Vibrating element and manufacturing method for the same, gyro sensor, electronic apparatus and moving object
US-9347776-B2 · May 24, 2016 · US
Vibrating reed, angular velocity sensor, electronic device, and moving object
US2015114126A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2015114126-A1 |
| Application number | US-201414526866-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 29, 2014 |
| Priority date | Oct 30, 2013 |
| Publication date | Apr 30, 2015 |
| Grant date | — |
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Abstract
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The vibrating reed includes a first main surface and a second main surface that face each other in the thickness direction of a piezoelectric body and a detection unit that vibrates along the thickness direction when detecting. The detection unit includes a groove of which a groove bottom is positioned at a position beyond a midplane between the first main surface and the second main surface in the depth direction from an opening formed in the first main surface, an inside surface electrode that is formed on an inside surface facing the inside of the groove, an outside surface electrode that is formed on an outside surface which is opposite the inside surface with the piezoelectric body interposed therebetween, and a pair of groove bottom electrodes that is provided further on the groove bottom at an interval than the midplane and face inside the groove.
First claim
Opening claim text (preview).
What is claimed is: 1 . A vibrating reed comprising: a first main surface and a second main surface of a piezoelectric body, the second main surface being on a back surface of the piezoelectric body with respect to the first main surface; an outside surface that connects the first main surface and the second main surface; and a detection unit that vibrates along a direction intersecting the first main surface, wherein the detection unit includes a groove of which a groove…
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- G01C19/5607Primary
Physics · mapped topic
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Frequently asked questions
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- What does patent US2015114126A1 cover?
- The vibrating reed includes a first main surface and a second main surface that face each other in the thickness direction of a piezoelectric body and a detection unit that vibrates along the thickness direction when detecting. The detection unit includes a groove of which a groove bottom is positioned at a position beyond a midplane between the first main surface and the second main surface in…
- Who is the assignee on this patent?
- Seiko Epson Corp
- What technology area does this patent fall under?
- Primary CPC classification G01C19/5607. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Apr 30 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).