System of scanning electron microscope sample box and method of opening the same

Patent metadata

Field	Value
Publication number	US-12573583-B2
Application number	US-202118257213-A
Country	US
Kind code	B2
Filing date	Jan 29, 2021
Priority date	Dec 14, 2020
Publication date	Mar 10, 2026
Grant date	Mar 10, 2026

Abstract

A system of scanning electron microscope sample box and a method of opening the same are provided, including: a sample chamber ( 1 ); an exchange chamber ( 2 ) communicated with the sample chamber ( 1 ), a sample stage base ( 3 ) is disposed in the exchange chamber ( 2 ), the sample stage base ( 3 ) is subjected to an external force to be translated from the exchange chamber ( 2 ) to the sample chamber ( 1 ), and an inner wall of the exchange chamber ( 2 ) is provided with a pulling arm ( 4 ); and a sample box including a box body ( 5 ) and a box cover ( 6 ) sealing the box body ( 5 ), wherein the box body ( 5 ) is placed on the sample stage base ( 3 ) of the exchange chamber ( 2 ), and the box cover ( 6 ) is connected to the pulling arm ( 4 ), so that the box body ( 5 ) is separated from the box cover ( 6 ) when the sample stage base ( 3 ) is subjected to the external force to translate the box body ( 5 ) from the exchange chamber ( 2 ) to the sample chamber ( 1 ). The method of opening the scanning electron microscope sample box provided by the present disclosure is simple and is easy for implementation, reducing a difficulty and a cost of a process of manufacturing the sample box.

First claim

What is claimed is:

1 . A system of a scanning electron microscope sample box, comprising:
a sample chamber; an exchange chamber communicated with the sample chamber, wherein a sample stage base is disposed in the exchange chamber, the sample stage base is subjected to an external force to be translated from the exchange chamber to the sample chamber, and an inner wall of the exchange chamber is provided with a pulling arm; and a sample box comprising a box body and a box cover sealing the box body, wherein the box body is placed on the sample stage base of the exchange chamber, and the box cover is connected to the pulling arm, so that the box body is separated from the box cover when the sample stage base is subjected to the external force to translate the box body from the exchange chamber to the sample chamber.

2 . The system of the scanning electron microscope sample box of claim 1 , wherein the sample stage base comprises a sample rod for translating the box body of the sample box from the exchange chamber to the sample chamber.

3 . The system of the scanning electron microscope sample box of claim 1 , wherein a connection between the exchange chamber and the pulling arm comprises a fixed connection or a detachable connection.

4 . The system of the scanning electron microscope sample box of claim 1 , wherein a connection between the box cover and the pulling arm comprises a fixed connection or a detachable connection.

5 . The system of the scanning electron microscope sample box of claim 3 , wherein the detachable connection comprises an adhesive connection, a bolt connection, a buckle connection or a slot connection.

6 . A method of opening a scanning electron microscope sample box, comprising:
S 1 , preparing a sample box and sealing a box body by a box cover; S 2 , connecting one end of a pulling arm to an exchange chamber, connecting the other end of the pulling arm to the box cover, and placing the box body on a sample stage base; and S 3 , communicating the exchange chamber with a sample chamber, so that the box body is separated from the box cover when the sample stage base is subjected to an external force to translate the box body from the exchange chamber to the sample chamber.

7 . The method of claim 6 , wherein before S 3 , the method further comprises:
vacuumizing the exchange chamber.

8 . The method of claim 6 , wherein a manner of the box cover sealing the box body in S 1 is an adhesive sealing.

9 . The method of claim 6 , wherein a manner of connecting one end of the pulling arm to the exchange chamber in S 2 comprises a fixed connection or a detachable connection.

10 . The method of claim 9 , wherein the sample stage base being subjected to the external force in S 3 specifically comprises: translating the box body from the exchange chamber to the sample chamber by pushing a sample rod of the sample stage base.

11 . The system of the scanning electron microscope sample box of claim 4 , wherein the detachable connection comprises an adhesive connection, a bolt connection, a buckle connection or a slot connection.

Assignees

• Univ Science & Technology China

Inventors

• Zhou Hongmin
• Fu Shengquan
• Li Ming

Classifications

• H01J2237/204

  Means for introducing and/or outputting objects · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/26

  Electron or ion microscopes · CPC title

• H01J37/20 Primary

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• G01N23/22 Primary

  by measuring secondary emission from the material · CPC title