Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US2016137756A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016137756-A1 |
| Application number | US-201615006329-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jan 26, 2016 |
| Priority date | Jul 4, 2006 |
| Publication date | May 19, 2016 |
| Grant date | — |
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The invention relates to a concentrated aqueous polymer dispersion with an average particle size of less than 1000 nm comprising g) a polymer carrier prepared by heterophase radical polymerization of at least one ethylenically unsaturated monomer in the presence of h) a non-polar photoinitiator and/or photolatent catalyst and i) optionally a non-ionic, cationic or anionic surfactant, wherein the weight ratio of the non-polar photoinitiator and/or photolatent catalyst to the polymer carrier is greater than 20 parts of photoinitiator and/or photolatent catalyst per 100 parts of polymer carrier.
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1 - 6 . (canceled) 7 . A process for the preparation of a concentrated aqueous polymer dispersion with an average particle size of less than 1000 nm comprising the step polymerizing at least one ethylenically unsaturated monomer in the presence of a photoinitiator and/or a photolatent catalyst by heterophase radical polymerization; wherein the weight ratio of the photoinitiator and/or a photolatent catalyst to the polymer carrier formed from the ethylenically unsaturated monomer is equal or greater than 35 parts of photoinitiator and/or photolatent catalyst per 100 parts of polymer carrier. 8 . A process according to claim 7 comprising the steps of a) dissolving, emulsifying or dispersing a photoinitiator and/or photolatent catalyst in at least one ethylenically unsaturated monomer; b) preparing a conventional oil in water emulsion of said photoinitiator and/or photolatent catalyst dissolved, emulsified or dispersed in at least one ethylenically unsaturated monomer; c) homogenizing the conventional emulsion to a mini-emulsion wherein the droplets of the organic phase have an average diameter below 1000 nm; d) polymerizing the mini-emulsion by adding a polymerization initiator; wherein the weight ratio of the photoinitiator and/or a photolatent catalyst to the polymer carrier formed from the ethylenically unsaturated monomer equal or greater than 35 parts of photoinitiator and/or photolatent catalyst per 100 parts of polymer carrier. 9 . A process for preparing a polymer powder by preparing a concentrated aqueous polymer dispersion according to claim 7 followed by vaporizing the volatile components of the concentrated aqueous polymer dispersion. 10 . A polymer powder obtainable by a process according to claim 9 . 11 . Aqueous or non-aqueous formulations, coatings, inks, adhesives or in formulations for electronic materials comprising the aqueous polymer dispersion prepared according to claim 7 . 12 . A process for preparing a polymer powder by preparing a concentrated aqueous polymer dispersion according to claim 8 followed by vaporizing the volatile components of the concentrated aqueous polymer dispersion. 13 . A polymer powder obtained by a process according to claim 12 . 14 . Aqueous or non-aqueous formulations, coatings, inks, adhesives or in formulations for electronic materials comprising the polymer powder according to claim 10 . 15 . Aqueous or non-aqueous formulations, coatings, inks, adhesives or in formulations for electronic materials comprising the polymer powder according to claim 13 .
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