in claim 12 , wherein the reciprocal movement start point is one among preset positions and sequentially varies in the first direction or an opposite direction of the first direction.

14 . The vapor deposition method as claimed in claim 13 , wherein a distance between two adjacent preset positions is about 0.5 to about 1.5 times a width of the exhaust part.

15 . The vapor deposition method as claimed in claim 13 , wherein;
the preset positions are spaced a predetermined distance apart from each other, and the number of preset positions is from 5 to 20.

16 . The vapor deposition method as claimed in claim 13 , wherein a reciprocally moving distance of the substrate mounting unit is the same for each reciprocal movement.

17 . The vapor deposition method as claimed in claim 13 , wherein the substrate moves only within a region of the deposition unit.

18 . The vapor deposition method as claimed in claim 13 , wherein the exhaust part further includes a purge part that sprays a purge gas towards the substrate mounting unit.

19 . The vapor deposition method as claimed in claim 18 , wherein:
the plurality of nozzle parts includes first nozzle parts and second nozzle parts alternately arranged, the first nozzle parts spray a first raw material gas towards the substrate mounting unit, and the second nozzle parts spray a second raw material gas towards the substrate mounting unit.

20 . The vapor deposition method as claimed in claim 19 , wherein:
each of the second nozzle parts includes a plasma generator, a surface surrounding the plasma generator, and a plasma generation space formed between the plasma generator and the surface, and the second raw material gas is converted into a radical form in the plasma generation space.

Assignees

• Samsung Display Co Ltd

Inventors

• Jang Choelmin
• Kim Inkyo
• Jung Sukwon
• Huh Myungsoo

Classifications

• C23C16/45574 Primary

  Nozzles for more than one gas · CPC title

• C23C16/4408

  by purging residual gases from the reaction chamber or gas lines · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/4583

  the substrate being supported substantially horizontally · CPC title

• C23C16/52

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title