Laminated body

Patent metadata

Field	Value
Publication number	US-2016116641-A1
Application number	US-201514920919-A
Country	US
Kind code	A1
Filing date	Oct 23, 2015
Priority date	Oct 24, 2014
Publication date	Apr 28, 2016
Grant date	—

Abstract

The present invention relates to a laminated body containing at least (a) a transparent substrate, (b) a first metal layer that is overlaid on the substrate and forms an electrode, and (c) a second metal layer having a light reflectance of 20% or less, in which the second metal layer is overlaid on the surface of the first metal layer opposite to the substrate or between the first metal layer and the substrate by sputtering using a reactive sputtering gas, and the second metal layer is constituted by an oxide or nitride of a Cu alloy containing at least Zn.

First claim

What is claimed is:

1 . A laminated body comprising at least:
(a) a transparent substrate, (b) a first metal layer that is overlaid on the substrate and forms an electrode, and (c) a second metal layer having a light reflectance of 20% or less, wherein the second metal layer is overlaid on the surface of the first metal layer opposite to the substrate or between the first metal layer and the substrate by sputtering using a reactive sputtering gas, wherein the second metal layer is constituted by an oxide or nitride of a Cu alloy comprising at least Zn.

2 . The laminated body according to claim 1 , wherein the second metal layer is overlaid both on the surface of the first metal layer opposite to the substrate and between the first metal layer and the substrate so as to sandwich the first metal layer without interposing the substrate.

3 . The laminated body according to claim 1 , wherein the first metal layer is constituted by a Cu alloy, and the Cu alloy has a composition comprising Zn and at least one element selected from the group consisting of B, Mg, Al, Ca, Ti, and Cr, with the balance being Cu and inevitable impurities.

4 . The laminated body according to claim 3 , wherein the Cu alloy constituting the first metal layer has a composition comprising Zn in a content of from 0.1 at % to 10 at % and comprising the at least one element selected from the group consisting of B, Mg, Al, Ca, Ti, and Cr in a total content of from 0.1 at % to 6 at %, with the balance being Cu and inevitable impurities.

5 . The laminated body according to claim 1 , wherein the first metal layer has an electric resistivity of 8.0 μΩ·cm or less.

6 . The laminated body according to claim 1 , wherein the first metal layer is in close contact with the transparent substrate or/and the second metal layer, and a degree of adhesion therebetween is classified as a classification 0 to 3 as defined in JIS K5600-5-6:1999.

7 . The laminated body according to claim 1 , wherein the second metal layer is formed by sputtering using a target material, and the target material is composed of a Cu alloy having a composition comprising Zn with the balance being Cu and inevitable impurities, or a Cu alloy having a composition comprising Zn and at least one element selected from the group consisting of Al, Ti, Sn, and Ni, with the balance being Cu and inevitable impurities.

8 . The laminated body according to claim 1 , wherein the second metal layer has a composition comprising Zn in a content of from 0.1 at % to less than 25 at %, with the balance being Cu, and O or N, and inevitable impurities.

9 . The laminated body according to claim 1 , wherein the second metal layer has a composition comprising Zn in a content of from 0.1 at % to less than 25 at % and at least one element selected from the group consisting of Al, Ti, Sn, and Ni in a total content of from 0.1 at % to less than 15 at %, with the balance being Cu, and O or N, and inevitable impurities.

10 . The laminated body according to claim 7 , wherein the second metal layer is in close contact with the transparent substrate or/and the first metal layer, and a degree of adhesion therebetween is classified as a classification 0 to 3 as defined in JIS K5600-5-6:1999.

Assignees

• Daido Steel Co Ltd

Inventors

• Minami Kazuki
• Tago Yuichiro
• Sakaguchi Kazuya

Classifications

• C23C14/08

  Oxides (C23C14/10 takes precedence) · CPC title

• G02B1/116 Primary

  including electrically conducting layers · CPC title

• C23C28/345

  with at least one oxide layer · CPC title

• C23C14/185

  by cathodic sputtering · CPC title

• C23C14/0036

  Reactive sputtering · CPC title