Laminated substrate separating device and method for separating laminated substrate
US-2016159069-A1 · Jun 9, 2016 · US
US2016016397A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016016397-A1 |
| Application number | US-201414415698-A |
| Country | US |
| Kind code | A1 |
| Filing date | May 29, 2014 |
| Priority date | Nov 11, 2013 |
| Publication date | Jan 21, 2016 |
| Grant date | — |
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A apparatus for stripping flexible device including: a chassis; a stage; a pick-up device mounted on the chassis through a pivot shaft parallel to a bearing surface, the pick-up device being movable with respect to the stage along a direction perpendicular to a rotation axis of the pivot shaft and parallel with the bearing surface of the stage, and having a surface facing the stage, and having a fixing mechanism configured to fasten a lateral side of the flexible device; an auxiliary device which is mounted on the chassis, an end part of the auxiliary device providing a force to the flexible substrate for its separation from the carrier plate at a separation position between the flexible substrate of the flexible device and the carrier plate when the flexible device is picked up from the carrier plate by the pick-up device; a first driving device mounted on the chassis.
Opening claim text (preview).
1 . An apparatus for stripping a flexible device comprising: a chassis; a stage mounted on the chassis; a pick-up device located above a bearing surface of the stage and mounted on the chassis through a pivot shaft parallel to the bearing surface of the stage, the pick-up device being movable with respect to the stage along a direction perpendicular to a rotation axis of the pivot shaft and parallel with the bearing surface of the stage, and having a surface facing the stage which is an arc face taking the rotation axis of the pivot shaft as a center axis, and the pick-up device including a fixing mechanism configured to fasten a lateral side of the flexible device; an auxiliary device which is mounted on the chassis and is movable with respect to the stage along the direction perpendicular to the rotation axis of the pivot shaft and parallel to the bearing surface of the stage, an end part of the auxiliary device being configured to provide a force to a flexible substrate of the flexible device for its separation from the carrier plate at a separation position between the flexible substrate and the carrier plate; and a first driving device mounted on the chassis and configured to drive the pick-up device to move with respect to the stage. 2 . The apparatus for stripping flexible device according to claim 1 , wherein the chassis comprises: a body, which the stage is fixed to; a bracket fixed to the body; and a slider fitted to the bracket in a manner of being slidable with respect to the bracket; wherein the pick-up device is pivotably mounted on the slider through the pivot shaft, and the auxiliary device is mounted on the slider; the first driving device is mounted on the bracket. 3 . The apparatus for stripping flexible device according to claim 2 , wherein the slider and the bracket can be fitted to each other by at least a set of sliding groove and sliding rail which are slidably fitted. 4 . The apparatus for stripping flexible device according to claim 1 , wherein the chassis comprises: a body, the stage being slidably fitted on the body, the first driving device being mounted on the body and configured to drive the stage to slide with respect to the body of the chassis; a first bracket fixed to the body, the pick-up device pivotably connected to the first bracket through the pivot shaft; and a second bracket fixed to the body, the auxiliary device being mounted on the second bracket. 5 . The apparatus for stripping flexible device according to claim 1 , wherein the first driving device comprises a screw drive device. 6 . The apparatus for stripping flexible device according to claim 1 , wherein the pick-up device is a roller which has a center axis coinciding with the center axis of the pivot shaft. 7 . The apparatus for stripping flexible device according to claim 1 , wherein the fixing mechanism is a vacuum suction device in which a suction opening is located on a face of the pick-up device facing the stage. 8 . The apparatus for stripping flexible device according to claim 1 , wherein the fixing mechanism is a glue tape provided on a face of the pick-up device facing the stage. 9 . The apparatus for stripping flexible device according to claim 1 , wherein an end part of the auxiliary device is an air knife having a jet nozzle facing the separation position of the flexible substrate and the carrier plate. 10 . The apparatus for stripping flexible device according to claim 1 , wherein an end part of the auxiliary device is a flexible cut sheet having an outer end in contact with the separation position of the flexible substrate and the carrier plate and having a wedge structure. 11 . The apparatus for stripping flexible device according to claim 1 , further comprising: a second driving device configured to drive the pick-up device to rotate around the rotation axis of the pivot shaft. 12 . The apparatus for stripping flexible device according to claim 11 , wherein the second driving device is a driving motor which is mounted in a manner that the output shaft thereof is coaxially fixed with the pivot shaft. 13 . The apparatus for stripping flexible device according to claim 2 , wherein the first driving device comprises a screw drive device. 14 . The apparatus for stripping flexible device according to claim 2 , wherein the pick-up device is a roller which has a center axis coinciding with the center axis of the pivot shaft. 15 . The apparatus for stripping flexible device according to claim 2 , wherein the fixing mechanism is a vacuum suction device in which a suction opening is located on a face of the pick-up device facing the stage. 16 . The apparatus for stripping flexible device according to claim 2 , wherein the fixing mechanism is a glue tape provided on a face of the pick-up device facing the stage. 17 . The apparatus for stripping flexible device according to claim 2 , wherein an end part of the auxiliary device is an air knife having a jet nozzle facing the separation position of the flexible substrate and the carrier plate. 18 . The apparatus for stripping flexible device according to claim 2 , wherein an end part of the auxiliary device is a flexible cut sheet having an outer end in contact with the separation position of the flexible substrate and the carrier plate and having a wedge structure. 19 . The apparatus for stripping flexible device according to claim 2 , further comprising: a second driving device configured to drive the pick-up device to rotate around the rotation axis of the pivot shaft. 20 . The apparatus for stripping flexible device according to claim 3 , wherein the first driving device comprises a screw drive device.
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