Archimedes brush for semiconductor cleaning

Patent metadata

Field	Value
Publication number	US-2016128460-A1
Application number	US-201414537707-A
Country	US
Kind code	A1
Filing date	Nov 10, 2014
Priority date	Nov 10, 2014
Publication date	May 12, 2016
Grant date	—

Abstract

A cleaning device for cleaning a substrate is provided. In one aspect, the cleaning device includes a brush engaged with a mandrel, and the brush forms an Archimedean screw thread form. The brush is formed of an absorbent material, preferably foam. In one aspect, the brush is seated within a groove in the mandrel.

First claim

1 . A cleaning device for cleaning a substrate, the cleaning device comprising:
a brush formed of an absorbent material; and a rigid mandrel having an outer surface, a wall forming a groove in said outer surface and forming an Archimedean screw thread form, said brush being at least partially seated within said groove.

2 . The cleaning device of claim 1 , wherein the brush is formed of one of a poly vinyl acetate foam, a polyurethane foam, and a polymeric foam.

3 . The cleaning device of claim 1 , wherein the Archimedean screw thread form extends from a first end of the brush to a second, opposite end of the brush.

4 . The cleaning device of claim 1 , wherein the brush has a circular cross-section.

5 . The cleaning device of claim 1 , wherein the brush has a non-circular cross-section.

6 . The cleaning device of claim 1 , wherein the mandrel has a passageway therethrough extending from an end of the mandrel, and a plurality of pores extending from the passageway to the wall of the groove.

7 . The cleaning device of claim 1 , wherein the brush is engaged within the groove by a friction fit.

8 . The cleaning device of claim 1 , wherein the brush is engaged within the groove by an adhesive.

9 . The cleaning device of claim 1 , wherein the brush has a larger cross-section than a cross-section of the groove where the brush is seated.

10 . A cleaning device for cleaning a substrate, the cleaning device comprising:
a rigid mandrel having an outer surface, a plurality of walls in said outer surface, each said wall forming a groove which forms an Archimedean screw thread form; and a plurality of brushes formed of an absorbent material, respective ones of said brushes being at least partially seated within a respective groove.

11 . The cleaning device of claim 10 , wherein an exterior surface of the mandrel is exposed between adjacent grooves.

12 . The cleaning device of claim 10 , wherein the grooves have the same pitch.

13 . The cleaning device of claim 10 , wherein the grooves have differing pitches.

14 . A cleaning device for cleaning a substrate, the cleaning device comprising:
a brush engaged with a mandrel, said brush forming an Archimedean screw thread form, said brush formed of foam.

15 . The cleaning device of claim 14 , wherein the foam is formed of one of a polyvinyl alcohol foam, a polyurethane foam, and a polymeric foam.

16 . The cleaning device of claim 14 , wherein the mandrel has opposite ends and a length defined therebetween, and the brush is formed around the mandrel such that the mandrel is not exposed along the length of the mandrel.

17 . The cleaning device of claim 14 , wherein the mandrel has a wall forming a groove in an outer surface thereof, said groove forming an Archimedean screw thread form, said brush being at least partially seated within said groove.

18 . The cleaning device of claim 17 , wherein the mandrel has a passageway therethrough extending from an end of the mandrel, and a plurality of pores extending from the passageway to the wall of the groove.

19 . The cleaning device of claim 14 , wherein the mandrel has a passageway therethrough extending from an end of the mandrel, and a plurality of pores extending from the passageway to an outer surface of the mandrel.

Assignees

• Illinois Tool Works

Inventors

• Withers Bradley Scott
• Nelson Erik Scott
• Willis Robert Allen

Classifications

• H10P72/0412 Primary

  using mainly scrubbing means, e.g. brushes · CPC title

• A46D1/0207

  Bristles characterised by the choice of material, e.g. metal · CPC title

• A46B9/08 Primary

  Supports or guides for bristles · CPC title

• A46B13/001 Primary

  Cylindrical or annular brush bodies · CPC title

• A46B13/006

  formed by winding a strip tuft in a helix about the body · CPC title