Radiation source and lithographic apparatus
US-9510432-B2 · Nov 29, 2016 · US
US2016014874A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016014874-A1 |
| Application number | US-201514798599-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jul 14, 2015 |
| Priority date | Jul 14, 2014 |
| Publication date | Jan 14, 2016 |
| Grant date | — |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A method for generating coherent, polarized, and tunable X-rays using a single laser pulse is provided. An ultrashort laser pulse is fired into a plasma. As the laser beam travels through the plasma, some of its photons are backscattered, e.g., through Raman backscattering, to generate a counter-propagating photon beam that is co-linear with the original laser beam. When the backscattered photons interact with high-energy accelerated periodic electron bunches, coherent X-rays are generated through Compton backscattering of the photons off of the electrons. The energy of the backscattered X-rays can be tuned by tuning one or more characteristics of the laser pulse and/or the plasma.
Opening claim text (preview).
What is claimed is: 1 . A method for generating an emission of coherent X-rays, comprising: firing a laser pulse into a gas jet, a power of the laser pulse being configured to produce a laser-generated plasma within the gas jet, the power of the laser pulse and a width of the gas jet being configured to produce a beam of high-energy laser-accelerated periodic electron bunches within the plasma, the beam of laser-accelerated periodic electron bunches being co-linear with and following behind the laser pulse as it travels through the gas jet; wherein a plurality of photons from the laser pulse is backscattered by the plasma to form a counter-propagating photon beam that is co-linear with the beam of periodic electron bunches in the plasma; wherein photons from the counter-propagating photon beam scatter off electrons from the electron bunches to generate a self-amplified coherent emission of X-rays. 2 . The method according to claim 1 , wherein an energy of the laser pulse is tuned to produce an emission of X-rays having a desired energy. 3 . The method according to claim 1 , wherein a duration of the laser pulse is tuned to produce an emission of X-rays having a desired energy. 4 . The method according to claim 1 , wherein a polarization of the laser pulse is tuned to produce an emission of X-rays having a desired polarization. 5 . The method according to claim 1 , wherein a wavelength of the laser pulse is tuned to produce an emission of X-rays having a desired wavelength. 6 . The method according to claim 1 , wherein a length of a nozzle producing the gas jet is tuned to produce a desired length of an interaction distance for an interaction between the laser-accelerated periodic electron bunches and the counter-propagating photon beam so as to produce an emission of X-rays having a desired degree of coherence. 7 . The method according to claim 1 , wherein a height of a source of the laser pulse with respect to a nozzle producing the gas jet is tuned to produce a desired length of an interaction distance for an interaction between the laser-accelerated periodic electron bunches and the counter-propagating photon beam so as to produce an emission of X-rays having a desired degree of coherence. 8 . The method according to claim 1 , wherein a height of a source of the laser pulse with respect to a nozzle producing the gas jet is tuned to produce a desired density in the plasma so as to produce an emission of X-rays having a desired energy. 9 . The method according to claim 1 , wherein a shape of the laser pulse is configured to produce an emission of X-rays having a desired energy. 10 . A method for generating an emission of coherent X-rays, comprising: firing a laser pulse into a plasma, the power of the laser pulse and a width of the laser pulse being configured to produce a beam of high-energy laser-accelerated periodic electron bunches within the plasma, the beam of laser-accelerated periodic electron bunches being co-linear with and following behind the laser pulse as it travels through the gas jet; wherein a plurality of photons from the laser pulse is backscattered by the plasma to form a counter-propagating photon beam that is co-linear with the beam of periodic electron bunches in the plasma; wherein photons from the counter-propagating photon beam scatter off electrons from the electron bunches to generate a self-amplified coherent emission of X-rays. 11 . The method according to claim 10 , wherein an energy of the laser pulse is tuned to produce an emission of X-rays having a desired energy. 12 . The method according to claim 10 , wherein a duration of the laser pulse is tuned to produce an emission of X-rays having a desired energy. 13 . The method according to claim 10 , wherein a polarization of the laser pulse is tuned to produce an emission of X-rays having a desired polarization. 14 . The method according to claim 10 wherein a wavelength of the laser pulse is tuned to produce an emission of X-rays having a desired wavelength. 15 . The method according to claim 1 , wherein a width of the plasma is tuned to produce a desired length of an interaction distance for an interaction between the laser-accelerated periodic electron bunches and the counter-propagating photon beam so as to produce an emission of X-rays having a desired degree of coherence. 16 . The method according to claim 10 , wherein a density of the plasma is tuned so as to produce an emission of X-rays having a desired energy. 17 . The method according to claim 10 , wherein a shape of the laser pulse is configured to produce an emission of X-rays having a desired energy.
Constructional details of the ejection system · CPC title
the plasma being generated from a material in a liquid or gas state · CPC title
involving an energy-carrying beam in the process of plasma generation · CPC title
Devices using stimulated emission of electromagnetic radiation in wave ranges other than those covered by groups H01S1/00, H01S3/00 or H01S5/00, e.g. phonon masers, X-ray lasers or gamma-ray lasers · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.