System and method for arc detection using a bias RF generator signal

Patent metadata

Field	Value
Publication number	US-11536755-B2
Application number	US-202016887346-A
Country	US
Kind code	B2
Filing date	May 29, 2020
Priority date	May 29, 2020
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.

First claim

What is claimed is:

1. An arc detection system comprising:
a level detector module configured to generate a level signal in accordance with an AC signal applied to a non-linear load, wherein the level signal includes at least one of a first state or a second state in accordance with a magnitude of the AC signal; and
a timer module configured to receive the level signal and to generate a timing signal in accordance with a duration of one of the first state or the second state of the level signal,
wherein an arc condition in the non-linear load is indicated when the timing signal meets a selected criteria.

2. The arc detection system of claim 1 wherein the selected criteria is met when the timing signal is at least one of less than a first threshold or greater than a second threshold.

3. The arc detection system of claim 1 wherein the AC signal is generated by a first RF power supply.

4. The arc detection system of claim 1 wherein the level detector module is configured to convert the AC signal from an analog signal to a binary signal and the binary signal includes the first state and the second state, wherein the first state or the second state occurs when the magnitude of the AC signal is one of greater than or less than a level threshold and the second state occurs when the magnitude of the AC signal is an other of greater than or less than the level threshold.

5. The arc detection system of claim 1 wherein the level detector module comprises a circuit receiving the AC signal and generating the level signal in accordance with the AC signal and the circuit includes a zero-crossing detector.

6. The arc detection system of claim 1 wherein the level detector module comprises an analog-to-digital converter configured to receive the AC signal and convert the AC signal to a plurality of digital values in accordance with the magnitude of the AC signal, wherein a first plurality of the digital values defines the first state and a second plurality of the digital values defines the second state.

7. The arc detection system of claim 1 further comprising:
a first power source generating the AC signal; and
a second power source generating a second AC signal applied to the non-linear load,
wherein the arc condition is indicated in accordance with power reflected from the non-linear load to the second power source and the timing signal.

8. The arc detection system of claim 7 wherein:
the AC signal is a first RF signal and the second AC signal is a second RF signal, and
the first RF signal and the second RF signal are one of same frequencies or different frequencies.

9. The arc detection system of claim 1 wherein the non-linear load is a plasma chamber.

10. The arc detection system of claim 1 wherein the AC signal operates at a first frequency, and the AC signal operates at a second frequency during the arc condition, and the second frequency is at least double the first frequency.

11. A RF power generator system comprising:
a first RF power source configured to generate a first RF signal to a non-linear load;
a second RF power source configured to generate a second RF signal to the load; and
an arc detector configured to receive a sense signal that varies in accordance with the first RF signal, the arc detector further configured to:
determine whether a frequency of the sense signal is one of less than a first selected threshold or greater than a second selected threshold; and
indicate an arc condition when the frequency of the sense signal is one of less than the first selected threshold or greater than the second selected threshold.

12. The RF power generator system of claim 11 wherein the arc detector further comprises:
a level detector configured to receive the sense signal and to generate a level signal in accordance with the sense signal, wherein the level signal is assigned to at least one of a first state or a second state in accordance with a magnitude of the first RF signal; and
a counter configured to receive the level signal and to generate a frequency signal in accordance with a duration of at least one of the first state or the second state, wherein the frequency signal varies in accordance with the frequency of the sense signal, and wherein the frequency of the sense signal varies in accordance with the frequency of the first RF signal.

13. The RF power generator system of claim 11 wherein the arc detector further comprises:
a filter configured to receive the sense signal and filter out at least a portion of components from the second RF signal to generate a filtered signal;
a level detector configured to receive the sense signal and to generate a level signal in accordance with the sense signal, wherein the level signal is assigned to at least one of a first state or a second state in accordance with a magnitude of the first RF signal; and
a counter configured to receive the level signal and to generate a frequency signal in accordance with a duration of at least one of the first state or the second state, wherein the frequency signal varies in accordance with the frequency of the sense signal, and wherein the frequency of the sense signal varies in accordance with the frequency of the first RF signal.

14. The RF power generator system of claim 13 wherein the level detector is configured to convert the first RF signal from an analog signal to a binary signal and the binary signal includes the first state and the second state, wherein one of the first state is assigned when the magnitude of the first RF signal is one of greater than or less than a level threshold and the second state is assigned when the magnitude of the first RF signal is an other of greater than or less than the level threshold.

15. The RF power generator system of claim 11 wherein the arc detector further comprises:
an analog-to-digital converter configured to receive the sense signal and to output a digital signal that varies in accordance with a magnitude of the sense signal; and
a counter configured to receive the digital signal and determine a period of a portion of the sense signal in accordance with the digital signal, wherein the period of the portion of the sense signal varies in accordance with the frequency of the digital signal, and wherein the frequency of the sense signal varies in accordance with the frequency of the first RF signal.

16. The RF power generator system of claim 11 wherein the frequency of the frequency of the sense signal is determined using a Fast Fourier Transform (FFT).

17. A method for detecting an arc in a non-linear load, comprising:
detecting an AC signal applied to the load;
determining a frequency of the AC signal applied to the load; and
indicating an arc condition if the frequency meets a selected criteria.

18. The method of claim 17 wherein the selected criteria is met when the frequency is at least one of less than a first threshold or greater than a second threshold.

19. The method of claim 17 wherein determining the frequency further comprises:
converting a sensed signal that varies in accordance with the AC signal to a digital signal, wherein the digital signal includes one of a pair of states or a plurality of states, and wherein and the plurality of states are assigned into one or another of the pair of states; and
determining a duration of at least one of the pair of states in order to determine the frequency of the AC signal applied to the load.

20. The method of claim 17 wherein determining the frequency further comprises:
converting a sensed signal

Assignees

• Mks Instr Inc

Inventors

• Fisk Ii Larry J
• Gitlin Benjamin J
• Oldziej Mariusz
• Burry Aaron M
• Harrington Matthew G
• Radomski Aaron T

Classifications

• H01J37/32091

  the radio frequency energy being capacitively coupled to the plasma · CPC title

• H01J2237/24564

  Measurements of electric or magnetic variables, e.g. voltage, current, frequency · CPC title

• H01J37/32935 Primary

  Monitoring and controlling tubes by information coming from the object and/or discharge · CPC title

• H01J37/321 Primary

  the radio frequency energy being inductively coupled to the plasma · CPC title

• G01R23/16 Primary

  Spectrum analysis; Fourier analysis · CPC title