Ceramic substrate, firing setter, and manufacturing method of ceramic substrate using the same

Patent metadata

Field	Value
Publication number	US-2015111164-A1
Application number	US-201414199090-A
Country	US
Kind code	A1
Filing date	Mar 6, 2014
Priority date	Oct 17, 2013
Publication date	Apr 23, 2015
Grant date	—

Abstract

Disclosed herein are a ceramic substrate, a firing setter, and a manufacturing method of a ceramic substrate using the same. According to the present invention, there is provided a ceramic substrate including: a first substrate concave-convex part formed on a lower surface thereof and having a first substrate roughness; and a second substrate concave-convex part formed on an upper surface thereof and having a second substrate roughness.

First claim

What is claimed is:

1 . A ceramic substrate comprising:
a first substrate concave-convex part formed on a lower surface thereof and having a first substrate roughness; and a second substrate concave-convex part formed on an upper surface thereof and having a second substrate roughness, wherein the first substrate roughness and the second substrate roughness are different from each other.

2 . The ceramic substrate as set forth in claim 1 , wherein the first substrate concave-convex part has a plurality of first substrate roughnesses.

3 . The ceramic substrate as set forth in claim 2 , wherein at least one of the plurality of first substrate roughnesses has a different value.

4 . The ceramic substrate as set forth in claim 1 , wherein the second substrate concave-convex part has a plurality of second substrate roughnesses.

5 . The ceramic substrate as set forth in claim 4 , wherein at least one of the plurality of second substrate roughnesses has a different value.

6 . A firing setter comprising:
a lower setter including a first setter concave-convex part formed on an upper surface thereof and having a first setter roughness; and an upper setter positioned over the lower setter, and including a second setter concave-convex part formed on a lower surface thereof and having a second setter roughness, wherein the first setter roughness and the second setter roughness are different from each other.

7 . The firing setter as set forth in claim 6 , wherein the first setter concave-convex part has a plurality of first setter roughnesses.

8 . The firing setter as set forth in claim 7 , wherein at least one of the plurality of first setter roughnesses has a different value.

9 . The firing setter as set forth in claim 6 , wherein the second setter concave-convex part has a plurality of second setter roughnesses.

10 . The firing setter as set forth in claim 9 , wherein at least one of the plurality of second setter roughnesses has a different value.

11 . A manufacturing method of a ceramic substrate, the manufacturing method comprising:
preparing a firing setter including a lower setter including a first setter concave-convex part formed on an upper surface thereof and having a first setter roughness, and an upper setter positioned over the lower setter, and including a second setter concave-convex part formed on a lower surface thereof and having a second setter roughness, the first setter roughness and the second setter roughness being different from each other; mounting a ceramic green sheet in the firing setter; and firing the ceramic green sheet.

12 . The manufacturing method as set forth in claim 11 , wherein in the firing of the ceramic green sheet, a lower surface of the fired ceramic green sheet is formed with a first substrate concave-convex part corresponding to the first setter concave-convex part.

13 . The manufacturing method as set forth in claim 11 , wherein in the firing of the ceramic green sheet, an upper surface of the fired ceramic green sheet is formed with a second substrate concave-convex part corresponding to the second setter concave-convex part.

14 . The manufacturing method as set forth in claim 11 , wherein in the preparing of the firing setter, the first setter concave-convex part has a plurality of first setter roughnesses.

15 . The manufacturing method as set forth in claim 14 , wherein at least one of the plurality of first setter roughnesses has a different value.

16 . The manufacturing method as set forth in claim 11 , wherein in the preparing of the firing setter, the second setter concave-convex part has a plurality of second setter roughnesses.

17 . The manufacturing method as set forth in claim 16 , wherein at least one of the plurality of second setter roughnesses has a different value.

Assignees

• Samsung Electro Mech

Inventors

• Park Seung Wook
• Kim Jang Su
• Park No Il
• Jung Doo Sung

Classifications

• F27D5/00 Primary

  Supports, screens or the like for the charge within the furnace · CPC title

• C04B35/64 Primary

  Burning or sintering processes (C04B33/32 takes precedence {; powder metallurgy B22F}) · CPC title

• H05K1/03

  Use of materials for the substrate · CPC title

• C04B2235/963

  Surface properties, e.g. surface roughness · CPC title

• C04B2235/95

  Products characterised by their size, e.g. microceramics · CPC title