Chemical deposition chamber having gas seal
US-2015004798-A1 · Jan 1, 2015 · US
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Patent family 52116002
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52116002 |
| Family type | — |
| Earliest priority | Jun 28, 2013 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2015004798A1 — Chemical deposition chamber having gas seal |
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US2015004798A1 — Chemical deposition chamber having gas seal (published Jan 1, 2015)
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