Selective etching of silicon wafer
US-2015357207-A1 · Dec 10, 2015 · US
US2016102250A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016102250-A1 |
| Application number | US-201414786211-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 16, 2014 |
| Priority date | Apr 25, 2013 |
| Publication date | Apr 14, 2016 |
| Grant date | — |
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Disclosed is a method of purifying a solution containing hydrofluoric acid, nitric acid and at least one silicon impurity by treating the solution with at least one reverse osmosis membrane. According to the method of the present invention, silicon impurities contained in the solution containing hydrofluoric acid and nitric acid can be selectively removed or reduced. This method can be advantageously used in the photovoltaic industry or in the battery component industry.
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1 . A method of purifying a solution containing hydrofluoric acid, nitric acid and at least one silicon impurity, the method comprising treating the solution with at least one reverse osmosis membrane. 2 . The method according to claim 1 , wherein the solution mainly contains hydrofluoric acid and nitric acid and comprises silicon compound as an impurity. 3 . The method according to claim 1 , wherein the content of nitric acid in the solution before the purification is from 0.1% w/w to 10% w/w. 4 . The method according to claim 1 , wherein the content of hydrofluoric acid in the solution before the purification is from 0.001% w/w to 50% w/w. 5 . The method according to claim 1 , wherein the content of silicon impurity in the solution before the purification is from 0.1% w/w to 30% w/w. 6 . The method according to claim 1 , wherein the reverse osmosis membrane is made of polyamides, polypiperazine amides, polyacrylonitriles, polysulfones, cellulose acetates, polybenzimidazolines, polyoxadiazoles, polyfuranes, polyether-polyfuranes, polyvinylamines, polypyrrolidines, carboxylated polysulfones or sulfonated polysulfones. 7 . The method according to claim 1 , wherein one or more reverse osmosis membranes are used, in series or in parallel, or in combination of series and parallel. 8 . The method according to claim 1 , wherein the silicon impurity is generated by contacting a solution containing hydrofluoric acid and nitric acid with a silicon containing surface. 9 . The method according to claim 8 , wherein the contacting a solution containing hydrofluoric acid and nitric acid with a silicon containing surface is a surface texturing of solar cells, or an etching of silicon based electrode for batteries. 10 . The method according to claim 8 , further comprising recycling the purified solution to a flow of treatment of the silicon containing surface. 11 . The method according to claim 1 , further comprising a step of adding hydrofluoric acid and/or nitric acid to set the concentration of hydrofluoric acid and nitric acid contained in the solution to a target level. 12 . A process of manufacturing a silicon based solar cell, the process comprising purifying a solution containing hydrofluoric acid, nitric acid and at least one silicon impurity in accordance with the method according to claim 1 . 13 . A process of manufacturing a silicon based electrode for a battery, the process comprising purifying a solution containing hydrofluoric acid, nitric acid and at least one silicon impurity in accordance with the method according to claim 1 . 14 . The process according to claim 12 , further comprising recycling the purified solution to a flow of treatment of a silicon containing surface during the manufacturing process. 15 . The process according to claim 12 , wherein the reverse osmosis membrane is made of polyamides, polypiperazine amides, polyacrylonitriles, polysulfones, cellulose acetates, polybenzimidazolines, polyoxadiazoles, polyfuranes, polyether-polyfuranes, polyvinylamines, polypyrrolidines, carboxylated polysulfones or sulfonated polysulfones. 16 . The process according to claim 13 , further comprising recycling the purified solution to a flow of treatment of a silicon containing surface during the manufacturing process. 17 . The process according to claim 13 , wherein the reverse osmosis membrane is made of polyamides, polypiperazine amides, polyacrylonitriles, polysulfones, cellulose acetates, polybenzimidazolines, polyoxadiazoles, polyfuranes, polyether-polyfuranes, polyvinylamines, polypyrrolidines, carboxylated polysulfones or sulfonated polysulfones. 18 . The method according to claim 1 , wherein the content of nitric acid in the solution before the purification is from 2% w/w to 10% w/w. 19 . The method according to claim 1 , wherein the content of hydrofluoric acid in the solution before the purification is from 0.5% w/w to 30% w/w. 20 . The method according to claim 1 , wherein the content of silicon impurity in the solution before the purification is from 0.5% w/w to 20% w/w.
Photovoltaic [PV] energy · CPC title
Separation; Purification · CPC title
Reverse osmosis; Hyperfiltration · CPC title
of electrodes based on metals, Si or alloys · CPC title
Purification; Separation {; Stabilisation (C01B21/40 takes precedence)} · CPC title
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