Stator module and planar drive system
US-11437902-B2 · Sep 6, 2022 · US
US12580441B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12580441-B2 |
| Application number | US-202318505311-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 9, 2023 |
| Priority date | May 11, 2021 |
| Publication date | Mar 17, 2026 |
| Grant date | Mar 17, 2026 |
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A rotor for a planar drive system comprises a housing and at least one magnet arrangement. The housing comprises a basic housing body and a cover. The magnet arrangement is arranged in a recess of the basic housing body. The cover is attached to the basic housing body in such a way that the housing is configured to be fluid-tight, the cover covers the recess, and the magnet arrangement is arranged in an interior of the fluid-tight housing.
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The invention claimed is: 1 . A rotor having: a housing, and at least one magnet arrangement; the housing comprising a basic housing body and a cover, and the magnet arrangement being arranged in a recess of the basic housing body; wherein the cover is attached to the basic housing body in such a way that the housing is configured to be fluid-tight, the cover covers the recess and the magnet arrangement is arranged in an interior of the fluid-tight housing; wherein the basic housing body and the cover have a metallic configuration, and wherein the cover and the basic housing body are laser-welded, wherein a laser-welded joint is circumferentially arranged between the basic housing body and the cover in an edge region of the housing. 2 . The rotor according to claim 1 , wherein the cover is non-magnetic. 3 . The rotor according to claim 1 , wherein the cover has a relative magnetic permeability of less than ten, less than two, or less than 1.01. 4 . The rotor according to claim 1 , wherein the cover attenuates a magnetic field of the magnet arrangement outside of the housing by a maximum of 25 percent, or by a maximum of 10 percent. 5 . The rotor according to claim 1 , wherein the cover comprises a metal sheet, wherein a metal sheet thickness of the metal sheet is between 0.05 and 0.5 millimeters, between 0.09 and 0.11 millimeters, or about 0.1 millimeters. 6 . A rotor comprising: a housing, and at least one magnet arrangement; the housing comprising a basic housing body and a cover, and the at least one magnet arrangement being arranged in a recess of the basic housing body; wherein the cover is attached to the basic housing body such that the housing is configured to be fluid-tight, wherein the cover covers the recess and the at least one magnet arrangement is arranged in an interior of the fluid-tight housing; and wherein the basic housing body and the cover comprise a plastic, and wherein the cover and the basic housing body are laser-welded. 7 . A rotor comprising: a housing, and at least one magnet arrangement; the housing comprising a basic housing body and a cover, and the at least one magnet arrangement being arranged in a recess of the basic housing body; wherein the cover is attached to the basic housing body such that the housing is configured to be fluid-tight, wherein the cover covers the recess and the at least one magnet arrangement is arranged in an interior of the fluid-tight housing; and wherein the interior of the fluid-tight housing is at least partially evacuated. 8 . The rotor according to claim 7 , wherein an evacuating device is attached to the housing, wherein the evacuating device comprises a welded or soldered pipe. 9 . A rotor having: a housing, and at least one magnet arrangement; the housing comprising a basic housing body and a cover, and the at least one magnet arrangement being arranged in a recess of the basic housing body; wherein the cover is attached to the basic housing body such that the housing is configured to be fluid-tight, wherein the cover covers the recess and the at least one magnet arrangement is arranged in an interior of the fluid-tight housing; and wherein the interior of the fluid-tight housing is at least partially filled with a casting compound. 10 . The rotor according to claim 9 , wherein the interior of the fluid-tight housing is potted with a PU casting compound in a substantially bubble-free manner. 11 . The rotor according claim 1 , wherein the interior of the fluid-tight housing is substantially free of water. 12 . The rotor according to claim 1 , wherein the magnet arrangement is configured for interacting with a stator magnetic field and thereby driving the rotor. 13 . A planar drive system having: at least one stator module; wherein the stator module comprises at least one stator assembly with at least one coil arrangement, wherein the coil arrangement is energizable and is arranged to generate a stator magnetic field above a stator surface due to an energization, wherein the planar drive system further comprises a rotor, wherein the rotor is movable above the stator surface via of an interaction between the stator magnetic field and a rotor magnetic field of the magnet arrangement, wherein the planar drive system further comprises a separating device, wherein the separating device is arranged above the stator surface, and wherein the stator module is arranged on a first side of the separating device and the rotor is arranged on a second side of the separating device; and wherein the separating device is part of an operating housing, the rotor being movable within the operating housing. 14 . The planar drive system according to claim 13 , wherein the separating device is non-magnetic. 15 . The planar drive system according to claim 13 , wherein the separating device has a relative magnetic permeability smaller than ten, smaller than two or smaller than 1.01. 16 . The planar drive system according to claim 13 , wherein the separating device is between 0.5 and 1 millimeter thick. 17 . The planar drive system according to claim 13 , wherein the operating housing comprises a first vacuum chamber. 18 . The planar drive system according to claim 17 , wherein the stator module is arranged within a second vacuum chamber, wherein the separating device separates the first vacuum chamber from the second vacuum chamber. 19 . The planar drive system according to claim 18 , wherein an equalizing valve is arranged between the first vacuum chamber and the second vacuum chamber, wherein the equalizing valve is arranged to equalize a pressure difference between the first vacuum chamber and the second vacuum chamber when the pressure difference is larger than 5 millibars. 20 . The planar drive system according to claim 19 , wherein the equalizing valve is configured as a pressure relief valve. 21 . The planar drive system according to claim 20 , wherein the equalizing valve is configured as a controlled valve, wherein a valve control is connected to a first pressure sensor of the first vacuum chamber and to a second pressure sensor of the second vacuum chamber. 22 . The planar drive system according to claim 18 , wherein the stator module is connected to a vacuum duct, the vacuum duct being set up to provide a data connection and a current supply to the stator module from outside of the second vacuum chamber. 23 . The planar drive system according to claim 22 , wherein the vacuum duct comprises a printed circuit board, the printed circuit board being part of a wall of the second vacuum chamber, the printed circuit board comprising pins for current feedthrough and vias for data connection. 24 . The planar drive system according to claim 17 , wherein the first vacuum chamber is configured to be evacuated via a backing pump and a turbopump. 25 . A planar drive system comprising: a rotor, the rotor comprising a basic housing body with a recess, at least one magnet arrangement being arranged in the recess, and a cover adapted to the basic housing body in such a way that a housing is formed by the basic housing body and the cover, the housing being configured to be fluid-tight, and a magnet arrangement arranged in an interior of the fluid-tight housing; wherein the rotor is disposed in a vacuum during attachment of the cover or the rotor is heated to more than 100 degrees Celsi
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