High aspect ratio dense pattern-programmable nanostructures utilizing metal assisted chemical etching
US-2015376798-A1 · Dec 31, 2015 · US
US2016161648A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016161648-A1 |
| Application number | US-201414559769-A |
| Country | US |
| Kind code | A1 |
| Filing date | Dec 3, 2014 |
| Priority date | Dec 3, 2014 |
| Publication date | Jun 9, 2016 |
| Grant date | — |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A method of fabricating large area birefringent grating films requires directing a UV beam through a large-scale LC polymer film alignment template on which a predetermined periodic alignment pattern has been imprinted and onto a photo-alignment layer such that the pattern is transferred thereon. The alignment template is fabricated by directing a collimated linearly polarized UV beam through a birefringent prism to produce two UV beams, which are directed onto a photo-alignment layer through a uniform quarter-wave plate to create a UV hologram which imprints the desired pattern onto the photo-alignment layer. These steps are repeated on different portions of the photo-alignment layer to create a large-scale photo-alignment layer. The photo-alignment layer, with a desired alignment pattern transferred with UV exposure through an alignment template, is then coated with a polymerizable LC material such that the desired pattern is followed by the liquid crystal molecules in the coating, which is then exposed with a UV beam so as to photo-polymerize the polymerizable LC material, and the coating is continued till the total coating thickness reaches either quarter-wave or half-wave retardation values at the wavelength of the UV source passing through the alignment template. Alternatively, a new alignment template can also be fabricated using a pre-existing alignment template with a half-wave retardation at the exposing UV wavelengths, and the alignment periodicity of the new alignment template is about half as the periodicity in the pre-existing alignment template.
Opening claim text (preview).
We claim: 1 . A method of fabricating a birefringent grating film, comprising: creating a liquid crystal (LC) polymer film alignment template on which a desired periodic alignment pattern has been imprinted; providing an ultraviolet (UV) beam; providing a photo-alignment layer on a substrate; and directing said UV beam through said alignment template such that a periodic alignment pattern based on the pattern imprinted on said alignment template is transferred onto said photo-alignment layer. 2 . The method of claim 1 , said UV beam having an associated center wavelength, wherein said alignment template has a quarter-wave retardation at said UV beam's center wavelength and said UV beam is either a polarized, collimated UV laser beam, or a collimated UV beam which has passed through a narrowband bandpass filter and a linear polarizer, further comprising a uniform quarter-wave plate interposed between said UV beam and said alignment template so as to create a circularly polarized UV beam which passes through said alignment template, such that the periodic alignment pattern provided in the alignment template is transferred onto said photo-alignment layer. 3 . The method of claim 1 , said UV beam having an associated center wavelength, wherein said alignment template has a half-wave retardation at said UV beam's center wavelength and said UV beam is either a linearly polarized, collimated UV laser beam, or a linearly polarized, collimated UV beam which has passed through a narrowband bandpass filter interposed between said UV beam and said alignment template, such that said filtered UV beam passes through said alignment template that acts as a circular polarization beam splitter and creates a UV hologram which transfers a periodic alignment pattern onto said photo-alignment layer. 4 . The method of claim 1 , further comprising: spin-coating a solution that contains a polymerizable LC material and a solvent onto the photo-alignment layer; air-drying or baking said solvent off such that the polymerizable LC material goes into a nematic liquid crystal phase and its liquid crystal molecular orientation follows the periodic alignment pattern created on the photo-alignment layer; UV-exposing said polymerizable LC material coating in a nitrogen blanket so as to photo-polymerize the polymerizable LC material coating; and repeating said spin-coating, air-drying or baking and UV-exposing steps until the thickness of said polymerizable LC material coating is such that it provides half-wave retardation at the wavelength at which said grating is to be used, thereby providing a birefringent grating film. 5 . The method of claim 1 , wherein said step of creating a liquid crystal (LC) polymer film alignment template comprises: providing a collimated linearly polarized ultraviolet (UV) beam; directing said linearly polarized ultraviolet (UV) beam through a birefringent prism, with the linear polarization at 45 degrees with respect to the optical axes of the birefringent prism, to