Synchronization of RF generators

Patent metadata

Field	Value
Publication number	US-12573589-B2
Application number	US-202418740449-A
Country	US
Kind code	B2
Filing date	Jun 11, 2024
Priority date	Sep 29, 2020
Publication date	Mar 10, 2026
Grant date	Mar 10, 2026

Abstract

Systems and methods for synchronization of radio frequency (RF) generators are described. One of the methods includes receiving, by a first RF generator, a first recipe set, which includes information regarding a first plurality of pulse blocks for operating the first RF generator. The method further includes receiving, by a second RF generator, a second recipe set, which includes information regarding a second plurality of pulse blocks for operating a second RF generator. Upon receiving a digital pulsed signal, the method includes executing the first recipe set and executing the second recipe set. The method further includes outputting a first one of the pulse blocks of the first plurality based on the first recipe set in synchronization with a synchronization signal. The method includes outputting a first one of the pulse blocks of the second plurality based on the second recipe set in synchronization with the synchronization signal.

First claim

The invention claimed is:

1 . A computer comprising:
a processor configured to:
provide a first recipe set to a first radio frequency (RF) generator, wherein the first recipe set includes information regarding a first plurality of pulse blocks;
provide a second recipe set to a second RF generator, wherein the second recipe set includes information regarding a second plurality of pulse blocks;
generate a synchronization signal;
provide the synchronization signal to the first RF generator to control the first RF generator to output a first one of the first plurality of pulse blocks in synchronization with the synchronization signal; and
provide the synchronization signal to the second RF generator to control the second RF generator to output a first one of the second plurality of pulse blocks in synchronization with the synchronization signal; and
a memory device coupled to the processor.

2 . The computer of claim 1 , wherein the information regarding the first plurality of pulse blocks includes a number of the first plurality of pulse blocks, a time interval of each pulse period in each of the first plurality of pulse blocks, a number of pulse periods within each of the first plurality of pulse blocks, a number of states during each of the pulse periods, a duty cycle for each of the states, and a variable level for each of the states.

3 . The computer of claim 1 , wherein the information regarding the second plurality of pulse blocks includes a number of the second plurality of pulse blocks, a time interval of each pulse period in each of the second plurality of pulse blocks, a number of pulse periods within each of the second plurality of pulse blocks, a number of states during each of the pulse periods, a duty cycle for each of the states, and a variable level for each of the states.

4 . The computer of claim 1 , wherein the synchronization signal includes a series of pulses at periodic intervals.

5 . The computer of claim 1 , wherein the first plurality of pulse blocks includes the first one of the first plurality of pulse blocks and a second one of the first plurality of pulse blocks, wherein the second plurality of pulse blocks includes the first one of the second plurality of pulse blocks and a second one of the second plurality of pulse blocks, wherein each of the first plurality of pulse blocks includes a first portion and a second portion, wherein each of the second plurality of pulse blocks includes a first portion and a second portion, wherein the first and second pluralities of pulse blocks are in synchronization with the synchronization signal when the second portion of the first one of the first plurality of pulse blocks is controlled to be output from the first RF generator without controlling the second RF generator to output the second portion of the second one of the second plurality of pulse blocks.

6 . The computer of claim 5 , wherein the second one of the second plurality of pulse blocks is controlled to be output preceding the first one of the second plurality of pulse blocks, and the second one of the first plurality of pulse blocks is controlled to be output preceding the first one of the first plurality of pulse blocks.

7 . The computer of claim 1 , wherein the first plurality of pulse blocks includes the first one of the first plurality of pulse blocks and a second one of the first plurality of pulse blocks, wherein the second plurality of pulse blocks includes the first one of the second plurality of pulse blocks and a second one of the second plurality of pulse blocks, wherein each of the first plurality of pulse blocks includes a first portion and a second portion, wherein each of the second plurality of pulse blocks includes a first portion and a second portion, wherein the first and second pluralities of pulse blocks are in synchronization with the synchronization signal when the first portion of the first one of the first plurality of pulse blocks is controlled to be output from the first RF generator at a time the second RF generator has output the first portion of the second one of the second plurality of pulse blocks.

8 . The computer of claim 7 , wherein the second one of the second plurality of pulse blocks is controlled to be output preceding the first one of the second plurality of pulse blocks, and the second one of the first plurality of pulse blocks is controlled to be output preceding the first one of the first plurality of pulse blocks.

9 . A method comprising:
providing a first recipe set to a first radio frequency (RF) generator, wherein the first recipe set includes information regarding a first plurality of pulse blocks; providing a second recipe set to a second RF generator, wherein the second recipe set includes information regarding a second plurality of pulse blocks; generating a synchronization signal; providing the synchronization signal to the first RF generator to control the first RF generator to output a first one of the first plurality of pulse blocks in synchronization with the synchronization signal; and providing the synchronization signal to the second RF generator to control the second RF generator to output a first one of the second plurality of pulse blocks in synchronization with the synchronization signal.

10 . The method of claim 9 , wherein the information regarding the first plurality of pulse blocks includes a number of the first plurality of pulse blocks, a time interval of each pulse period in each of the first plurality of pulse blocks, a number of pulse periods within each of the first plurality of pulse blocks, a number of states during each of the pulse periods, a duty cycle for each of the states, and a variable level for each of the states.

11 . The method of claim 9 , wherein the information regarding the second plurality of pulse blocks includes a number of the second plurality of pulse blocks, a time interval of each pulse period in each of the second plurality of pulse blocks, a number of pulse periods within each of the second plurality of pulse blocks, a number of states during each of the pulse periods, a duty cycle for each of the states, and a variable level for each of the states.

12 . The method of claim 9 , wherein the synchronization signal includes a series of pulses at periodic intervals.

13 . The method of claim 9 , wherein the first plurality of pulse blocks includes the first one of the first plurality of pulse blocks and a second one of the first plurality of pulse blocks, wherein the second plurality of pulse blocks includes the first one of the second plurality of pulse blocks and a second one of the second plurality of pulse blocks, wherein each of the first plurality of pulse blocks includes a first portion and a second portion, wherein each of the second plurality of pulse blocks includes a first portion and a second portion, wherein the first and second pluralities of pulse blocks are in synchronization with the synchronization signal when the second portion of the first one of the first plurality of pulse blocks is controlled to be output from the first RF generator without controlling the second RF generator to output the second portion of the second one of the second plurality of pulse blocks.

14 . The method of claim 13 , wherein the second one of the second plurality of pulse blocks is controlled to be output preceding the first one of the second plurality of pulse blocks, and the second one of the first plurality of pulse blocks is controlled to be output preceding the first one of the first plurality of pulse blocks.

15 . The method of claim 9 , wherein the first plurality of pulse

Assignees

• Lam Res Corp

Inventors

• Wu Ying
• Drewery John Stephen
• Paterson Alexander Miller
• Zhou Xiang
• Wang Zhuoxian
• Kimura Yoshie

Classifications

• H01J2237/334

  Etching · CPC title

• H01J37/32174 Primary

  Circuits specially adapted for controlling the RF discharge · CPC title

• H01J37/321

  the radio frequency energy being inductively coupled to the plasma · CPC title

• H01J37/32091

  the radio frequency energy being capacitively coupled to the plasma · CPC title

• H01J37/32165 Primary

  Plural frequencies · CPC title