Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US12585183B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12585183-B2 |
| Application number | US-201515319733-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 19, 2015 |
| Priority date | Jun 20, 2014 |
| Publication date | Mar 24, 2026 |
| Grant date | Mar 24, 2026 |
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A method of forming an electronic device on a flexible substrate without using acetone dissolvent, including the steps of: printing a hydrophobic mask on a porous membrane to form a pattern thereon which is complementary to a desired pattern; filtering an aqueous suspension of an electronic material through the non-printed region of the porous membrane, whereby some electronic material is deposited on said non-printed region following the desired pattern; pressing the flexible substrate against the printed face of the membrane in order to transfer the patterned electronic material deposited on the porous membrane to the flexible substrate to form the electronic device thereon.
Opening claim text (preview).
The invention claimed is: 1 . A method of forming an electronic device on a flexible substrate, wherein the flexible substrate is a sheet, the method comprising the steps of: wax printing a hydrophobic mask on a porous membrane to form a pattern thereon which is complementary to a desired pattern; filtering an aqueous suspension consisting of water and an electronic material, wherein the electronic material is graphene oxide, through a non-printed region of the porous membrane, wherein some electronic material is deposited on the non-printed region following the desired pattern; and transferring the patterned electronic material to the sheet by a transfer step consisting of pressing the sheet against the printed face of the porous membrane with a press, enabling the transfer of the patterned electronic material deposited on the porous membrane to the sheet to form the electronic device thereon; wherein the transfer step of the method is carried out without using acetone dissolvent. 2 . The method according to claim 1 , wherein the electronic material is reduced graphene oxide. 3 . The method according claim 1 , wherein the porous membrane is made of nitrocellulose, a pore size thereof being between 0.01 μm and 0.3 μm. 4 . The method according of claim 3 , wherein the pressing step uses a pressing force of between 500 kg and 700 kg. 5 . The method according to claim 1 , wherein the sheet is organic. 6 . The method according to claim 5 , wherein the sheet is polyethylene terephthalate (PET). 7 . The method of claim 5 , wherein the sheet is a continuous sheet and the pressing step is performed with roll-to-roll hardware. 8 . The method according to claim 7 , wherein the hydrophobic mask is printed with a printer which is integrated with the roll-to-roll hardware. 9 . The method according to claim 1 , wherein the press actuates through a stamp to which the sheet is adhered. 10 . The method according to claim 1 , wherein the electronic device is an interdigitated electrode. 11 . The method according to claim 1 , wherein the electronic device is transparent. 12 . The method according to claim 1 , wherein the pressing step uses a pressing force of between 500 kg and 700 kg. 13 . The method according to claim 1 , wherein the electronic material is oxidized graphene oxide. 14 . The method according to claim 1 , wherein the electronic device is an electrode microarray. 15 . The method according claim 1 , wherein the porous membrane is made of nitrocellulose, a pore size thereof being between 0.01 μm and 0.1 μm. 16 . The method according of claim 15 , wherein the pressing step uses a pressing force of between 500 kg and 700 kg.
Methods for applying liquids, e.g. spraying · CPC title
Polyester, e.g. polyethylene terephthalate [PET], polyethylene naphthalate [PEN] · CPC title
by other printing techniques, e.g. letterpress printing, intaglio printing, lithographic printing, offset printing · CPC title
characterised by the composition of the mask · CPC title
characterised by the use of flexible or folded printed circuits · CPC title
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