produce two UV beams having the same intensity amplitudes, orthogonal linear polarizations, and with a predetermined angle between said two UV beams; providing a second photo-alignment layer on a substrate; directing said two UV beams having orthogonal linear polarizations through a uniform quarter-wave plate so as to create a UV hologram which imprints said desired periodic alignment pattern onto said second photo-alignment layer; coating said second photo-alignment layer with a polymerizable liquid crystal (LC) material such that said desired periodic alignment pattern is transferred from said second photo-alignment layer to said coating of polymerizable LC material; and exposing said coating of polymerizable LC material with a UV beam so as to photo-polymerize the polymerizable LC material. 6 . The method of claim 5 , wherein said step of coating said second photo-alignment layer comprises: spin-coating a solution that contains a polymerizable LC material and a solvent onto the second photo-alignment layer; air-drying or baking said solvent off such that the resulting polymerizable LC material layer goes into a nematic liquid crystal phase and its liquid crystal molecular orientation follows the alignment pattern created on the second photo-alignment layer, said step of exposing said coating of polymerizable LC material with a UV beam comprising UV-exposing said polymerizable LC material layer in a nitrogen blanket so as to photo-polymerize the polymerizable LC material coating; and controlling the spin speed the concentration of said polymerizable LC material such that, after said solvent is evaporated, the thickness of said coating provides quarter-wave retardation at the center wavelength of said UV beam used to transfer said periodic alignment pattern onto said photo-alignment layer. 7 . The method of claim 5 , wherein said step of coating said second photo-alignment layer comprises: spin-coating a solution that contains a polymerizable LC material and a solvent onto the second photo-alignment layer; air-drying or baking said solvent off such that the resulting polymerizable LC material layer goes into a nematic liquid crystal phase and its liquid crystal molecular orientation follows the alignment pattern created on the second photo-alignment layer, said step of exposing said coating of polymerizable LC material with a UV beam comprising UV-exposing said polymerizable LC material layer in a nitrogen blanket so as to photo-polymerize the polymerizable LC material coating; and controlling the spin speed and the concentration of said polymerizable LC material such that, after said solvent is evaporated, the thickness of said coating provides half-wave retardation at the center wavelength of said UV beam used to transfer said desired periodic alignment pattern on said photo-alignment layer. 8 . The method of claim 5 , wherein said second photo-alignment layer has a size exceeding that of said desired periodic alignment pattern, further comprising: after transferring said desired periodic alignment pattern onto said second photo-alignment layer and before performing said coating and UV exposing steps, using an X-Y stepper to move said second photo-alignment layer; repeating said transferring of said desired periodic alignment pattern on a new portion of said second photo-alignment layer; and repeating said transferring and moving steps as needed to fill said second photo-alignment layer with multiple instances of said desired periodic alignment pattern; thereby providing a large-scale LC polymer film alignment template after said polymerizable LC material coating and UV exposing steps of are performed. 9 . The method of claim 5 , wherein said polymerizable LC material is a reactive mesogen material. 10 . The method of claim 8 , further comprising: spin-coating a solution that contains a polymerizable LC material and a solvent onto the photo-alignment layer on which said desired periodic alignment pattern has been transferred using said large-scale LC polymer film alignment template; air-drying or baking said solvent off such that the polymerizable LC material goes into a nematic liquid crystal phase and its liquid crystal molecular orientation follows the alignment pattern created on the photo-alignment layer; UV-exposing said polymerizable LC material coating in a nitrogen blanket so as to photo-polymerize the polymerizable LC material coating; and repeating said spin-coating, air-drying or baking and UV-exposing steps until the thickness of said polymerizable LC material coating is such that it provides half-wave retardation at the wavelength at which said grating is to be used, thereby providing a birefringe
using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams · CPC title
Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor · CPC title
comprising birefringent materials (birefringent elements per se G02B5/3083) · CPC title
Particular recording light; Beam shape or geometry (G03H1/06 takes precedence) · CPC title
Polarised light · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.