Internally coated vessel for housing a metal halide

Patent metadata

Field	Value
Publication number	US-2016046408-A1
Application number	US-201514924623-A
Country	US
Kind code	A1
Filing date	Oct 27, 2015
Priority date	Oct 27, 2015
Publication date	Feb 18, 2016
Grant date	—

Abstract

Provided is a vessel having internally wettable surfaces therein coated with one or more barrier layers to, for example, inhibit contamination of a material, such as a metal halide, contained in the vessel.

First claim

1 . A vessel for containment, storage, transport or delivery of a metal halide composition, comprising one or more interior fluid wettable surfaces comprising one or more barrier layers deposited thereon, wherein each of said layers may be the same or different.

2 . The vessel according to claim 1 , wherein said vessel is a sublimator.

3 . The vessel according to claim 1 , wherein each of said one or more barrier layers comprises a metal oxide, metal nitride, metal oxynitride, metal carbonitride or metal oxycarbonitride, or combinations thereof.

4 . The vessel according to claim 3 , wherein the metal in said one or more barrier layers is the same as the metal of said metal halide composition.

5 . The vessel according to claim 3 , wherein said metal is Ti, B, Si, Zr, Hf, V, Nb, Ta, Mo, Cr, W, Al or Ga.

6 . The vessel according to claim 1 , wherein the metal halide is a solid.

7 . The vessel according to claim 1 , wherein the metal halide is a tungsten halide, an aluminum halide, a zirconium halide, a hafnium halide, molybdenum halide, a tantalum halide, a vanadium halide, a niobium halide or a titanium halide.

8 . The vessel according to claim 1 , comprising a laminate of a first barrier layer comprising a metal oxide, metal nitride, metal oxynitride, metal carbonitride or metal oxycarbonitride, or combinations thereof, and a second barrier layer comprising a metal oxide, metal nitride, metal oxynitride, metal carbonitride or metal oxycarbonitride, or combinations thereof.

9 . The vessel according to claim 1 , wherein each of said one or more barrier layers is 5 to 1000 nm in thickness.

10 . The vessel according to claim 1 , wherein each of said one or more barrier layers is 50 to 500 nm in thickness.

11 . The vessel according to claim 2 , wherein said sublimator comprises valves.

12 . The vessel according to claim 11 , wherein said valves are not coated with a barrier layer.

13 . The vessel according to claim 1 , wherein the metal halide is WCl 5 , WCl 6 , WBr 5 , WBr 6 , WI 5 , WI 6 , WOCl 4 , MoCl 5 , MoOCl 4 , MoO 2 Cl 2 , NbCl 5 , NbF 5 , NbI 5 , NbOCl 3 , NbOF 3 , NbOI 3 , HfCl 4 , HfF 4 , HfI 4 , HfBr 4 , HfOCl 2 , HfOF 2 , HfOI 2 , HfOBr 2 , ZrCl 4 , ZrF 4 , ZrI 4 , ZrBr 4 , ZrOCl 2 , ZrOI 2 , ZrOF 2 , ZrOBr 2 , TiCl 4 , TiF 4 , TiI 4 , TiOCl 2 , TiOF 2 , VCl 4 , VF 5 , VI 3 , VI 4 , VOCl 3 , VOF 3 , TaF 5 , TaCl 5 , TaI 5 , TaOCl 3 , TaOF 3 , TaOI 3 or AlCl 3 .

14 . A vessel for containment, storage, transport or delivery of a solid metal halide composition, said vessel comprising one or more interior fluid wettable surfaces comprising one or more barrier layers made by a process selected from the group consisting of atomic layer deposition, chemical vapor deposition, molecular layer deposition, plasma-enhanced chemical vapor deposition, plasma-enhanced atomic layer deposition, spray pyrolysis and physical vapor deposition or combinations thereof.

15 . The vessel according to claim 1 , further comprising a removable or fixed secondary feature comprising one or more of said barrier layers deposited thereon.

16 . The vessel according to claim 15 , wherein said secondary feature is selected from the group consisting of trays, distribution plates, spargers, beads, heat conduction enhancing features, convoluted flow paths and optical window for on-line metrology or combinations thereof.

17 . A method for producing one or more barrier layers on an internal wettable surface of a vessel for containment, storage, transport or delivery of a metal halide composition, comprising the steps of:
determining the metal halide composition to be placed in said vessel; producing a formulation comprising a metal oxide, metal nitride, metal oxynitride, metal carbonitride or metal oxycarbonitride, or combinations thereof, corresponding to the metal in said metal halide composition; depositing said formulation onto said one or more interior fluid wettable surfaces of said vessel to form said barrier layer.

18 . The method according to claim 17 , wherein said depositing step is performed using atomic layer deposition, chemical vapor deposition, molecular layer deposition, plasma-enhanced chemical vapor deposition, plasma-enhanced atomic layer deposition, spray pyrolysis and physical vapor deposition or combinations thereof.

19 . The method according to claim 17 , further comprising a pre-treatment step prior to deposition onto said interior wettable surfaces, wherein said pre-treatment is cleaning said interior wettable surfaces with an organic solvent or dilute acid, mechanical polishing, sand blasting or electrochemical polishing.

20 . The method according to claim 17 , further comprising a post-treatment step after said barrier layer is deposited, wherein said post-treatment is thermal annealing with an inert gas, oxidizing or carburizing.

Assignees

• L Air Liquide Société Anonyme Pour L Etude Et L Expl Des Procédés Georges Claude
• Air Liquide American
• Air Liquide Advanced Materials Inc

Inventors

• Girard Jean-Marc
• Kuchenbeiser Glenn
• Blasco Nicolas
• Omarjee Vincent
• Pallem Venkateswara

Classifications

• B65D85/70

  for materials not otherwise provided for · CPC title

• B65D25/14 Primary

  Linings or internal coatings (of containers made by folding or erecting blanks made of paper B65D5/56 {; linings for domestic water storage heaters F24H1/183}) · CPC title

• C23C16/06

  characterised by the deposition of metallic material · CPC title

• C23C16/45555

  applied in non-semiconductor technology · CPC title

• C23C16/4402

  Reduction of impurities in the source gas · CPC title