Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
US2016018135A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016018135-A1 |
| Application number | US-201514868384-A |
| Country | US |
| Kind code | A1 |
| Filing date | Sep 28, 2015 |
| Priority date | Mar 29, 2013 |
| Publication date | Jan 21, 2016 |
| Grant date | — |
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A binary refrigerating apparatus employs a refrigerant composition that has a small global-warming potential (GWP) to be earth friendly, can be used as a refrigerant capable of achieving a low temperature of −80° C., and is excellent in refrigerating capacity and other performance. A refrigerant composition used as a low-temperature-side refrigerant is a refrigerant mixture including a non-azeotropic mixture in which 20% by mass or less of carbon dioxide (R744) is mixed to difluoroethylene (R1132a). A refrigerant composition used as a high-temperature-side refrigerant is a combination of: a non-azeotropic mixture comprising the refrigerant group of difluoromethane (R32), pentafluoroethane (R125), 1,1,1,2-tetrafluoroethane (R134a) and 1,1,3-trifluoro ethane (R143a); and 1,1,1,2,3-pentafluoropentene (HFO-1234ze), having a global-warming potential (GWP) of 1500 or less.
Opening claim text (preview).
1 . A binary refrigerating apparatus comprising a high-temperature-side refrigeration circuit and a low-temperature-side refrigeration circuit, which achieves a refrigerating capacity of −80° C. or lower by condensing a refrigerant in the low-temperature-side refrigeration circuit with a refrigerant passing through a cascade condenser in the high-temperature-side refrigeration circuit, wherein a refrigerant composition containing difluoroethylene (R1132a) and hexafluoroethane (R116) is used as the refrigerant in the low-temperature-side refrigeration circuit, so that an evaporation temperature reaches a temperature lower than both boiling points of difluoroethylene (R1132a) and hexafluoroethane (R116). 2 . A binary refrigerating apparatus comprising a high-temperature-side refrigeration circuit and a low-temperature-side refrigeration circuit, which achieves a refrigerating capacity of −80° C. or lower by condensing a refrigerant in the low-temperature-side refrigeration circuit with a refrigerant passing through a cascade condenser in the high-temperature-side refrigeration circuit, wherein a refrigerant composition containing difluoroethylene (R1132a) and more than 0% by mass and 20% by mass or less of carbon dioxide (R744) is used as the refrigerant in the low-temperature-side refrigeration circuit, so that an evaporation temperature reaches a temperature lower than both boiling points of difluoroethylene (R1132a) and carbon dioxide (R744). 3 . The binary refrigerating apparatus according to claim 1 , wherein a refrigerant composition in which carbon dioxide (R744) is further mixed is used as the refrigerant in the low-temperature-side refrigeration circuit, so that an evaporation temperature reaches a temperature lower than any boiling points of difluoroethylene (R1132a), hexafluoroethane (R116), and carbon dioxide (R744). 4 . The binary refrigerating apparatus according to claim 2 , wherein hexafluoroethane (R116) is further mixed as the refrigerant in the low-temperature-side refrigeration circuit. 5 . The binary refrigerating apparatus according to claim 4 , wherein a refrigerant composition in which difluoroethylene (R1132a)/hexafluoroethane (R116)/carbon dioxide (R744)=27.6 to 29.2% by mass/56.8 to 68.4% by mass/4.0 to 14.0% by mass are mixed is used as the refrigerant in the low-temperature-side refrigeration circuit. 6 . The binary refrigerating apparatus according to claim 4 , wherein a refrigerant composition in which difluoroethylene (R1132a)/hexafluoroethane (R116)/carbon dioxide (R744)=54.8 to 58.3% by mass/25.2 to 35.7% by mass/8.0 to 18.0% by mass are mixed is used as the refrigerant in the low-temperature-side refrigeration circuit. 7 . The binary refrigerating apparatus according to claim 1 , wherein a refrigerant composition in which n-pentane is mixed in a ratio of 14% by mass or less with respect to the total mass of the refrigerant composition in the low-temperature-side refrigeration circuit is used. 8 . The binary refrigerating apparatus according to claim 1 , wherein a refrigerant composition in which propane (R290) is mixed in a ratio of 14% by mass or less with respect to the total mass of the refrigerant composition in the low-temperature-side refrigeration circuit is used. 9 . The binary refrigerating apparatus according to claim 1 , wherein a refrigerant composition, containing a non-azeotropic mixture comprising the refrigerant group of difluoromethane (R32), pentafluoroethane (R125), 1,1,1,2-tetrafluoroethane (R134a), and 1,1,3-trifluoroethane (R143a), and 1,1,1,2,3-pentafluoropentene (HFO-1234ze), and having a Global-warming potential (GWP) of 1500 or less, is used as the refrigerant in the high-temperature-side refrigeration circuit. 10 . The binary refrigerating apparatus according to claim 1 , wherein a refrigerant composition, containing a non-azeotropic mixture comprising the refrigerant group of difluoromethane (R32), pentafluoroethane (R125), 1,1,1,2-tetrafluoroethane (R134a), and 1,1,3-trifluoroethane (R143a), and 1,1,1,2-tetrafluoropentene (HFO-1234yf), and having a Global-warming potential (GWP) of 1500 or less, is used as the refrigerant in the high-temperature-side refrigeration circuit. 11 . The binary refrigerating apparatus according to claim 2 , wherein a refrigerant composition in which n-pentane is mixed in a ratio of 14% by mass or less with respect to the total mass of the refrigerant composition in the low-temperature-side refrigeration circuit is used. 12 . The binary refrigerating apparatus according to claim 2 , wherein a refrigerant composition in which propane (R290) is mixed in a ratio of 14% by mass or less with respect to the total mass of the refrigerant composition in the low-temperature-side refrigeration circuit is used. 13 . The binary refrigerating apparatus according to claim 2 , wherein a refrigerant composition, containing a non-azeotropic mixture comprising the refrigerant group of difluoromethane (R32), pentafluoroethane (R125), 1,1,1,2-tetrafluoroethane (R134a), and 1,1,3-trifluoroethane (R143a), and 1,1,1,2,3-pentafluoropentene (HFO-1234ze), and having a Global-warming potential (GWP) of 1500 or less, is used as the refrigerant in the high-temperature-side refrigeration circuit. 14 . The binary refrigerating apparatus according to claim 2 , wherein a refrigerant composition, containing a non-azeotropic mixture comprising the refrigerant group of difluoromethane (R32), pentafluoroethane (R125), 1,1,1,2-tetrafluoroethane (R134a), and 1,1,3-trifluoroethane (R143a), and 1,1,1,2-tetrafluoropentene (HFO-1234yf), and having a Global-warming potential (GWP) of 1500 or less, is used as the refrigerant in the high-temperature-side refrigeration circuit.
All components of a mixture being fluoro compounds · CPC title
Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit (F25B9/00 takes precedence) · CPC title
containing only fluorine as halogen · CPC title
The mixture being non-azeotropic · CPC title
the refrigerant containing more than one component (F25B9/004 takes precedence) · CPC title
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