Vibrating element and manufacturing method for the same, gyro sensor, electronic apparatus and moving object
US-9347776-B2 · May 24, 2016 · US
US2015114116A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2015114116-A1 |
| Application number | US-201414526942-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 29, 2014 |
| Priority date | Oct 30, 2013 |
| Publication date | Apr 30, 2015 |
| Grant date | — |
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The vibrating reed includes a detection unit that vibrates along the thickness direction of a piezoelectric body when detecting. The detection unit includes a first main surface and a second main surface that face each other in the thickness direction, outside surfaces, a groove that has a groove bottom at a position between the first main surface and the second main surface in a depth direction from an opening provided in the first main surface, an outside surface electrode that is formed on the outside surfaces, and an inside surface electrode that is formed on an inside surface which is opposite the outside surfaces. At least one of the outside surfaces has a non-electrode-formed area where the outside surface electrode is not provided in an area from the end surface which positioned on the second main surface side in the thickness direction to the second main surface.
Opening claim text (preview).
What is claimed is: 1 . A vibrating reed comprising: a first main surface and a second main surface of a piezoelectric body, the second main surface being on a back surface of the piezoelectric body with respect to the first main surface; an outside surface that connects the first main surface and the second main surface; and a detection unit that vibrates in a direction intersecting the first main surface, wherein the detection unit includes a groove that has a groove bo…
Physics · mapped topic
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